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Nanometric xy table

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  • CPC
  • G05B2219/49279
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Parent Industries

GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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G05B2219/49279Nanometric xy table
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Patents Grantslast 30 patents

  • Information Patent Grant

    Positioning system and method
    • Patent number 8,610,332
    • Issue date Dec 17, 2013
    • Newcastle Innovation Limited
    • Andrew Fleming
    • B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

  • Information Patent Application

    POSITIONING SYSTEM AND METHOD
    • Publication number 20110193510
    • Publication date Aug 11, 2011
    • NEWCASTLE INNOVATION LIMITED
    • Andrew Fleming
    • G05 - CONTROLLING REGULATING