Integrated loader, shuttle transfer

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Patents Grantslast 30 patents

Information Patent Grant
Methodology for chamber performance matching for semiconductor equi...
- Patent number 10,192,763
- Issue date Jan 29, 2019
- Applied Materials, Inc.
- Xuesong Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-storey goods storage arrangement
- Patent number 10,173,837
- Issue date Jan 8, 2019
- LOGEVO AB
- Bo Lindblom
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Shuttle transfer with linear Transducer feedback
- Patent number 5,511,933
- Issue date Apr 30, 1996
- Trantek, Incorporated
- Jack F. Herklotz
- G05 - CONTROLLING REGULATING
Information Patent Grant
Wafer polishing method and apparatus
- Patent number 5,498,196
- Issue date Mar 12, 1996
- Speedfam Corporation
- Chris E. Karlsrud
- G05 - CONTROLLING REGULATING
Information Patent Grant
Wafer polishing method and apparatus
- Patent number 5,498,199
- Issue date Mar 12, 1996
- Speedfam Corporation
- Chris E. Karlsrud
- G05 - CONTROLLING REGULATING
Information Patent Grant
Wafer polishing method and apparatus
- Patent number 5,329,732
- Issue date Jul 19, 1994
- Speedfam Corporation
- Chris E. Karlsrud
- G05 - CONTROLLING REGULATING
Information Patent Grant
3099873
- Patent number 3,099,873
- Issue date Aug 6, 1963
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR