Lithography

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CPC
G05B2219/45028

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

Current Industry

G05B2219/45028Lithography

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor wafer cooling
- Patent number 12,282,318
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Yao Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Matching process controllers for improved matching of process
- Patent number 12,265,380
- Issue date Apr 1, 2025
- Applied Materials, Inc.
- James Robert Moyne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Machine learning on overlay management
- Patent number 12,237,188
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tzu-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for decision making in a semiconductor manufacturing process
- Patent number 12,204,252
- Issue date Jan 21, 2025
- ASML Netherlands B.V.
- Arnaud Hubaux
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Devices and methods for examining and/or processing an element for...
- Patent number 12,135,540
- Issue date Nov 5, 2024
- Carl Zeiss SMT GmbH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device manufacturing methods
- Patent number 12,078,935
- Issue date Sep 3, 2024
- ASML Netherlands B.V.
- Rizvi Rahman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography method using multi-scale simulation, semiconductor devi...
- Patent number 12,072,637
- Issue date Aug 27, 2024
- Samsung Electronics Co., Ltd.
- Byunghoon Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fast effective resistance estimation using machine learning regress...
- Patent number 12,032,889
- Issue date Jul 9, 2024
- Synopsys, Inc.
- Jong Beom Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Metal additive manufacturing qualification test artifact
- Patent number 12,019,430
- Issue date Jun 25, 2024
- Board of Regents, The University of Texas System
- Hunter Taylor
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Grant
System and method for shaping a film with a scaled calibration meas...
- Patent number 11,994,797
- Issue date May 28, 2024
- Canon Kabushiki Kaisha
- Nilabh K. Roy
- G05 - CONTROLLING REGULATING
Information Patent Grant
Determining a correction to a process
- Patent number 11,994,845
- Issue date May 28, 2024
- ASML Netherlands B.V.
- Sarathi Roy
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Patterns on objects in additive manufacturing
- Patent number 11,964,436
- Issue date Apr 23, 2024
- Hewlett-Packard Development Company, L.P.
- Wei Huang
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Method and system of reducing charged particle beam write time
- Patent number 11,886,166
- Issue date Jan 30, 2024
- D2S, Inc.
- Akira Fujimura
- G05 - CONTROLLING REGULATING
Information Patent Grant
Semiconductor wafer cooling
- Patent number 11,768,484
- Issue date Sep 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Yao Lee
- G05 - CONTROLLING REGULATING
Information Patent Grant
Synchronized parallel tile computation for large area lithography s...
- Patent number 11,747,786
- Issue date Sep 5, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Danping Peng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Patterns of variable opacity in additive manufacturing
- Patent number 11,733,676
- Issue date Aug 22, 2023
- Hewlett-Packard Development Company L.P.
- Pol Fornos Martinez
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Method for decision making in a semiconductor manufacturing process
- Patent number 11,687,007
- Issue date Jun 27, 2023
- ASML Netherlands B.V.
- Arnaud Hubaux
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Virtual cross metrology-based modeling of semiconductor fabrication...
- Patent number 11,687,066
- Issue date Jun 27, 2023
- SIEMENS INDUSTRY SOFTWARE INC.
- Juan Andres Torres Robles
- G05 - CONTROLLING REGULATING
Information Patent Grant
Patterns of variable reflectance in additive manufacturing
- Patent number 11,673,332
- Issue date Jun 13, 2023
- Hewlett-Packard Development Company, L.P.
- Aja Hartman
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Machine learning on overlay management
- Patent number 11,626,304
- Issue date Apr 11, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tzu-Cheng Lin
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods of tuning process models
- Patent number 11,614,690
- Issue date Mar 28, 2023
- ASML Netherlands B.V.
- Mu Feng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system of reducing charged particle beam write time
- Patent number 11,604,451
- Issue date Mar 14, 2023
- D2S, Inc.
- Akira Fujimura
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and system of reducing charged particle beam write time
- Patent number 11,592,802
- Issue date Feb 28, 2023
- D2S, Inc.
- Akira Fujimura
- G05 - CONTROLLING REGULATING
Information Patent Grant
Patterns on objects in additive manufacturing
- Patent number 11,577,463
- Issue date Feb 14, 2023
- Hewlett-Packard Development Company, L.P.
- Wei Huang
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Lithography method using multi-scale simulation, semiconductor devi...
- Patent number 11,493,850
- Issue date Nov 8, 2022
- Samsung Electronics Co., Ltd.
- Byunghoon Lee
- G05 - CONTROLLING REGULATING
Information Patent Grant
Control system, method to increase a bandwidth of a control system,...
- Patent number 11,454,938
- Issue date Sep 27, 2022
- ASML Netherlands B.V.
- Marcel François Heertjes
- G05 - CONTROLLING REGULATING
Information Patent Grant
Device manufacturing methods
- Patent number 11,442,366
- Issue date Sep 13, 2022
- ASML Netherlands B.V.
- Rizvi Rahman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of simulating resist pattern, resist material and method of...
- Patent number 11,353,793
- Issue date Jun 7, 2022
- Tokyo Electron Limited
- Seiji Nagahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Error detection and correction in lithography processing
- Patent number 11,347,153
- Issue date May 31, 2022
- Canon Kabushiki Kaisha
- Yosuke Takarada
- G05 - CONTROLLING REGULATING
Information Patent Grant
Synchronized parallel tile computation for large area lithography s...
- Patent number 11,340,584
- Issue date May 24, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Danping Peng
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR WAFER COOLING
- Publication number 20250216841
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Yao LEE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MATCHING PROCESS CONTROLLERS FOR IMPROVED MATCHING OF PROCESS
- Publication number 20250199521
- Publication date Jun 19, 2025
- Applied Materials, Inc.
- James Robert Moyne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL CONTROL SYSTEMS, MODELS, AND MANUFACTURING PROCESSES IN LIT...
- Publication number 20250028298
- Publication date Jan 23, 2025
- ASML NETHERLANDS B.V.
- Duan-Fu Stephen HSU
- G05 - CONTROLLING REGULATING
Information Patent Application
TECHNIQUES FOR ADDING AND REMOVING STRUCTURAL FEATURES DURING GRADI...
- Publication number 20240369941
- Publication date Nov 7, 2024
- X Development LLC
- Aaditya Chandrasekhar
- G05 - CONTROLLING REGULATING
Information Patent Application
DETERMINING A CORRECTION TO A PROCESS
- Publication number 20240345569
- Publication date Oct 17, 2024
- ASML NETHERLANDS B.V.
- Sarathi ROY
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LITHOGRAPHY MODEL GENERATING METHOD BASED ON DEEP LEARNING, AND MAS...
- Publication number 20230418260
- Publication date Dec 28, 2023
- Samsung Electronics Co., Ltd.
- Sangchul Yeo
- G05 - CONTROLLING REGULATING
Information Patent Application
SEMICONDUCTOR WAFER COOLING
- Publication number 20230384776
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Yao LEE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LITHOGRAPHY DEVICE, LITHOGRAPHY METHOD, AND ARTICLE MANUFACTURING M...
- Publication number 20230350313
- Publication date Nov 2, 2023
- Canon Kabushiki Kaisha
- KAZUHIRO SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DECISION MAKING IN A SEMICONDUCTOR MANUFACTURING PROCESS
- Publication number 20230333482
- Publication date Oct 19, 2023
- ASML NETHERLANDS B.V.
- Arnaud HUBAUX
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MACHINE LEARNING ON OVERLAY MANAGEMENT
- Publication number 20230223287
- Publication date Jul 13, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tzu-Cheng LIN
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND SYSTEM OF REDUCING CHARGED PARTICLE BEAM WRITE TIME
