Removable interferometer, store exact position, needed drive current, temperature

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G05B2219/41094

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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G05B2219/41094Removable interferometer, store exact position, needed drive current, temperature

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Patents Grantslast 30 patents

Information Patent Grant
Spatial accuracy correction method and apparatus
- Patent number 11,366,447
- Issue date Jun 21, 2022
- Mitutoyo Corporation
- Shinichiro Yanaka
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents