Investigating impurities in semiconductor

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G01N2021/8461

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GPHYSICS G01Measuring instruments G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

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G01N2021/8461Investigating impurities in semiconductor

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Patents Grantslast 30 patents

Information Patent Grant
Optical diagnostics of semiconductor process using hyperspectral im...
- Patent number 12,165,937
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Yan Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for determining characteristics of semiconducto...
- Patent number 12,158,492
- Issue date Dec 3, 2024
- FemtoMetrix, Inc.
- Ming Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for determining suitability of silicon substrates for epitaxy
- Patent number 12,152,314
- Issue date Nov 26, 2024
- GlobalWafers Co., Ltd.
- Shan-Hui Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Blending of agricultural products via hyperspectral imaging and ana...
- Patent number 11,976,973
- Issue date May 7, 2024
- ALTRIA CLIENT SERVICES LLC
- Seetharama C. Deevi
- A24 - TOBACCO CIGARS CIGARETTES SMOKERS' REQUISITES
Information Patent Grant
Hyperspectral imaging system for monitoring agricultural products d...
- Patent number 11,946,807
- Issue date Apr 2, 2024
- ALTRIA CLIENT SERVICES LLC
- Henry M. Dante
- A24 - TOBACCO CIGARS CIGARETTES SMOKERS' REQUISITES
Information Patent Grant
On-line oil and foreign matter detection system and method employin...
- Patent number 11,946,806
- Issue date Apr 2, 2024
- ALTRIA CLIENT SERVICES LLC
- Henry M. Dante
- A24 - TOBACCO CIGARS CIGARETTES SMOKERS' REQUISITES
Information Patent Grant
System, method and computer program product for object examination
- Patent number 11,592,400
- Issue date Feb 28, 2023
- Applied Materials Israel Ltd.
- Saar Shabtay
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical diagnostics of semiconductor process using hyperspectral im...
- Patent number 11,538,723
- Issue date Dec 27, 2022
- Tokyo Electron Limited
- Yan Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical diagnostics of semiconductor process using hyperspectral im...
- Patent number 11,538,722
- Issue date Dec 27, 2022
- Tokyo Electron Limited
- Yan Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Evaluation method and manufacturing method of SiC epitaxial wafer
- Patent number 11,315,839
- Issue date Apr 26, 2022
- Showa Denko K.K.
- Yoshitaka Nishihara
- C30 - CRYSTAL GROWTH
Information Patent Grant
Blending of agricultural products via hyperspectral imaging and ana...
- Patent number 11,250,259
- Issue date Feb 15, 2022
- ALTRIA CLIENT SERVICES LLC
- Seetharama C. Deevi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Hyperspectral imaging system for monitoring agricultural products d...
- Patent number 11,250,261
- Issue date Feb 15, 2022
- ALTRIA CLIENT SERVICES LLC
- Henry M. Dante
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
On-line oil and foreign matter detection system and method employin...
- Patent number 11,222,203
- Issue date Jan 11, 2022
- ALTRIA CLIENT SERVICES LLC
- Henry M. Dante
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for quantification of process non uniformity using model-bas...
- Patent number 10,955,359
- Issue date Mar 23, 2021
- International Business Machines Corporation
