semiconductor

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CPC
C23C18/1642

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating Contact plating

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C23C18/1642semiconductor

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Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for electroless plating dispense
- Patent number 11,769,686
- Issue date Sep 26, 2023
- Intel Corporation
- Harinath Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating of nano-scaled cavities
- Patent number 11,549,184
- Issue date Jan 10, 2023
- AVERATEK CORPORATION
- Sunity K. Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 11,441,225
- Issue date Sep 13, 2022
- Tokyo Electron Limited
- Kazuki Motomatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device with electrode plating deposition
- Patent number 11,387,334
- Issue date Jul 12, 2022
- Renesas Electronics Corporation
- Takehiro Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating of nano-scaled cavities
- Patent number 11,142,825
- Issue date Oct 12, 2021
- AVERATEK CORPORATION
- Sunity K. Sharma
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrostatic coating of metal thin layers with adjustable film pro...
- Patent number 11,085,114
- Issue date Aug 10, 2021
- Arizona Board of Regents on behalf of the University of Arizona
- Lance R. Hubbard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming method of hard mask
- Patent number 11,004,684
- Issue date May 11, 2021
- Tokyo Electron Limited
- Mitsuaki Iwashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of electroless nickle plating on surface of silicon carbide...
- Patent number 10,995,408
- Issue date May 4, 2021
- Tangshan Normal University
- Huijing Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for directly depositing palladium onto a non-activated surfa...
- Patent number 10,920,322
- Issue date Feb 16, 2021
- Atotech Deutschland GmbH
- Andreas Walter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adhesion promoting process for metallisation of substrate surfaces
- Patent number 10,487,404
- Issue date Nov 26, 2019
- Atotech Deutschland GmbH
- Zhiming Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Activation method for silicon substrates comprising at least two ar...
- Patent number 9,960,051
- Issue date May 1, 2018
- Atotech Deutschland GmbH
- Christof Suchentrunk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a metal silicide using a solution containing gol...
- Patent number 9,564,333
- Issue date Feb 7, 2017
- Alchimer
- Vincent Mevellec
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for the surface-modification of flyash and industrial appli...
- Patent number 9,080,234
- Issue date Jul 14, 2015
- Council of Scientific and Industrial Research
- Satyajit Vishnu Shukla
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Method of metal deposition
- Patent number 8,946,088
- Issue date Feb 3, 2015
- Lancaster University Business Enterprises Limited
- Colin Boxall
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composition and methods for forming metal films on semiconductor su...
- Patent number 8,623,764
- Issue date Jan 7, 2014
- Lam Research Corporation
- Mark Ian Wagner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Direct growth of metal nanoplates on semiconductor substrates
- Patent number 8,247,325
- Issue date Aug 21, 2012
- UChicago Argonne, LLC
- Yugang Sun
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 8,158,507
- Issue date Apr 17, 2012
- Mitsubishi Electric Corporation
- Koichiro Nishizawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced method of forming nickel silicides
- Patent number 7,955,978
- Issue date Jun 7, 2011
- Rohm and Hass Electronic Materials LLC
- John P. Cahalen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composition and methods for forming metal films on semiconductor su...
- Patent number 7,786,011
- Issue date Aug 31, 2010
- Lam Research Corporation
- Mark Ian Wagner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate holding apparatus
- Patent number 7,735,450
- Issue date Jun 15, 2010
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective silicide formation by electrodeposit displacement reaction
- Patent number 7,501,345
- Issue date Mar 10, 2009
- International Business Machines Corporation
- Veeraraghaven S. Basker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing unit and substrate processing apparatus
- Patent number 7,368,016
- Issue date May 6, 2008
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a thin film layer
- Patent number 5,462,897
- Issue date Oct 31, 1995
- International Business Machines Corporation
- Thomas H. Baum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Photo-plating solution and process
- Patent number 5,424,252
- Issue date Jun 13, 1995
- Kabushiki Kaisha Toyota Chuo Kenkyusho
- Shinya Morishita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of repairing a defect in a lithographic mask comprising meta...
- Patent number 5,190,835
- Issue date Mar 2, 1993
- U.S. Philips Corporation
- Johannes W. M. Jacobs
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Photoselective electroless plating method employing UV-absorbing su...
- Patent number 4,738,869
- Issue date Apr 19, 1988
- Pacific Bell
- Charles E. Baumgartner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Depositing Station And Device For Generating Contact Metallizations
- Publication number 20240110286
- Publication date Apr 4, 2024
- Pac Tech - Packaging Technologies GmbH
- Thorsten Krause
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROLESS PLATING APPARATUS
- Publication number 20240044007
- Publication date Feb 8, 2024
- ASKA CORPORATION
- Takayuki FURUSAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220056590
- Publication date Feb 24, 2022
- TOKYO ELECTRON LIMITED
- Satoshi Morita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING OF NANO-SCALED CAVITIES
- Publication number 20220025520
- Publication date Jan 27, 2022
- Averatek Corporation
- Sunity K. SHARMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS & APPARATUS FOR ELECTROLESS PLATING DISPENSE
- Publication number 20210375662
- Publication date Dec 2, 2021
- Intel Corporation
- Harinath Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYER WIRING FORMING METHOD AND RECORDING MEDIUM
- Publication number 20210358767
- Publication date Nov 18, 2021
- TOKYO ELECTRON LIMITED
- Takashi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20210336017
- Publication date Oct 28, 2021
- RENESAS ELECTRONICS CORPORATION
- Takehiro UEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
- Publication number 20210172066
- Publication date Jun 10, 2021
- TOKYO ELECTRON LIMITED
- Kazuki Motomatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING METHOD, PLATING APPARATUS AND RECORDING MEDIUM
- Publication number 20210175079
- Publication date Jun 10, 2021
- TOKYO ELECTRON LIMITED
- Mitsuaki Iwashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING OF NANO-SCALED CAVITIES
- Publication number 20200248311
- Publication date Aug 6, 2020
- Averatek Corporation
- Sunity K. SHARMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Spin-On Metallization
- Publication number 20190309422
- Publication date Oct 10, 2019
- VERSUM MATERIALS US, LLC
- Alan C. Cooper
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF ELECTROLESS NICKLE PLATING ON SURFACE OF SILICON CARBIDE...
- Publication number 20190264330
- Publication date Aug 29, 2019
- Tangshan Normal University
- Huijing YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DIRECTLY DEPOSITING PALLADIUM ONTO A NON-ACTIVATED SURFA...
- Publication number 20190242017
- Publication date Aug 8, 2019
- Atotech Deutschland GmbH
- Andreas WALTER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMING METHOD OF HARD MASK
- Publication number 20190157083
- Publication date May 23, 2019
- TOKYO ELECTRON LIMITED
- Mitsuaki Iwashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRICALLY CONDUCTIVE METAL-COATED FIBERS, CONTINUOUS PROCESS FOR...
- Publication number 20180187077
- Publication date Jul 5, 2018
- SYSCOM ADVANCED MATERIALS, INC.
- Jar-Wha Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrostatic Coating of Metal Thin Layers with Adjustable Film Pro...
- Publication number 20180135184
- Publication date May 17, 2018
- Arizona Board of Regents on behalf of the Universi ty of Arizona
- Lance R. Hubbard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVATION METHOD FOR SILICON SUBSTRATES
- Publication number 20180019137
- Publication date Jan 18, 2018
- Atotech Deutschland GmbH
- Christof SUCHENTRUNK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTOVOLTAIC CELL WITH POROUS SEMICONDUCTOR REGIONS FOR ANCHORING C...
- Publication number 20170186890
- Publication date Jun 29, 2017
- Rise Technology S.R.L.
- Marco Balucani
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
NOVEL ADHESION PROMOTING AGENTS FOR METALLISATION OF SUBSTRATE SURF...
- Publication number 20160237571
- Publication date Aug 18, 2016
- Atotech Deutschland GmbH
- Zhiming LIU
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
NOVEL ADHESION PROMOTING PROCESS FOR METALLISATION OF SUBSTRATE SUR...
- Publication number 20160208387
- Publication date Jul 21, 2016
- Atotech Deutschland GmbH
- Zhiming LIU
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROLESS PLATING APPARATUS
- Publication number 20160160352
- Publication date Jun 9, 2016
- EBARA CORPORATION
- Hiroyuki KANDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for Electroless Deposition of Gold and Gold Alloys on Silicon
- Publication number 20140141609
- Publication date May 22, 2014
- UNIVERSITY OF WINDSOR
- Mordechay SCHLESINGER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIGHT INDUCED NICKEL PLATING METHOD FOR P-TYPE SILICON AND N/P SOL...
- Publication number 20140110264
- Publication date Apr 24, 2014
- Atomic Energy Council-Institute of Nuclear Research
- Yu-Han Su
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD OF METAL DEPOSITION
- Publication number 20130217227
- Publication date Aug 22, 2013
- Colin Boxall
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROLESS PLATING APPARATUS AND ELECTROLESS PLATING METHOD
- Publication number 20130122704
- Publication date May 16, 2013
- Dainippon Screen Mfg. Co., Ltd.
- Hiroyuki KANDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process For The Surface-Modification Of Flyash And Industrial Appli...
- Publication number 20130095995
- Publication date Apr 18, 2013
- Satyajit Vishnu Shukla
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL LAYER FORMATION METHOD FOR DIODE CHIPS/WAFERS
- Publication number 20120122311
- Publication date May 17, 2012
- Chun-Pin CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRICALLY CONDUCTIVE METAL-COATED FIBERS, CONTINUOUS PROCESS FOR...
- Publication number 20120021218
- Publication date Jan 26, 2012
- SYSCOM ADVANCED MATERIALS, INC.
- Jar-Wha Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Particle-Beam Induced Processing Using Liquid Reactants
- Publication number 20110293847
- Publication date Dec 1, 2011
- Jeffrey Todd Hastings
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROLESS PLATING SOLUTION FOR PROVIDING SOLAR CELL ELECTRODE
- Publication number 20110192316
- Publication date Aug 11, 2011
- E-CHEM ENTERPRISE CORP.
- Chia Wei CHOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

