Regeneration of etching compositions

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CPC
C23F1/46

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CCHEMISTRY METALLURGY C23Surface treatment C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 C23F1/00Etching metallic material by chemical means

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C23F1/46Regeneration of etching compositions

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Patents Grantslast 30 patents

Information Patent Grant
Electrolytic treatment device for preparing plastic parts to be met...
- Patent number 11,603,595
- Issue date Mar 14, 2023
- Coventya S.p.A.
- Giorgio Tesser
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method and recording medium for recording cleaning program
- Patent number 11,530,486
- Issue date Dec 20, 2022
- Tokyo Electron Limited
- Daisuke Shirasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tin stripping method
- Patent number 11,180,826
- Issue date Nov 23, 2021
- UWIN NANOTECH CO., LTD.
- Ching-Hsiang Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods for selective calcium solubilization
- Patent number 11,091,401
- Issue date Aug 17, 2021
- PROTOCOL ENVIRONMENTAL SOLUTIONS, INC.
- Sergio Vitomir
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Methods, systems and apparatuses for copper removal from aluminum d...
- Patent number 10,745,812
- Issue date Aug 18, 2020
- The Boeing Company
- David L. Crump
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etchant composition for multilayered metal film of copper and molyb...
- Patent number 10,655,231
- Issue date May 19, 2020
- Kanto Kagaku Kabushiki Kaisha
- Hideki Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Copper etchant composition
- Patent number 10,577,696
- Issue date Mar 3, 2020
- ENF Technology CO., LTD.
- Seul Ki Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for obtaining an iron-comprising solution of high concentration
- Patent number 10,550,006
- Issue date Feb 4, 2020
- Tessenderlo Group NV/SA
- Rudy Peeters
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for regeneration of hydrochloric acid
- Patent number 10,494,259
- Issue date Dec 3, 2019
- Andritz AG
- Frank Barhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for electrolytic recycling and regenerating acidic cupric ch...
- Patent number 10,443,138
- Issue date Oct 15, 2019
- Yiting Ye
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Oxidation of copper in a copper etching solution by the use of oxyg...
- Patent number 9,920,434
- Issue date Mar 20, 2018
- Sigma Engineering AB
- Mats Andersson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for acid-treating glass articles
- Patent number 9,505,651
- Issue date Nov 29, 2016
- Corning Incorporated
- Yunfeng Gu
- B08 - CLEANING
Information Patent Grant
Aqueous composition for etching of copper and copper alloys
- Patent number 9,441,304
- Issue date Sep 13, 2016
- Atotech Deutschland GmbH
- Norbert Lützow
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous Fe(III) production at atmospheric pressures
- Patent number 9,376,329
- Issue date Jun 28, 2016
- Tessenderlo Chemie N.V.
- Philippe Quénon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydrogen chloride removal process
- Patent number 9,315,393
- Issue date Apr 19, 2016
- Tessenderlo Chemie N.V.
- Rudy Peeters
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of continuously wet etching a patterned substrate
- Patent number 9,301,397
- Issue date Mar 29, 2016
- 3M Innovative Properties Company
- Jeffrey H. Tokie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reduced isotropic etchant material consumption and waste generation
- Patent number 9,074,287
- Issue date Jul 7, 2015
- Novellus Systems, Inc.
- Steven T. Mayer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for refreshing an acid bath solution
- Patent number 8,877,084
- Issue date Nov 4, 2014
- General Electric Company
- Liming Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reduced isotropic etchant material consumption and waste generation
- Patent number 8,597,461
- Issue date Dec 3, 2013
- Novellus Systems, Inc.
- Steven T. Mayer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for etching copper and recovery of the spent etching solution
- Patent number 8,236,189
- Issue date Aug 7, 2012
- Sigma Engineering AB
- Harald Ottertun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composition and method for improved adhesion of polymeric materials...
- Patent number 8,192,636
- Issue date Jun 5, 2012
- Atotech Deutschland GmbH
- Dirk Tews
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Replenishment method for an advanced coating removal stripping solu...
- Patent number 7,935,642
- Issue date May 3, 2011
- General Electric Company
- Lawrence B. Kool
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Material for purification of semiconductor polishing slurry, module...
- Patent number 7,625,262
- Issue date Dec 1, 2009
- Nomura Micro Science Co., Ltd.
- Mitsugu Abe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Membranes and methods useful for caustic applications
- Patent number 7,575,687
- Issue date Aug 18, 2009
- GE Osmonics, Inc.
- Christopher J. Kurth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for regenerating etching solutions containing iron for the u...
- Patent number 7,520,973
- Issue date Apr 21, 2009
- Atotech Deutschland GmbH
- Kai-Jens Matejat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing a ready-to-use electrolyte
- Patent number 7,288,170
- Issue date Oct 30, 2007
- Siemens Aktiengesellschaft
- Jens Birkner
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Regeneration process of etching solution, etching process, and etch...
- Patent number 7,238,295
- Issue date Jul 3, 2007
- m·FSI Ltd.
- Nobuhiko Izuta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of controlling metallic layer etching process and regenerati...
- Patent number 7,112,795
- Issue date Sep 26, 2006
- Dong Jin Semichem Co., Ltd.
- Ki-Beom Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Copper recovery process
- Patent number 6,821,404
- Issue date Nov 23, 2004
- Mercer Holdings Corp.
- Robert Pacholik
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Method for treating spent tin/lead stripping solution
- Patent number 6,685,820
- Issue date Feb 3, 2004
- Amia Co., Ltd.
- Kuo-Chin Chen
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...

Patents Applicationslast 30 patents

Information Patent Application
BOWL, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING
- Publication number 20240209514
- Publication date Jun 27, 2024
- SEMES CO., LTD.
- Sang Hu HAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240035168
- Publication date Feb 1, 2024
- TOKYO ELECTRON LIMITED
- Hironobu HYAKUTAKE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AN AQUEOUS BASIC ETCHING COMPOSITION FOR THE TREATMENT OF SURFACES...
- Publication number 20230220558
- Publication date Jul 13, 2023
- Atotech Deutschland GmbH & Co. KG
- Lars KOHLMANN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REGENERATING METHOD OF REMOVAL LIQUID AND REGENERATED REMOVAL LIQUID
- Publication number 20230212757
- Publication date Jul 6, 2023
- Sumitomo Electric Industries, Ltd.
- Ryuta OHSUKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD OF TREATING SUBSTRATE
- Publication number 20230203672
- Publication date Jun 29, 2023
- SEMES CO., LTD.
- Jun Kil HWANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING METHOD AND RECORDING MEDIUM FOR RECORDING CLEANING PROGRAM
- Publication number 20210079533
- Publication date Mar 18, 2021
- TOKYO ELECTRON LIMITED
- Daisuke SHIRASAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR REGENERATING A BATH FOR CHEMICAL ETCHING OF TITANIUM PARTS
- Publication number 20200141011
- Publication date May 7, 2020
- SATYS SURFACE TREATMENT TOULOUSE
- Mathieu NICOLAS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TIN STRIPPING METHOD
- Publication number 20190203319
- Publication date Jul 4, 2019
- Uwin Nanotech. Co., Ltd.
- CHING-HSIANG HSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHANT COMPOSITION FOR MULTILAYERED METAL FILM OF COPPER AND MOLYB...
- Publication number 20180298500
- Publication date Oct 18, 2018
- Kanto Kagaku Kabushiki Kaisha
- Hideki Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WET ETCHING EQUIPMENT AND WET ETCHING METHOD
- Publication number 20180051378
- Publication date Feb 22, 2018
- BOE TECHNOLOGY GROUP CO., LTD.
- Dapeng Xue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITION AND METHOD FOR MICRO ETCHING OF COPPER AND COPPER ALLOYS
- Publication number 20170275767
- Publication date Sep 28, 2017
- Atotech Deutschland GmbH
- Markku LAGER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDATION OF COPPER IN A COPPER ETCHING SOLUTION BY THE USE OF OXYG...
- Publication number 20170022616
- Publication date Jan 26, 2017
- SIGMA ENGINEERING AB
- Mats ANDERSSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AQUEOUS COMPOSITION FOR ETCHING OF COPPER AND COPPER ALLOYS
- Publication number 20150307999
- Publication date Oct 29, 2015
- Atotech Deutschland GmbH
- Norbert LÜTZOW
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CONDITIONING PROCESS LIQUIDS
- Publication number 20150202555
- Publication date Jul 23, 2015
- LAM RESEARCH AG
- Thomas KOMETTER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYDROGEN CHLORIDE REMOVAL PROCESS
- Publication number 20140348730
- Publication date Nov 27, 2014
- Tessenderlo Chemie NV
- Rudy Peeters
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTINUOUS FE(III) PRODUCTION AT ATMOSPHERIC PRESSURES
