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H05H2001/4652
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ELECTRICITY
H05
Electric techniques
H05H
PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
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H05H2001/4652
Inductively coupled
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Patents Grants
last 30 patents
Information
Patent Grant
Harmonic cold plasma device and associated methods
Patent number
11,019,716
Issue date
May 25, 2021
Plasmology4, Inc.
Gregory A. Watson
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Torches and methods of using them
Patent number
10,993,309
Issue date
Apr 27, 2021
PerkinElmer Health Sciences, Inc.
Peter Morrisroe
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Microwave plasma spectrometer using dielectric resonator
Patent number
10,863,611
Issue date
Dec 8, 2020
Radom Corporation
Jovan Jevtic
G01 - MEASURING TESTING
Information
Patent Grant
Double-frequency power-driven inductively coupled plasma torch, and...
Patent number
10,785,860
Issue date
Sep 22, 2020
Korea Institute of Machinery & Materials
Hee-Chang Park
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Harmonic cold plasma device and associated methods
Patent number
10,674,594
Issue date
Jun 2, 2020
Plasmology4, Inc.
Gregory A. Watson
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Multifunctional radio frequency systems and methods for UV steriliz...
Patent number
10,648,728
Issue date
May 12, 2020
NXP USA, INC.
Pierre Marie Jean Piel
F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information
Patent Grant
Matchless plasma source for semiconductor wafer fabrication
Patent number
10,638,593
Issue date
Apr 28, 2020
Lam Research Corporation
Maolin Long
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Inductively coupled pulsed RF voltage multiplier
Patent number
10,631,395
Issue date
Apr 21, 2020
TRANSIENT PLASMA SYSTEMS, INC.
Jason M. Sanders
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrically short antennas with enhanced radiation resistance
Patent number
10,601,125
Issue date
Mar 24, 2020
Georgia Tech Research Corporation
Morris Cohen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Magnetic induction plasma source for semiconductor processes and eq...
Patent number
10,593,560
Issue date
Mar 17, 2020
Applied Materials, Inc.
Tae Seung Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Direct outlet toroidal plasma source
Patent number
10,573,496
Issue date
Feb 25, 2020
Applied Materials, Inc.
Dmitry Lubomirsky
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
H2-assisted slanted etching of high refractive index material
Patent number
10,502,958
Issue date
Dec 10, 2019
Facebook Technologies, LLC
Nihar Ranjan Mohanty
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Monopole antenna array source with phase shifted zones for semicond...
Patent number
10,431,427
Issue date
Oct 1, 2019
Applied Materials, Inc.
Qiwei Liang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing systems including side coils and methods related...
Patent number
10,340,121
Issue date
Jul 2, 2019
Lam Research Corporation
Maolin Long
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Counterflow sample introduction and devices, systems and methods us...
Patent number
10,327,319
Issue date
Jun 18, 2019
PerkinElmer Health Sciences, Inc.
Peter Morrisroe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microwave plasma spectrometer using dielectric resonator
Patent number
10,285,256
Issue date
May 7, 2019
Radom Corporation
Jovan Jevtic
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Matchless plasma source for semiconductor wafer fabrication
Patent number
10,264,663
Issue date
Apr 16, 2019
Lam Research Corporation
Maolin Long
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Torches and methods of using them
Patent number
10,187,967
Issue date
Jan 22, 2019
PerkinElmer Health Sciences, Inc.
Peter Morrisroe
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Oscillator generators and methods of using them
Patent number
10,104,754
Issue date
Oct 16, 2018
PerkinElmer Health Sciences, Inc.
Tak Shun Cheung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing device
Patent number
10,079,133
Issue date
Sep 18, 2018
Ulvac, Inc.
Takahide Murayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for plasma ignition with a self-resonating device
Patent number
10,076,020
Issue date
Sep 11, 2018
MKS Instruments, Inc.
Shaun T. Smith
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for plasma ignition with a self-resonating device
Patent number
9,736,920
Issue date
Aug 15, 2017
MKS Instruments, Inc.
Shaun T. Smith
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma generation device and internal combustion engine
Patent number
9,709,019
Issue date
Jul 18, 2017
Imagineering, Inc.
Yuji Ikeda
F02 - COMBUSTION ENGINES HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
Information
Patent Grant
Non-planar radial-flow plasma treatment system
Patent number
9,711,333
Issue date
Jul 18, 2017
Eastman Kodak Company
Kurt D. Sieber
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma generator using dielectric resonator
Patent number
9,706,635
Issue date
Jul 11, 2017
Radom Corporation
Jovan Jevtic
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
High-frequency power supply device
Patent number
9,648,719
Issue date
May 9, 2017
Shimadzu Corporation
Toshiya Habu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Oscillator generators and methods of using them
Patent number
9,635,750
Issue date
Apr 25, 2017
PerkinElmer Health Sciences, Inc.
Tak Shun Cheung
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
High voltage isolation of an inductively coupled plasma ion source...
Patent number
9,591,735
Issue date
Mar 7, 2017
FEI Company
Sean Kellogg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Harmonic cold plasma device and associated methods
Patent number
9,538,630
Issue date
Jan 3, 2017
Plasmology4, Inc.
Gregory A. Watson
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
High-frequency power supply device
Patent number
9,526,161
Issue date
Dec 20, 2016
Shimadzu Corporation
Toshiya Habu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PERFORMING RADIO FREQUENCY MATCHING CONTROL USING A MODEL-BASED DIG...
Publication number
20220208520
Publication date
Jun 30, 2022
Applied Materials, Inc.
Tao Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA SOURCE
Publication number
20210127476
Publication date
Apr 29, 2021
EMD CORPORATION
Akinori EBE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HARMONIC COLD PLASMA DEVICE AND ASSOCIATED METHODS
Publication number
20200359490
Publication date
Nov 12, 2020
Plasmology4, Inc.
Gregory A. Watson
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
REACTION GAS SUPPLY EQUIPMENT OF AN INDUCTIVE COUPLED PLASMA MASS S...
Publication number
20200294782
Publication date
Sep 17, 2020
Enrichflow Group Co., Ltd.
Wei Fan Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MATCHLESS PLASMA SOURCE FOR SEMICONDUCTOR WAFER FABRICATION
Publication number
20200253034
Publication date
Aug 6, 2020
LAM RESEARCH CORPORATION
Maolin Long
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
Harmonic Cold Plasma Device and Associated Methods
Publication number
20190269003
Publication date
Aug 29, 2019
Plasmology4, Inc.
Gregory A. Watson
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
INDUCTIVELY COUPLED PULSED RF VOLTAGE MULTIPLIER
Publication number
20190230779
Publication date
Jul 25, 2019
Transient Plasma Systems, Inc.
Jason M. Sanders
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
MATCHLESS PLASMA SOURCE FOR SEMICONDUCTOR WAFER FABRICATION
Publication number
20190215942
Publication date
Jul 11, 2019
LAM RESEARCH CORPORATION
Maolin Long
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PLASMA REACTOR HAVING A FUNCTION OF TUNING LOW FREQUENCY RF POWER D...
Publication number
20190206703
Publication date
Jul 4, 2019
Advanced Micro-Fabrication Equipment Inc, China
Kui ZHAO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Matchless Plasma Source for Semiconductor Wafer Fabrication
Publication number
20190116656
Publication date
Apr 18, 2019
LAM RESEARCH CORPORATION
Maolin Long
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MONOPOLE ANTENNA ARRAY SOURCE WITH PHASE SHIFTED ZONES FOR SEMICOND...
Publication number
20180342372
Publication date
Nov 29, 2018
Applied Materials, Inc.
Qiwei Liang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
DOUBLE-FREQUENCY POWER-DRIVEN INDUCTIVELY COUPLED PLASMA TORCH, AND...
Publication number
20180192504
Publication date
Jul 5, 2018
Korea Institute of Machinery and Materials
Hee-Chang PARK
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Inductive Plasma Source
Publication number
20170372870
Publication date
Dec 28, 2017
Mattson Technology, Inc.
Valery A. Godyak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OSCILLATOR GENERATORS AND METHODS OF USING THEM
Publication number
20170339775
Publication date
Nov 23, 2017
PerkinElmer Health Sciences, Inc.
Tak Shun Cheung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING DEVICE
Publication number
20170316917
Publication date
Nov 2, 2017
ULVAC, Inc.
Takahide MURAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and Method for Plasma Ignition with a Self-Resonating Device
Publication number
20170303382
Publication date
Oct 19, 2017
MKS Instruments Inc.
Shaun T. Smith
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH-FREQUENCY POWER SUPPLY DEVICE
Publication number
20170205287
Publication date
Jul 20, 2017
Shimadzu Corporation
Toshiya HABU
G01 - MEASURING TESTING
Information
Patent Application
Plasma Generator Using Dielectric Resonator
Publication number
20170027051
Publication date
Jan 26, 2017
Radom Corporation
Jovan Jevtic
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
OSCILLATOR GENERATORS AND METHODS OF USING THEM
Publication number
20160360602
Publication date
Dec 8, 2016
PerkinElmer Health Sciences, Inc.
Tak Shun Cheung
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Apparatus and Method for Plasma Ignition with a Self-Resonating Device
Publication number
20160234924
Publication date
Aug 11, 2016
MKS Instruments Inc.
Shaun T. Smith
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
HIGH-FREQUENCY POWER SUPPLY DEVICE
Publication number
20160066404
Publication date
Mar 3, 2016
Shimadzu Corporation
Toshiya HABU
G01 - MEASURING TESTING
Information
Patent Application
HIGH-FREQUENCY POWER SUPPLY DEVICE
Publication number
20160066405
Publication date
Mar 3, 2016
Shimadzu Corporation
Toshiya HABU
G01 - MEASURING TESTING
Information
Patent Application
Plasma Generator Using Dielectric Resonator
Publication number
20160029472
Publication date
Jan 28, 2016
Radom Corporation
Jovan Jevtic
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Microwave Plasma Spectrometer Using Dielectric Resonator
Publication number
20160025656
Publication date
Jan 28, 2016
Radom Corporation
Jovan Jevtic
G01 - MEASURING TESTING
Information
Patent Application
ANTENNA COVER AND PLASMA GENERATING DEVICE USING SAME
Publication number
20150162657
Publication date
Jun 11, 2015
SEN Corporation
Shiro Ninomiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GLOW DISCHARGE LAMP
Publication number
20150137682
Publication date
May 21, 2015
Centre National De La Recherche Scientifique (CNRS)
Ana Lacoste
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Harmonic Cold Plasma Device and Associated Methods
Publication number
20140354154
Publication date
Dec 4, 2014
Gregory A. WATSON
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PLASMA PROCESSING DEVICE
Publication number
20140150975
Publication date
Jun 5, 2014
EMD CORPORATION
Akinori Ebe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA GENERATION DEVICE AND INTERNAL COMBUSTION ENGINE
Publication number
20140026839
Publication date
Jan 30, 2014
IMAGINEERING, INC.
Yuji Ikeda
F02 - COMBUSTION ENGINES HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
Information
Patent Application
HYBRID PLASMA REACTOR
Publication number
20130175928
Publication date
Jul 11, 2013
Dae-Kyu CHOI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR