Inspection and correction, repair station in one unit, correction data in memory

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G05B2219/32231

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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G05B2219/32231Inspection and correction, repair station in one unit, correction data in memory

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Patents Grantslast 30 patents

Information Patent Grant
Recovery processing method to be adopted in substrate processing ap...
- Patent number 7,960,187
- Issue date Jun 14, 2011
- Tokyo Electron Limited
- Noriaki Shimizu
- G05 - CONTROLLING REGULATING
Information Patent Grant
Automated semiconductor wafer salvage during processing
- Patent number 7,364,922
- Issue date Apr 29, 2008
- Tokyo Electron Limited
- Noriaki Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing system and method
- Patent number 6,571,145
- Issue date May 27, 2003
- Mitutoyo Corporation
- Sadayuki Matsumiya
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Automatic soldering apparatus, apparatus and method for teaching sa...
- Patent number 5,542,600
- Issue date Aug 6, 1996
- Omron Corporation
- Shigeki Kobayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
RECOVERY PROCESSING METHOD TO BE ADOPTED IN SUBSTRATE PROCESSING AP...
- Publication number 20080223298
- Publication date Sep 18, 2008
- TOKYO ELECTRON LIMITED
- Noriaki Shimizu
- G05 - CONTROLLING REGULATING
Information Patent Application
Recovery processing method to be adopted in substrate processing ap...
- Publication number 20060162660
- Publication date Jul 27, 2006
- TOKYO ELECTRON LIMITED
- Noriaki Shimizu
- G05 - CONTROLLING REGULATING