- Publication number 20140348733
- Publication date Nov 27, 2014
- Tessenderlo Chemie NV
- Philippe Quénon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AQUEOUS COMPOSITION FOR ETCHING OF COPPER AND COPPER ALLOYS
- Publication number 20140262805
- Publication date Sep 18, 2014
- Norbert Lützow
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Methods of Continuously Wet Etching A Patterned Substrate
- Publication number 20140231381
- Publication date Aug 21, 2014
- Jeffrey H. Tokie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TREATMENT OF SHAPED BODIES COMPRISING COPPER WITH A MIXTURE COMPRIS...
- Publication number 20140121145
- Publication date May 1, 2014
- BASF SE
- Thomas Paasche
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REDUCED ISOTROPIC ETCHANT MATERIAL CONSUMPTION AND WASTE GENERATION
- Publication number 20140061158
- Publication date Mar 6, 2014
- Novellus Systems, Inc.
- Steven T. Mayer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD FOR REFRESHING AN ACID BATH SOLUTION
- Publication number 20130341557
- Publication date Dec 26, 2013
- Liming Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING ACID WASTE LIQUID DISPOSAL SYSTEM, ETCHING ACID WASTE LIQUI...
- Publication number 20110278261
- Publication date Nov 17, 2011
- SHIBAURA MECHATRONICS CORPORATION
- Hideki Himi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REDUCED ISOTROPIC ETCHANT MATERIAL CONSUMPTION AND WASTE GENERATION
- Publication number 20110056913
- Publication date Mar 10, 2011
- Steven T. Mayer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method for Etching Copper and Recovery of the Spent Etching Solution
- Publication number 20110000884
- Publication date Jan 6, 2011
- Harald Ottertun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR THE TREATMENT AND REUSE OF A STRIPPER SOLUTION
- Publication number 20100193467
- Publication date Aug 5, 2010
- YARA SUOMI OY
- Anders Weckman
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Composition and Method for Improved Adhesion of Polymeric Materials...
- Publication number 20100035435
- Publication date Feb 11, 2010
- Atotech Deutschland GmbH
- Dirk Tews
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REPLENISHMENT METHOD FOR AN ADVANCED COATING REMOVAL STRIPPING SOLU...
- Publication number 20090132175
- Publication date May 21, 2009
- General Electric Company
- Lawrence B. Kool
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING SOLUTION AND METHOD FOR REGENERATING WASTE LIQUID THEREOF,...
- Publication number 20090078679
- Publication date Mar 26, 2009
- TSURUMI SODA CO., LTD
- Yasuo Nishimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plating method of electrode can of flat alkaline cell and plating a...
- Publication number 20080299299
- Publication date Dec 4, 2008
- Norishige Yamaguchi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Membranes and methods useful for caustic applications
- Publication number 20070039885
- Publication date Feb 22, 2007
- Christopher J. Kurth
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...

Regeneration of etching compositions

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electrolytic treatment device for preparing plastic parts to be met...

Cleaning method and recording medium for recording cleaning program

Tin stripping method

Compositions and methods for selective calcium solubilization

Methods, systems and apparatuses for copper removal from aluminum d...

Etchant composition for multilayered metal film of copper and molyb...

Copper etchant composition

Method for obtaining an iron-comprising solution of high concentration

Method and device for regeneration of hydrochloric acid

Method for electrolytic recycling and regenerating acidic cupric ch...

Oxidation of copper in a copper etching solution by the use of oxyg...

Systems and methods for acid-treating glass articles

Aqueous composition for etching of copper and copper alloys

Continuous Fe(III) production at atmospheric pressures

Hydrogen chloride removal process

Methods of continuously wet etching a patterned substrate

Reduced isotropic etchant material consumption and waste generation

Method for refreshing an acid bath solution

Reduced isotropic etchant material consumption and waste generation

Method for etching copper and recovery of the spent etching solution

Composition and method for improved adhesion of polymeric materials...

Replenishment method for an advanced coating removal stripping solu...

Material for purification of semiconductor polishing slurry, module...

Membranes and methods useful for caustic applications

Method for regenerating etching solutions containing iron for the u...

Process for producing a ready-to-use electrolyte

Regeneration process of etching solution, etching process, and etch...

Method of controlling metallic layer etching process and regenerati...

Copper recovery process

Method for treating spent tin/lead stripping solution

Patents Applicationslast 30 patents

BOWL, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

AN AQUEOUS BASIC ETCHING COMPOSITION FOR THE TREATMENT OF SURFACES...

REGENERATING METHOD OF REMOVAL LIQUID AND REGENERATED REMOVAL LIQUID

APPARATUS AND METHOD OF TREATING SUBSTRATE

CLEANING METHOD AND RECORDING MEDIUM FOR RECORDING CLEANING PROGRAM

PROCESS FOR REGENERATING A BATH FOR CHEMICAL ETCHING OF TITANIUM PARTS

TIN STRIPPING METHOD

ETCHANT COMPOSITION FOR MULTILAYERED METAL FILM OF COPPER AND MOLYB...

WET ETCHING EQUIPMENT AND WET ETCHING METHOD

COMPOSITION AND METHOD FOR MICRO ETCHING OF COPPER AND COPPER ALLOYS

OXIDATION OF COPPER IN A COPPER ETCHING SOLUTION BY THE USE OF OXYG...

AQUEOUS COMPOSITION FOR ETCHING OF COPPER AND COPPER ALLOYS

METHOD AND APPARATUS FOR CONDITIONING PROCESS LIQUIDS

HYDROGEN CHLORIDE REMOVAL PROCESS

CONTINUOUS FE(III) PRODUCTION AT ATMOSPHERIC PRESSURES

AQUEOUS COMPOSITION FOR ETCHING OF COPPER AND COPPER ALLOYS

Methods of Continuously Wet Etching A Patterned Substrate

TREATMENT OF SHAPED BODIES COMPRISING COPPER WITH A MIXTURE COMPRIS...

REDUCED ISOTROPIC ETCHANT MATERIAL CONSUMPTION AND WASTE GENERATION

METHOD FOR REFRESHING AN ACID BATH SOLUTION

ETCHING ACID WASTE LIQUID DISPOSAL SYSTEM, ETCHING ACID WASTE LIQUI...

REDUCED ISOTROPIC ETCHANT MATERIAL CONSUMPTION AND WASTE GENERATION

Method for Etching Copper and Recovery of the Spent Etching Solution

METHOD FOR THE TREATMENT AND REUSE OF A STRIPPER SOLUTION

Composition and Method for Improved Adhesion of Polymeric Materials...

REPLENISHMENT METHOD FOR AN ADVANCED COATING REMOVAL STRIPPING SOLU...

ETCHING SOLUTION AND METHOD FOR REGENERATING WASTE LIQUID THEREOF,...

Plating method of electrode can of flat alkaline cell and plating a...

Membranes and methods useful for caustic applications