Masking, project image on wafer semiconductor, photo tracer

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CPC
G05B2219/45027

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

Current Industry

G05B2219/45027Masking, project image on wafer semiconductor, photo tracer

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor wafer cooling
- Patent number 11,768,484
- Issue date Sep 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Yao Lee
- G05 - CONTROLLING REGULATING
Information Patent Grant
Synchronized parallel tile computation for large area lithography s...
- Patent number 11,747,786
- Issue date Sep 5, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Danping Peng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Synchronized parallel tile computation for large area lithography s...
- Patent number 11,340,584
- Issue date May 24, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Danping Peng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Synchronized parallel tile computation for large area lithography s...
- Patent number 10,915,090
- Issue date Feb 9, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Danping Peng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Mask process aware calibration using mask pattern fidelity inspections
- Patent number 10,725,454
- Issue date Jul 28, 2020
- International Business Machines Corporation
- Ravi K. Bonam
- G05 - CONTROLLING REGULATING
Information Patent Grant
Synchronized parallel tile computation for large area lithography s...
- Patent number 10,671,052
- Issue date Jun 2, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Daniel Beylkin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for controlling semiconductor manufacturing facil...
- Patent number 10,553,464
- Issue date Feb 4, 2020
- Samsung Electronics Co., Ltd.
- Jae Won Jeong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for defocus detection
- Patent number 10,372,113
- Issue date Aug 6, 2019
- KLA-Tencor Corporation
- Xuguang Jiang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for grouping region of interest of mask pattern and measurin...
- Patent number 9,892,500
- Issue date Feb 13, 2018
- Samsung Electronics Co., Ltd.
- Hyung-Joo Lee
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of correcting overlay error
- Patent number 9,400,435
- Issue date Jul 26, 2016
- United Microelectronics Corp.
- En-Chiuan Liou
- G05 - CONTROLLING REGULATING
Information Patent Grant
Program for controlling laser apparatus and recording medium for re...
- Patent number 8,338,216
- Issue date Dec 25, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Akiharu Miyanaga
- G05 - CONTROLLING REGULATING
Information Patent Grant
Position control system, a lithographic apparatus and a method for...
- Patent number 8,279,401
- Issue date Oct 2, 2012
- ASML Netherlands B.V.
- Michael Johannes Vervoordeldonk
- G05 - CONTROLLING REGULATING
Information Patent Grant
Program for controlling laser apparatus and recording medium for re...
- Patent number 7,588,974
- Issue date Sep 15, 2009
- Semiconductor Energy Laboratory Co., Ltd.
- Akiharu Miyanaga
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Program for controlling laser apparatus and recording medium for re...
- Patent number 7,133,737
- Issue date Nov 7, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Akiharu Miyanaga
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Management system, management method and apparatus, and management...
- Patent number 7,010,380
- Issue date Mar 7, 2006
- Canon Kabushiki Kaisha
- Koichi Sentoku
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and arrangement for controlling image size of integrated cir...
- Patent number 6,606,533
- Issue date Aug 12, 2003
- International Business Machines Corporation
- Charles A. Whiting
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Staging apparatus and method, and method for manufacturing the stag...
- Patent number 6,272,763
- Issue date Aug 14, 2001
- Nikon Corporation
- Atsushi Yamaguchi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Correction of pattern-dependent errors in a particle beam lithograp...
- Patent number 6,177,680
- Issue date Jan 23, 2001
- International Business Machines Corporation
- Gregory J. Dick
- G05 - CONTROLLING REGULATING
Information Patent Grant
Projection exposure apparatus and method that floats a plate
- Patent number 6,094,255
- Issue date Jul 25, 2000
- Nikon Corporation
- Kazuya Ota
- G05 - CONTROLLING REGULATING
Information Patent Grant
Staging apparatus and method, and method for manufacturing the stag...
- Patent number 5,983,513
- Issue date Nov 16, 1999
- Nikon Corporation
- Atsushi Yamaguchi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for wafer disposition based on systematic erro...
- Patent number 5,960,185
- Issue date Sep 28, 1999
- International Business Machines Corporation
- Trang Diem Nguyen
- G05 - CONTROLLING REGULATING
Information Patent Grant
Work supplying method and apparatus to batch process apparatus for...
- Patent number 5,930,137
- Issue date Jul 27, 1999
- NEC Corporation
- Yoichi Togashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Staging apparatus
- Patent number 5,832,620
- Issue date Nov 10, 1998