- Publication number 20230205177
- Publication date Jun 29, 2023
- D2S, INC.
- Akira Fujimura
- G05 - CONTROLLING REGULATING
Information Patent Application
CONTROL APPARATUS, ADJUSTING METHOD THEREOF, LITHOGRAPHY APPARATUS,...
- Publication number 20230176548
- Publication date Jun 8, 2023
- Canon Kabushiki Kaisha
- HIROKAZU KUSAYANAGI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERNS ON OBJECTS IN ADDITIVE MANUFACTURING
- Publication number 20230124156
- Publication date Apr 20, 2023
- Hewlett-Packard Development Company, L.P.
- Wei Huang
- G05 - CONTROLLING REGULATING
Information Patent Application
VIRTUAL CROSS METROLOGY-BASED MODELING OF SEMICONDUCTOR FABRICATION...
- Publication number 20230066516
- Publication date Mar 2, 2023
- Siemens Industry Software Inc.
- Juan Andres Torres Robles
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY METHOD USING MULTI-SCALE SIMULATION, SEMICONDUCTOR DEVI...
- Publication number 20230047588
- Publication date Feb 16, 2023
- Seoul National University R&DB Foundation
- Byunghoon Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE MANUFACTURING METHODS
- Publication number 20230004095
- Publication date Jan 5, 2023
- ASML NETHERLANDS B.V.
- Rizvi RAHMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR WAFER COOLING
- Publication number 20220317668
- Publication date Oct 6, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Yung-Yao LEE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Synchronized Parallel Tile Computation for Large Area Lithography S...
- Publication number 20220291659
- Publication date Sep 15, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Danping Peng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and Method for Shaping a Film with a Scaled Calibration Meas...
- Publication number 20220128901
- Publication date Apr 28, 2022
- Canon Kabushiki Kaisha
- Nilabh K. Roy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DECISION MAKING IN A SEMICONDUCTOR MANUFACTURING PROCESS
- Publication number 20220082949
- Publication date Mar 17, 2022
- ASML NETHERLANDS B.V.
- Arnaud HUBAUX
- G05 - CONTROLLING REGULATING
Information Patent Application
Metal Additive Manufacturing Qualification Test Artifact
- Publication number 20220004173
- Publication date Jan 6, 2022
- Board of Regents, The University of Texas System
- Hunter Taylor
- G05 - CONTROLLING REGULATING
Information Patent Application
PATTERNS ON OBJECTS IN ADDITIVE MANUFACTURING
- Publication number 20210394445
- Publication date Dec 23, 2021
- Hewlett-Packard Development Company, L.P.
- Wei Huang
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
DETERMINING A CORRECTION TO A PROCESS
- Publication number 20210333785
- Publication date Oct 28, 2021
- ASML NETHERLANDS B.V.
- Sarathi ROY
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTI-OBJECTIVE CALIBRATIONS OF LITHOGRAPHY MODELS
- Publication number 20210216059
- Publication date Jul 15, 2021
- Mentor Graphics Corporation
- Huikan Liu
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND SYSTEM OF REDUCING CHARGED PARTICLE BEAM WRITE TIME
- Publication number 20210208569
- Publication date Jul 8, 2021
- D2S, INC.
- Akira Fujimura
- G05 - CONTROLLING REGULATING
Information Patent Application
Synchronized Parallel Tile Computation for Large Area Lithography S...
- Publication number 20210181713
- Publication date Jun 17, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Danping Peng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MACHINE LEARNING ON OVERLAY MANAGEMENT
- Publication number 20210175105
- Publication date Jun 10, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tzu-Cheng LIN
- G05 - CONTROLLING REGULATING
Information Patent Application
DETERMINING A CORRECTION TO A PROCESS
- Publication number 20210165399
- Publication date Jun 3, 2021
- ASML NETHERLANDS B.V.
- Sarathi ROY
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEVICES AND METHODS FOR EXAMINING AND/OR PROCESSING AN ELEMENT FOR...
- Publication number 20210132594
- Publication date May 6, 2021
- Carl Zeiss SMT GMBH
- Michael Budach
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND SYSTEM OF REDUCING CHARGED PARTICLE BEAM WRITE TIME
- Publication number 20210116884
- Publication date Apr 22, 2021
- D2S, INC.
- Akira Fujimura
- G05 - CONTROLLING REGULATING

