Load unload with two robots, one to load, other to unload

Patents Grantslast 30 patents

  • Information Patent Grant

    Sputtering magnetron

    • Patent number 6,156,171
    • Issue date Dec 5, 2000
    • Seagate Technology, Inc.
    • Dennis R. Hollars
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Heating system for high throughput sputtering

    • Patent number 5,972,184
    • Issue date Oct 26, 1999
    • Seagate Technology, Inc.
    • Dennis R. Hollars
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Apparatus and method for high throughput sputtering

    • Patent number 5,814,196
    • Issue date Sep 29, 1998
    • Conner Peripherals, Inc.
    • Dennis R. Hollars
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Apparatus and method for high throughput sputtering

    • Patent number 5,683,561
    • Issue date Nov 4, 1997
    • Conner Peripherals, Inc.
    • Dennis R. Hollars
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents