Selecting a desired sensor structure

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G05B2219/37309

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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G05B2219/37309Selecting a desired sensor structure

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Patents Grantslast 30 patents

Information Patent Grant
Multi-degree-of-freedom stage control system
- Patent number 8,148,931
- Issue date Apr 3, 2012
- Kabushiki Kaisha Yaskawa Denki
- Takashi Mamba
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
Methods of Selecting Sensors for Detecting Abnormalities in Semicon...
- Publication number 20100262398
- Publication date Oct 14, 2010
- SAMSUNG ELECTRONICS CO., LTD.
- Kye-Hyun Baek
- G05 - CONTROLLING REGULATING
Information Patent Application
MULTI-DEGREE-OF-FREEDOM STAGE CONTROL SYSTEM
- Publication number 20100109593
- Publication date May 6, 2010
- KABUSHIKI KAISHA YASKAWA DENKI
- Takashi MAMBA
- G05 - CONTROLLING REGULATING