Lithography

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor wafer cooling

Matching process controllers for improved matching of process

Machine learning on overlay management

Method for decision making in a semiconductor manufacturing process

Devices and methods for examining and/or processing an element for...

Device manufacturing methods

Lithography method using multi-scale simulation, semiconductor devi...

Fast effective resistance estimation using machine learning regress...

Metal additive manufacturing qualification test artifact

System and method for shaping a film with a scaled calibration meas...

Determining a correction to a process

Patterns on objects in additive manufacturing

Method and system of reducing charged particle beam write time

Semiconductor wafer cooling

Synchronized parallel tile computation for large area lithography s...

Patterns of variable opacity in additive manufacturing

Method for decision making in a semiconductor manufacturing process

Virtual cross metrology-based modeling of semiconductor fabrication...

Patterns of variable reflectance in additive manufacturing

Machine learning on overlay management

Methods of tuning process models

Method and system of reducing charged particle beam write time

Method and system of reducing charged particle beam write time

Patterns on objects in additive manufacturing

Lithography method using multi-scale simulation, semiconductor devi...

Control system, method to increase a bandwidth of a control system,...

Device manufacturing methods

Method of simulating resist pattern, resist material and method of...

Error detection and correction in lithography processing

Synchronized parallel tile computation for large area lithography s...

Patents Applicationslast 30 patents

SEMICONDUCTOR WAFER COOLING

MATCHING PROCESS CONTROLLERS FOR IMPROVED MATCHING OF PROCESS

THERMAL CONTROL SYSTEMS, MODELS, AND MANUFACTURING PROCESSES IN LIT...

TECHNIQUES FOR ADDING AND REMOVING STRUCTURAL FEATURES DURING GRADI...

DETERMINING A CORRECTION TO A PROCESS

LITHOGRAPHY MODEL GENERATING METHOD BASED ON DEEP LEARNING, AND MAS...

SEMICONDUCTOR WAFER COOLING

LITHOGRAPHY DEVICE, LITHOGRAPHY METHOD, AND ARTICLE MANUFACTURING M...

METHOD FOR DECISION MAKING IN A SEMICONDUCTOR MANUFACTURING PROCESS

MACHINE LEARNING ON OVERLAY MANAGEMENT

METHOD AND SYSTEM OF REDUCING CHARGED PARTICLE BEAM WRITE TIME

CONTROL APPARATUS, ADJUSTING METHOD THEREOF, LITHOGRAPHY APPARATUS,...

PATTERNS ON OBJECTS IN ADDITIVE MANUFACTURING

VIRTUAL CROSS METROLOGY-BASED MODELING OF SEMICONDUCTOR FABRICATION...

LITHOGRAPHY METHOD USING MULTI-SCALE SIMULATION, SEMICONDUCTOR DEVI...

DEVICE MANUFACTURING METHODS

SEMICONDUCTOR WAFER COOLING

Synchronized Parallel Tile Computation for Large Area Lithography S...

System and Method for Shaping a Film with a Scaled Calibration Meas...

METHOD FOR DECISION MAKING IN A SEMICONDUCTOR MANUFACTURING PROCESS

Metal Additive Manufacturing Qualification Test Artifact

PATTERNS ON OBJECTS IN ADDITIVE MANUFACTURING

DETERMINING A CORRECTION TO A PROCESS

MULTI-OBJECTIVE CALIBRATIONS OF LITHOGRAPHY MODELS

METHOD AND SYSTEM OF REDUCING CHARGED PARTICLE BEAM WRITE TIME

Synchronized Parallel Tile Computation for Large Area Lithography S...

MACHINE LEARNING ON OVERLAY MANAGEMENT

DETERMINING A CORRECTION TO A PROCESS

DEVICES AND METHODS FOR EXAMINING AND/OR PROCESSING AN ELEMENT FOR...

METHOD AND SYSTEM OF REDUCING CHARGED PARTICLE BEAM WRITE TIME