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Job, recipe cascading: no delay, next job is started immediatly when first is finished
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Industry
CPC
G05B2219/32275
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Parent Industries
G
PHYSICS
G05
Controlling systems
G05B
CONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B2219/00
Program-control systems
Current Industry
G05B2219/32275
Job, recipe cascading: no delay, next job is started immediatly when first is finished
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Patents Grants
last 30 patents
Information
Patent Grant
Methods and apparatus to prevent interference between processing ch...
Patent number
11,335,577
Issue date
May 17, 2022
Applied Materials, Inc.
Fuhong Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus to prevent interference between processing ch...
Patent number
10,438,828
Issue date
Oct 8, 2019
Applied Materials, Inc.
Fuhong Zhang
G05 - CONTROLLING REGULATING
Information
Patent Grant
Recipe cascading in a wafer processing system
Patent number
7,052,919
Issue date
May 30, 2006
ASML Holding N.V.
Hilario Oh
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Robot pre-positioning in a wafer processing system
Patent number
6,952,622
Issue date
Oct 4, 2005
ASML Holding N.V.
Dikran Babikian
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Robot pre-positioning in a wafer processing system
Patent number
6,865,437
Issue date
Mar 8, 2005
ASML Holdings N.V.
Dikran Babikian
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Recipe cascading in a wafer processing system
Patent number
6,678,572
Issue date
Jan 13, 2004
ASML Holdings, N.V.
Hilario Oh
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Patents Applications
last 30 patents
Information
Patent Application
Methods And Apparatus To Prevent Interference Between Processing Ch...
Publication number
20200035527
Publication date
Jan 30, 2020
Applied Materials, Inc.
Fuhong Zhang
G05 - CONTROLLING REGULATING
Information
Patent Application
VERTICAL FURNACE HAVING LOT-UNIT TRANSFER FUNCTION AND RELATED TRAN...
Publication number
20080255697
Publication date
Oct 16, 2008
Samsung Electronics Co., Ltd.
Jae-Woo CHUNG
G05 - CONTROLLING REGULATING
Information
Patent Application
System for controlling production of electronic devices, system and...
Publication number
20070233302
Publication date
Oct 4, 2007
Kunihiro Miyazaki
G05 - CONTROLLING REGULATING
Information
Patent Application
System for controlling a plurality of lot processes, method for con...
Publication number
20060223334
Publication date
Oct 5, 2006
Kazuo Saki
G05 - CONTROLLING REGULATING
Information
Patent Application
Recipe cascading in a wafer processing system
Publication number
20040087187
Publication date
May 6, 2004
Hilario Oh
G05 - CONTROLLING REGULATING
Information
Patent Application
Robot pre-positioning in a wafer processing system
Publication number
20040078109
Publication date
Apr 22, 2004
Dikran Babikian
G05 - CONTROLLING REGULATING