- Nikon Corporation
- Atsushi Yamaguchi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Positioning method and positioning system
- Patent number 5,661,388
- Issue date Aug 26, 1997
- Canon Kabushiki Kaisha
- Hiroshi Kurosawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Staging apparatus
- Patent number 5,502,899
- Issue date Apr 2, 1996
- Nikon Corporation
- Atsushi Yamaguchi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for enhancing optical photoplotter accuracy
- Patent number 4,851,656
- Issue date Jul 25, 1989
- The Gerber Scientific Instrument Company
- Ronald J. Straayer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Feedback-controlled workpiece positioning system
- Patent number 4,604,562
- Issue date Aug 5, 1986
- Eaton-Optimetrix Inc.
- Edward H. Phillips
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR WAFER COOLING
- Publication number 20230384776
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Yao LEE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
BACK-END PROCESSING SYSTEMS AND METHODS FOR DEVICE IDENTIFICATION
- Publication number 20230297079
- Publication date Sep 21, 2023
- Lattice Semiconductor Corporation
- Narasimhakumar Mangipudi
- G05 - CONTROLLING REGULATING
Information Patent Application
TRAINING OF MACHINE LEARNING-BASED INVERSE LITHOGRAPHY TECHNOLOGY F...
- Publication number 20230064987
- Publication date Mar 2, 2023
- Siemens Industry Software Inc.
- Nataraj Akkiraju
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR WAFER COOLING
- Publication number 20220317668
- Publication date Oct 6, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Yung-Yao LEE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Synchronized Parallel Tile Computation for Large Area Lithography S...
- Publication number 20220291659
- Publication date Sep 15, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Danping Peng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Synchronized Parallel Tile Computation for Large Area Lithography S...
- Publication number 20210181713
- Publication date Jun 17, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Danping Peng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Synchronized Parallel Tile Computation for Large Area Lithography S...
- Publication number 20200293023
- Publication date Sep 17, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Danping Peng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MASK PROCESS AWARE CALIBRATION USING MASK PATTERN FIDELITY INSPECTIONS
- Publication number 20200150629
- Publication date May 14, 2020
- International Business Machines Corporation
- Ravi K. Bonam
- G05 - CONTROLLING REGULATING
Information Patent Application
EQUIPMENT CONTROL PROCESSING METHOD AND DEVICE
- Publication number 20190196429
- Publication date Jun 27, 2019
- Beijing Chuangyu Technology Co., Ltd
- Pan Han
- G05 - CONTROLLING REGULATING
Information Patent Application
Synchronized Parallel Tile Computation For Large Area Lithography...
- Publication number 20190146455
- Publication date May 16, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Daniel Beylkin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR CONTROLLING SEMICONDUCTOR MANUFACTURING FACIL...
- Publication number 20190088515
- Publication date Mar 21, 2019
- Samsung Electronics Co., Ltd.
- Jae Won JEONG
- G05 - CONTROLLING REGULATING
Information Patent Application
Method for Defocus Detection
- Publication number 20180088560
- Publication date Mar 29, 2018
- KLA-Tencor Corporation
- Xuguang Jiang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR GROUPING REGION OF INTEREST OF MASK PATTERN AND MEASURIN...
- Publication number 20160077517
- Publication date Mar 17, 2016
- Samsung Electronics Co., Ltd.
- Hyung-Joo LEE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF CORRECTING OVERLAY ERROR
- Publication number 20150362905
- Publication date Dec 17, 2015
- UNITED MICROELECTRONICS CORP.
- En-Chiuan Liou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROGRAM FOR CONTROLLING LASER APPARATUS AND RECORDING MEDIUM FOR RE...
- Publication number 20100041247
- Publication date Feb 18, 2010
- Semiconductor Energy Laboratory Co., Ltd.
- Akiharu Miyanaga
- G05 - CONTROLLING REGULATING
Information Patent Application
POSITION CONTROL SYSTEM, A LITHOGRAPHIC APPARATUS AND A METHOD FOR...
- Publication number 20090268185
- Publication date Oct 29, 2009
- ASML NETHERLANDS B.V.
- Michael Johannes VERVOORDELDONK
- G05 - CONTROLLING REGULATING
Information Patent Application
Program for controlling laser apparatus and recording medium for re...
- Publication number 20080009120
- Publication date Jan 10, 2008
- Semiconductor Energy Laboratory Co., Ltd.
- Akiharu Miyanaga
- G05 - CONTROLLING REGULATING
Information Patent Application
Management system, management method and apparatus, and management...
- Publication number 20030204488
- Publication date Oct 30, 2003
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G05 - CONTROLLING REGULATING
Information Patent Application
Program for controlling laser apparatus and recording medium for re...
- Publication number 20030153999
- Publication date Aug 14, 2003
- Semiconductor Energy Laboratory Co., Ltd.
- Akiharu Miyanaga
- G05 - CONTROLLING REGULATING

Masking, project image on wafer semiconductor, photo tracer

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor wafer cooling

Synchronized parallel tile computation for large area lithography s...

Synchronized parallel tile computation for large area lithography s...

Synchronized parallel tile computation for large area lithography s...

Mask process aware calibration using mask pattern fidelity inspections

Synchronized parallel tile computation for large area lithography s...

System and method for controlling semiconductor manufacturing facil...

Method for defocus detection

Method for grouping region of interest of mask pattern and measurin...

Method of correcting overlay error

Program for controlling laser apparatus and recording medium for re...

Position control system, a lithographic apparatus and a method for...

Program for controlling laser apparatus and recording medium for re...

Program for controlling laser apparatus and recording medium for re...

Management system, management method and apparatus, and management...

Method and arrangement for controlling image size of integrated cir...

Staging apparatus and method, and method for manufacturing the stag...

Correction of pattern-dependent errors in a particle beam lithograp...

Projection exposure apparatus and method that floats a plate

Staging apparatus and method, and method for manufacturing the stag...

Method and apparatus for wafer disposition based on systematic erro...

Work supplying method and apparatus to batch process apparatus for...

Staging apparatus

Positioning method and positioning system

Staging apparatus

Method and apparatus for enhancing optical photoplotter accuracy

Feedback-controlled workpiece positioning system

Patents Applicationslast 30 patents

SEMICONDUCTOR WAFER COOLING

BACK-END PROCESSING SYSTEMS AND METHODS FOR DEVICE IDENTIFICATION

TRAINING OF MACHINE LEARNING-BASED INVERSE LITHOGRAPHY TECHNOLOGY F...

SEMICONDUCTOR WAFER COOLING

Synchronized Parallel Tile Computation for Large Area Lithography S...

Synchronized Parallel Tile Computation for Large Area Lithography S...

Synchronized Parallel Tile Computation for Large Area Lithography S...

MASK PROCESS AWARE CALIBRATION USING MASK PATTERN FIDELITY INSPECTIONS

EQUIPMENT CONTROL PROCESSING METHOD AND DEVICE

Synchronized Parallel Tile Computation For Large Area Lithography...

SYSTEM AND METHOD FOR CONTROLLING SEMICONDUCTOR MANUFACTURING FACIL...

Method for Defocus Detection

METHOD FOR GROUPING REGION OF INTEREST OF MASK PATTERN AND MEASURIN...

METHOD OF CORRECTING OVERLAY ERROR

PROGRAM FOR CONTROLLING LASER APPARATUS AND RECORDING MEDIUM FOR RE...

POSITION CONTROL SYSTEM, A LITHOGRAPHIC APPARATUS AND A METHOD FOR...

Program for controlling laser apparatus and recording medium for re...

Management system, management method and apparatus, and management...

Program for controlling laser apparatus and recording medium for re...