Photoelectric scanned raster, rule and photocell, microscope

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CPC
G05B2219/37109

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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G05B2219/37109Photoelectric scanned raster, rule and photocell, microscope

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for predicting defects and critical dimension u...
- Patent number 11,275,361
- Issue date Mar 15, 2022
- KLA-Tencor Corporation
- Arpit Yati
- G05 - CONTROLLING REGULATING
Information Patent Grant
Axis controller for robotic actuator
- Patent number 4,494,060
- Issue date Jan 15, 1985
- Anorad Corporation
- Anwar Chitayat
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR PREDICTING DEFECTS AND CRITICAL DIMENSION U...
- Publication number 20190004504
- Publication date Jan 3, 2019
- KLA-Tencor Corporation
- Arpit YATI
- G05 - CONTROLLING REGULATING