Second AGV with wafers already underway before processing first finished

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CPC
G05B2219/31013

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

Current Industry

G05B2219/31013Second AGV with wafers already underway before processing first finished

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Work-in-progress substrate processing methods and systems for use i...
- Patent number 9,632,499
- Issue date Apr 25, 2017
- GLOBALFOUNDRIES, INC.
- Chinmay Oza
- G05 - CONTROLLING REGULATING
Information Patent Grant
Processing facility
- Patent number 9,086,697
- Issue date Jul 21, 2015
- Daifuku Co., Ltd.
- Masami Suzuki
- G05 - CONTROLLING REGULATING
Information Patent Grant
Ultra-flexible production manufacturing
- Patent number 8,798,787
- Issue date Aug 5, 2014
- ABB Research Ltd.
- Thomas A. Fuhlbrigge
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Semiconductor factory automation system and method for transporting...
- Patent number 6,516,238
- Issue date Feb 4, 2003
- Hyundai Electronics Industries Co., Ltd.
- Jin-Sun Kim
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Semiconductor process system, its control method, computer readable...
- Patent number 6,459,950
- Issue date Oct 1, 2002
- Canon Kabushiki Kaisha
- Takeshi Kawazome
- G05 - CONTROLLING REGULATING
Information Patent Grant
Conveyance system in a semiconductor manufacturing process and meth...
- Patent number 6,298,274
- Issue date Oct 2, 2001
- Oki Electric Industry Co., Ltd.
- Katsuhiro Inoue
- G05 - CONTROLLING REGULATING
Information Patent Grant
Semiconductor process system, its control method, computer readable...
- Patent number 6,148,246
- Issue date Nov 14, 2000
- Canon Kabushiki Kaisha
- Takeshi Kawazome
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus and method
- Patent number 5,687,085
- Issue date Nov 11, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Toru Morimoto
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
Processing Facility
- Publication number 20140249667
- Publication date Sep 4, 2014
- DAIFUKU CO., LTD.
- Masami Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRA-FLEXIBLE PRODUCTION MANUFACTURING
- Publication number 20140121828
- Publication date May 1, 2014
- ABB Research Ltd.
- Thomas A. Fuhlbrigge
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
CROSS-FAB MATERIAL CONTROL SYSTEM AND CONTROL METHOD THEREOF
- Publication number 20100023160
- Publication date Jan 28, 2010
- INOTERA MEMORIES, INC.
- YU-KUN CHEN
- G05 - CONTROLLING REGULATING
Information Patent Application
METHODS AND APPARATUS FOR ENHANCED OPERATION OF SUBSTRATE CARRIER H...
- Publication number 20070276531
- Publication date Nov 29, 2007
- APPLIED MATERIALS, INC.
- Michael Teferra
- G05 - CONTROLLING REGULATING

Second AGV with wafers already underway before processing first finished

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Work-in-progress substrate processing methods and systems for use i...

Processing facility

Ultra-flexible production manufacturing

Semiconductor factory automation system and method for transporting...

Semiconductor process system, its control method, computer readable...

Conveyance system in a semiconductor manufacturing process and meth...

Semiconductor process system, its control method, computer readable...

Substrate processing apparatus and method

Patents Applicationslast 30 patents

Processing Facility

ULTRA-FLEXIBLE PRODUCTION MANUFACTURING

CROSS-FAB MATERIAL CONTROL SYSTEM AND CONTROL METHOD THEREOF

METHODS AND APPARATUS FOR ENHANCED OPERATION OF SUBSTRATE CARRIER H...