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Operator changes schedule, workload in allowed range by graphical interface
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CPC
G05B2219/32008
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G
PHYSICS
G05
Controlling systems
G05B
CONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B2219/00
Program-control systems
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G05B2219/32008
Operator changes schedule, workload in allowed range by graphical interface
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing recipe manager
Patent number
8,082,045
Issue date
Dec 20, 2011
Intermolecular, Inc.
Yoshiki Ashizawa
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
MANAGEMENT APPARATUS AND MANAGEMENT METHOD
Publication number
20170308963
Publication date
Oct 26, 2017
Panasonic Intellectual Property Management Co., Ltd.
Hirokazu TAKEHARA
G06 - COMPUTING CALCULATING COUNTING