Multi-beam merging

Industry

  • CPC
  • H05H2007/065
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Patents Grantslast 30 patents

  • Information Patent Grant

    Electron beam transport system

    • Patent number 10,736,205
    • Issue date Aug 4, 2020
    • ASML Netherlands B.V.
    • Roelof Harm Klunder
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Electron Beam Transport System

    • Publication number 20190246486
    • Publication date Aug 8, 2019
    • ASML NETHERLANDS B.V.
    • Roelof Harm KLUNDER
    • H01 - BASIC ELECTRIC ELEMENTS