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Multi-beam merging
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CPC
H05H2007/065
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H
ELECTRICITY
H05
Electric techniques
H05H
PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
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H05H2007/065
Multi-beam merging
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Patents Grants
last 30 patents
Information
Patent Grant
Electron beam transport system
Patent number
10,736,205
Issue date
Aug 4, 2020
ASML Netherlands B.V.
Roelof Harm Klunder
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Electron Beam Transport System
Publication number
20190246486
Publication date
Aug 8, 2019
ASML NETHERLANDS B.V.
Roelof Harm KLUNDER
H01 - BASIC ELECTRIC ELEMENTS