- Robin Hsin-Kuo Chao
- G01 - MEASURING TESTING
Information Patent Grant
Blending of agricultural products via hyperspectral imaging and ana...
- Patent number 10,896,325
- Issue date Jan 19, 2021
- ALTRIA CLIENT SERVICES LLC
- Seetharama C. Deevi
- B07 - SEPARATING SOLIDS FROM SOLIDS SORTING
Information Patent Grant
System, method and computer program product for object examination
- Patent number 10,871,451
- Issue date Dec 22, 2020
- Applied Materials Israel Ltd.
- Saar Shabtay
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of evaluating insulated-gate semiconductor device
- Patent number 10,749,001
- Issue date Aug 18, 2020
- Fuji Electric Co., Ltd.
- Takayuki Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hyperspectral imaging system for monitoring agricultural products d...
- Patent number 10,706,283
- Issue date Jul 7, 2020
- ALTRIA CLIENT SERVICES LLC
- Henry M. Dante
- A24 - TOBACCO CIGARS CIGARETTES SMOKERS' REQUISITES
Information Patent Grant
Method of identifying defect regions in wafer
- Patent number 10,634,622
- Issue date Apr 28, 2020
- SK SILTRON CO., LTD.
- Jae Hyeong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
On-line oil and foreign matter detection system and method employin...
- Patent number 10,592,745
- Issue date Mar 17, 2020
- ALTRIA CLIENT SERVICES LLC
- Henry M. Dante
- B07 - SEPARATING SOLIDS FROM SOLIDS SORTING
Information Patent Grant
On-line oil and foreign matter detection system and method employin...
- Patent number 10,515,273
- Issue date Dec 24, 2019
- ALTRIA CLIENT SERVICES LLC
- Henry M. Dante
- A24 - TOBACCO CIGARS CIGARETTES SMOKERS' REQUISITES
Information Patent Grant
Semiconductor device inspection of metallic discontinuities
- Patent number 10,466,179
- Issue date Nov 5, 2019
- Rudoplh Technologies, Inc.
- Gurvinder Singh
- G01 - MEASURING TESTING
Information Patent Grant
System, method and computer program product for object examination
- Patent number 10,408,764
- Issue date Sep 10, 2019
- Applied Materials Israel Ltd.
- Saar Shabtay
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Overlay metrology using multiple parameter configurations
- Patent number 10,401,738
- Issue date Sep 3, 2019
- KLA-Tencor Corporation
- Andrew V. Hill
- G02 - OPTICS
Information Patent Grant
Monitoring method and apparatus for control of excimer laser annealing
- Patent number 10,121,687
- Issue date Nov 6, 2018
- Coherent Lasersystems GmbH & Co. KG
- Paul Van Der Wilt
- G02 - OPTICS
Information Patent Grant
System and method for hyperspectral imaging metrology
- Patent number 10,018,560
- Issue date Jul 10, 2018
- KLA-Tencor Corporation
- Andrew V. Hill
- G02 - OPTICS
Information Patent Grant
Blending of agricultural products via hyperspectral imaging and ana...
- Patent number 9,996,745
- Issue date Jun 12, 2018
- ALTRIA CLIENT SERVICES LLC
- Seetharama C. Deevi
- A24 - TOBACCO CIGARS CIGARETTES SMOKERS' REQUISITES
Information Patent Grant
On-line oil and foreign matter detection stystem and method employi...
- Patent number 9,886,631
- Issue date Feb 6, 2018
- ALTRIA CLIENT SERVICES LLC
- Henry M. Dante
- A24 - TOBACCO CIGARS CIGARETTES SMOKERS' REQUISITES
Information Patent Grant
Hyperspectral imaging system for monitoring agricultural products d...
- Patent number 9,870,505
- Issue date Jan 16, 2018
- ALTRIA CLIENT SERVICES LLC
- Henry M. Dante
- A24 - TOBACCO CIGARS CIGARETTES SMOKERS' REQUISITES
Information Patent Grant
System and method for non-contact wafer chucking
- Patent number 9,653,338
- Issue date May 16, 2017
- KLA-Tencor Corporation
- Luping Huang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
BLENDING OF AGRICULTURAL PRODUCTS VIA HYPERSPECTRAL IMAGING AND ANA...
- Publication number 20240230404
- Publication date Jul 11, 2024
- Altria Client Services LLC
- Seetharama C. DEEVI
- A24 - TOBACCO CIGARS CIGARETTES SMOKERS' REQUISITES
Information Patent Application
MEASUREMENT DEVIATION ANALYSIS FOR A SEMICONDUCTOR SPECIMEN
- Publication number 20240219313
- Publication date Jul 4, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Elazar Lars GERLAND
- G01 - MEASURING TESTING
Information Patent Application
ON-LINE OIL AND FOREIGN MATTER DETECTION SYSTEM AND METHOD EMPLOYIN...
- Publication number 20240192056
- Publication date Jun 13, 2024
- Altria Client Services LLC
- Henry M. DANTE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR EVALUATING WORK-AFFECTED LAYER
- Publication number 20240068958
- Publication date Feb 29, 2024
- KWANSEI GAKUIN EDUCATIONAL FOUNDATION
- Tadaaki KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOLUMINESCENCE MEASUREMENT DEVICE
- Publication number 20230400418
- Publication date Dec 14, 2023
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Renaud VARACHE
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
OPTICAL DIAGNOSTICS OF SEMICONDUCTOR PROCESS USING HYPERSPECTRAL IM...
- Publication number 20230097892
- Publication date Mar 30, 2023
- TOKYO ELECTRON LIMITED
- Yan Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF FORMING OPTICAL PROXIMITY CORRECTION MODEL AND METHOD OF...
- Publication number 20230062677
- Publication date Mar 2, 2023
- Samsung Electronics Co., Ltd.
- Sang Chul YEO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DETERMINING SUITABILITY OF CZOCHRALSKI GROWTH CONDITION...
- Publication number 20220403549
- Publication date Dec 22, 2022
- GLOBALWAFERS CO., LTD.
- Zheng Lu
- C30 - CRYSTAL GROWTH
Information Patent Application
EVALUATION METHOD AND MANUFACTURING METHOD OF SiC EPITAXIAL WAFER
- Publication number 20220223482
- Publication date Jul 14, 2022
- SHOWA DENKO K.K.
- Yoshitaka Nishihara
- C30 - CRYSTAL GROWTH
Information Patent Application
OPTICAL APPARATUS AND SOLID IMMERSION LENS
- Publication number 20220221705
- Publication date Jul 14, 2022
- HAMAMATSU PHOTONICS K. K.
- Soh UENOYAMA
- G01 - MEASURING TESTING
Information Patent Application
ABNORMALITY DETECTING METHOD AND ABNORMALITY DETECTING APPARATUS
- Publication number 20220018790
- Publication date Jan 20, 2022
- TOKYO ELECTRON LIMITED
- Yuka NAKASATO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR OBJECT EXAMINATION
- Publication number 20210109029
- Publication date Apr 15, 2021
- APPLIED MATERIALS ISRAEL LTD.
- Saar SHABTAY
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Optical Diagnostics of Semiconductor Process Using Hyperspectral Im...
- Publication number 20200373210
- Publication date Nov 26, 2020
- TOKYO ELECTRON LIMITED
- Yan Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYPERSPECTRAL IMAGING SYSTEM FOR MONITORING AGRICULTURAL PRODUCTS D...
- Publication number 20200257882
- Publication date Aug 13, 2020
- Altria Client Services LLC
- Henry M. DANTE
- B07 - SEPARATING SOLIDS FROM SOLIDS SORTING
Information Patent Application
ON-LINE OIL AND FOREIGN MATTER DETECTION SYSTEM AND METHOD EMPLOYIN...
- Publication number 20200089932
- Publication date Mar 19, 2020
- Altria Client Services LLC
- Henry M. DANTE
- B07 - SEPARATING SOLIDS FROM SOLIDS SORTING
Information Patent Application
SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR OBJECT EXAMINATION
- Publication number 20190391085
- Publication date Dec 26, 2019
- APPLIED MATERIALS ISRAEL LTD.
- Saar SHABTAY
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF EVALUATING INSULATED-GATE SEMICONDUCTOR DEVICE
- Publication number 20190172912
- Publication date Jun 6, 2019
- Fuji Electric Co., Ltd.
- Takayuki HIROSE
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR OBJECT EXAMINATION
- Publication number 20190079022
- Publication date Mar 14, 2019
- APPLIED MATERIALS ISRAEL LTD.
- Saar SHABTAY
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Overlay Metrology Using Multiple Parameter Configurations
- Publication number 20190041329
- Publication date Feb 7, 2019
- KLA-Tencor Corporation
- Andrew V. Hill
- G01 - MEASURING TESTING
Information Patent Application
BLENDING OF AGRICULTURAL PRODUCTS VIA HYPERSPECTRAL IMAGING AND ANA...
- Publication number 20180285621
- Publication date Oct 4, 2018
- Altria Client Services LLC
- Seetharama C. DEEVI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ON-LINE OIL AND FOREIGN MATTER DETECTION SYSTEM AND METHOD EMPLOYIN...
- Publication number 20180121706
- Publication date May 3, 2018
- Altria Client Services LLC
- Henry M. Dante
- B07 - SEPARATING SOLIDS FROM SOLIDS SORTING
Information Patent Application
HYPERSPECTRAL IMAGING SYSTEM FOR MONITORING AGRICULTURAL PRODUCTS D...
- Publication number 20180107857
- Publication date Apr 19, 2018
- Altria Client Services LLC
- Henry M. Dante
- B07 - SEPARATING SOLIDS FROM SOLIDS SORTING
Information Patent Application
System and Method for Hyperspectral Imaging Metrology
- Publication number 20170219487
- Publication date Aug 3, 2017
- KLA-Tencor Corporation
- Andrew V. Hill
- G02 - OPTICS
Information Patent Application
MONITORING METHOD AND APPARATUS FOR CONTROL OF EXCIMER LASER ANNEALING
- Publication number 20160233116
- Publication date Aug 11, 2016
- COHERENT LASERSYSTEMS GMBH & CO. KG
- Paul VAN DER WILT
- G02 - OPTICS
Information Patent Application
BLENDING OF AGRICULTURAL PRODUCTS VIA HYPERSPECTRAL IMAGING AND ANA...
- Publication number 20150289557
- Publication date Oct 15, 2015
- Altria Client Services Inc.
- Seetharama C. Deevi
- A24 - TOBACCO CIGARS CIGARETTES SMOKERS' REQUISITES
Information Patent Application
MONITORING METHOD AND APPARATUS FOR CONTROL OF EXCIMER LASER ANNEALING
- Publication number 20150247808
- Publication date Sep 3, 2015
- COHERENT LASERSYSTEMS GMBH & CO. KG
- Paul VAN DER WILT
- G02 - OPTICS
Information Patent Application
APPARATUS AND METHODS FOR COMBINED BRIGHTFIELD, DARKFIELD, AND PHOT...
- Publication number 20150226676
- Publication date Aug 13, 2015
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR QUANTIFICATION OF PROCESS NON-UNIFORMITY USING MODEL-BAS...
- Publication number 20150134286
- Publication date May 14, 2015
- International Business Machines Corporation
- Robin Hsin-Kuo Chao
- G01 - MEASURING TESTING
Information Patent Application
Three-Dimensional Hot Spot Localization
- Publication number 20140346360
- Publication date Nov 27, 2014
- DCG SYSTEMS, INC.
- Frank Altmann
- G01 - MEASURING TESTING
Information Patent Application
STAGE DEVICE AND DRIVING METHOD THEREOF
- Publication number 20140268171
- Publication date Sep 18, 2014
- Samsung Electronics Co., Ltd.
- Sang-Don Jang
- G01 - MEASURING TESTING

Investigating impurities in semiconductor

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Optical diagnostics of semiconductor process using hyperspectral im...

Systems and methods for determining characteristics of semiconducto...

Methods for determining suitability of silicon substrates for epitaxy

Blending of agricultural products via hyperspectral imaging and ana...

Hyperspectral imaging system for monitoring agricultural products d...

On-line oil and foreign matter detection system and method employin...

System, method and computer program product for object examination

Optical diagnostics of semiconductor process using hyperspectral im...

Optical diagnostics of semiconductor process using hyperspectral im...

Evaluation method and manufacturing method of SiC epitaxial wafer

Blending of agricultural products via hyperspectral imaging and ana...

Hyperspectral imaging system for monitoring agricultural products d...

On-line oil and foreign matter detection system and method employin...

Method for quantification of process non uniformity using model-bas...

Blending of agricultural products via hyperspectral imaging and ana...

System, method and computer program product for object examination

Method of evaluating insulated-gate semiconductor device

Hyperspectral imaging system for monitoring agricultural products d...

Method of identifying defect regions in wafer

On-line oil and foreign matter detection system and method employin...

On-line oil and foreign matter detection system and method employin...

Semiconductor device inspection of metallic discontinuities

System, method and computer program product for object examination

Overlay metrology using multiple parameter configurations

Monitoring method and apparatus for control of excimer laser annealing

System and method for hyperspectral imaging metrology

Blending of agricultural products via hyperspectral imaging and ana...

On-line oil and foreign matter detection stystem and method employi...

Hyperspectral imaging system for monitoring agricultural products d...

System and method for non-contact wafer chucking

Patents Applicationslast 30 patents

BLENDING OF AGRICULTURAL PRODUCTS VIA HYPERSPECTRAL IMAGING AND ANA...

MEASUREMENT DEVIATION ANALYSIS FOR A SEMICONDUCTOR SPECIMEN

ON-LINE OIL AND FOREIGN MATTER DETECTION SYSTEM AND METHOD EMPLOYIN...

METHOD AND SYSTEM FOR EVALUATING WORK-AFFECTED LAYER

PHOTOLUMINESCENCE MEASUREMENT DEVICE

OPTICAL DIAGNOSTICS OF SEMICONDUCTOR PROCESS USING HYPERSPECTRAL IM...

METHOD OF FORMING OPTICAL PROXIMITY CORRECTION MODEL AND METHOD OF...

METHODS FOR DETERMINING SUITABILITY OF CZOCHRALSKI GROWTH CONDITION...

EVALUATION METHOD AND MANUFACTURING METHOD OF SiC EPITAXIAL WAFER

OPTICAL APPARATUS AND SOLID IMMERSION LENS

ABNORMALITY DETECTING METHOD AND ABNORMALITY DETECTING APPARATUS

SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR OBJECT EXAMINATION

Optical Diagnostics of Semiconductor Process Using Hyperspectral Im...

HYPERSPECTRAL IMAGING SYSTEM FOR MONITORING AGRICULTURAL PRODUCTS D...

ON-LINE OIL AND FOREIGN MATTER DETECTION SYSTEM AND METHOD EMPLOYIN...

SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR OBJECT EXAMINATION

METHOD OF EVALUATING INSULATED-GATE SEMICONDUCTOR DEVICE

SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR OBJECT EXAMINATION

Overlay Metrology Using Multiple Parameter Configurations

BLENDING OF AGRICULTURAL PRODUCTS VIA HYPERSPECTRAL IMAGING AND ANA...

ON-LINE OIL AND FOREIGN MATTER DETECTION SYSTEM AND METHOD EMPLOYIN...

HYPERSPECTRAL IMAGING SYSTEM FOR MONITORING AGRICULTURAL PRODUCTS D...

System and Method for Hyperspectral Imaging Metrology

MONITORING METHOD AND APPARATUS FOR CONTROL OF EXCIMER LASER ANNEALING

BLENDING OF AGRICULTURAL PRODUCTS VIA HYPERSPECTRAL IMAGING AND ANA...

MONITORING METHOD AND APPARATUS FOR CONTROL OF EXCIMER LASER ANNEALING

APPARATUS AND METHODS FOR COMBINED BRIGHTFIELD, DARKFIELD, AND PHOT...

METHOD FOR QUANTIFICATION OF PROCESS NON-UNIFORMITY USING MODEL-BAS...

Three-Dimensional Hot Spot Localization

STAGE DEVICE AND DRIVING METHOD THEREOF