semiconductor

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods and apparatus for electroless plating dispense

Coating of nano-scaled cavities

Substrate liquid processing apparatus

Semiconductor device with electrode plating deposition

Coating of nano-scaled cavities

Electrostatic coating of metal thin layers with adjustable film pro...

Forming method of hard mask

Method of electroless nickle plating on surface of silicon carbide...

Method for directly depositing palladium onto a non-activated surfa...

Adhesion promoting process for metallisation of substrate surfaces

Activation method for silicon substrates comprising at least two ar...

Method for forming a metal silicide using a solution containing gol...

Process for the surface-modification of flyash and industrial appli...

Method of metal deposition

Composition and methods for forming metal films on semiconductor su...

Direct growth of metal nanoplates on semiconductor substrates

Method for manufacturing semiconductor device

Enhanced method of forming nickel silicides

Composition and methods for forming metal films on semiconductor su...

Substrate holding apparatus

Selective silicide formation by electrodeposit displacement reaction

Substrate processing unit and substrate processing apparatus

Method for forming a thin film layer

Photo-plating solution and process

Method of repairing a defect in a lithographic mask comprising meta...

Photoselective electroless plating method employing UV-absorbing su...

Patents Applicationslast 30 patents

Depositing Station And Device For Generating Contact Metallizations

ELECTROLESS PLATING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

COATING OF NANO-SCALED CAVITIES

METHODS & APPARATUS FOR ELECTROLESS PLATING DISPENSE

MULTILAYER WIRING FORMING METHOD AND RECORDING MEDIUM

SEMICONDUCTOR DEVICE

SUBSTRATE LIQUID PROCESSING APPARATUS

PLATING METHOD, PLATING APPARATUS AND RECORDING MEDIUM

COATING OF NANO-SCALED CAVITIES

Spin-On Metallization

METHOD OF ELECTROLESS NICKLE PLATING ON SURFACE OF SILICON CARBIDE...

METHOD FOR DIRECTLY DEPOSITING PALLADIUM ONTO A NON-ACTIVATED SURFA...

FORMING METHOD OF HARD MASK

ELECTRICALLY CONDUCTIVE METAL-COATED FIBERS, CONTINUOUS PROCESS FOR...

Electrostatic Coating of Metal Thin Layers with Adjustable Film Pro...

ACTIVATION METHOD FOR SILICON SUBSTRATES

PHOTOVOLTAIC CELL WITH POROUS SEMICONDUCTOR REGIONS FOR ANCHORING C...

NOVEL ADHESION PROMOTING AGENTS FOR METALLISATION OF SUBSTRATE SURF...

NOVEL ADHESION PROMOTING PROCESS FOR METALLISATION OF SUBSTRATE SUR...

ELECTROLESS PLATING APPARATUS

Process for Electroless Deposition of Gold and Gold Alloys on Silicon

LIGHT INDUCED NICKEL PLATING METHOD FOR P-TYPE SILICON AND N/P SOL...

METHOD OF METAL DEPOSITION

ELECTROLESS PLATING APPARATUS AND ELECTROLESS PLATING METHOD

Process For The Surface-Modification Of Flyash And Industrial Appli...

METAL LAYER FORMATION METHOD FOR DIODE CHIPS/WAFERS

ELECTRICALLY CONDUCTIVE METAL-COATED FIBERS, CONTINUOUS PROCESS FOR...

Particle-Beam Induced Processing Using Liquid Reactants

ELECTROLESS PLATING SOLUTION FOR PROVIDING SOLAR CELL ELECTRODE