Semiconductors

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CPC
F17C2270/0518

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FMECHANICAL ENGINEERING LIGHTING HEATING WEAPONS BLASTING ENGINES OR PUMPS F17Fluid storage F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES FIXED-CAPACITY GAS-HOLDERS FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES F17C2270/00Applications

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F17C2270/0518Semiconductors

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Storage and delivery veseel for storing GeH4, using a zeolitic adso...
- Patent number 12,196,368
- Issue date Jan 14, 2025
- Entegris, Inc.
- Oleg Byl
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Depressurization system, apparatus and method for high pressure gas...
- Patent number 12,158,246
- Issue date Dec 3, 2024
- Messer Industries USA, Inc.
- James Kim
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Systems and methods for storing molecular diborane
- Patent number 12,140,272
- Issue date Nov 12, 2024
- Entegris, Inc.
- Oleg Byl
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Vacuum supply gas cylinder
- Patent number 12,085,230
- Issue date Sep 10, 2024
- Feng Yuan Ku
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Method and supply equipment for supplying fluorine gas-containing gas
- Patent number 12,031,685
- Issue date Jul 9, 2024
- Resonac Corporation
- Yuya Nishio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for optimized gas delivery with automated redunda...
- Patent number 12,018,800
- Issue date Jun 25, 2024
- Praxair Technology, Inc.
- Douglas C. Heiderman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and gas supply method
- Patent number 11,971,144
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Seiya Nasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Automatic alignment method of high-pressure gas container
- Patent number 11,927,309
- Issue date Mar 12, 2024
- AMT CO., LTD.
- Won Ho Choi
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Gas supply system
- Patent number 11,755,437
- Issue date Sep 12, 2023
- VERSUM MATERIALS US, LLC
- Tae-Jun Lim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for automatically replacing high-pressure gas barrels
- Patent number 11,619,355
- Issue date Apr 4, 2023
- AMT CO., LTD.
- Won Ho Choi
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Precursor supply cabinet
- Patent number 11,549,702
- Issue date Jan 10, 2023
- Beneq Oy
- Pekka Soininen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-pressure gas cylinder gasket automatic replacement device
- Patent number 11,512,813
- Issue date Nov 29, 2022
- AMT CO., LTD.
- Won Ho Choi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Gas supply apparatus and gas supply method
- Patent number 11,427,907
- Issue date Aug 30, 2022
- Showa Denko K.K.
- Takanori Aoki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for automatically replacing high-pressure gas tank and metho...
- Patent number 11,320,094
- Issue date May 3, 2022
- AMT CO., LTD.
- Won Ho Choi
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Material, storage container using the material, valve attached to t...
- Patent number 10,982,811
- Issue date Apr 20, 2021
- KANTO DENKA KOGYO, CO., LTD.
- Hiroki Takizawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Smart package
- Patent number 10,845,006
- Issue date Nov 24, 2020
- Entegris, Inc.
- Joseph D. Sweeney
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Gas supply vessel
- Patent number 10,837,603
- Issue date Nov 17, 2020
- Entegris, Inc.
- Joseph Robert Despres
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Pivotable touchscreen for a gas-distribution facility
- Patent number 10,823,336
- Issue date Nov 3, 2020
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Aziz Ouerd
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Cryogenic ferrofluid sealed rotary union
- Patent number 10,704,693
- Issue date Jul 7, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Robert Mitchell
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Valve with interchangeable outlet connections for high purity gases
- Patent number 10,598,296
- Issue date Mar 24, 2020
- NorAm Valves LLC
- Stephen A. Carter
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Smart package
- Patent number 10,508,773
- Issue date Dec 17, 2019
- Entegris, Inc.
- Joseph D. Sweeney
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Liquid gas system
- Patent number 10,352,564
- Issue date Jul 16, 2019
- Truma Geraetetechnik GmbH & Co. KG
- Markus Jaeger
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Microporous carbon monoliths from natural carbohydrates
- Patent number 10,335,763
- Issue date Jul 2, 2019
- Entegris, Inc.
- Melissa A. Petruska
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Inactive gas introducing facility and inactive gas introducing method
- Patent number 10,247,361
- Issue date Apr 2, 2019
- Daifuku Co., Ltd.
- Masahiro Takahara
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Smart package
- Patent number 10,247,363
- Issue date Apr 2, 2019
- Entegris, Inc.
- Joseph D. Sweeney
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Heating vaporization system and heating vaporization method
- Patent number 10,240,233
- Issue date Mar 26, 2019
- HORIBA STEC, Co., Ltd.
- Masanori Terasaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vessels with personnel access provisions
- Patent number 10,222,000
- Issue date Mar 5, 2019
- VERSUM MATERIALS US, LLC
- Vladimir Yliy Gershtein
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Gas injection device and assisting member
- Patent number 10,014,200
- Issue date Jul 3, 2018
- Murata Machinery, Ltd.
- Masanao Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Preparation of high pressure BF3/H2 mixtures
- Patent number 9,996,090
- Issue date Jun 12, 2018
- Entegris, Inc.
- Oleg Byl
- G05 - CONTROLLING REGULATING
Information Patent Grant
Modified vacuum actuated valve assembly and sealing mechanism for i...
- Patent number 9,909,670
- Issue date Mar 6, 2018
- Praxair Technology, Inc.
- Douglas C. Heiderman
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
GAS FILLING DOCKING TRAY AND GAS FILLING DEVICE
- Publication number 20240191842
- Publication date Jun 13, 2024
- Brillian Network & Automation Integrated System Co., Ltd.
- CHING-WEI HUANG
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
PROCESSING APPARATUS AND GAS SUPPLY METHOD
- Publication number 20240183498
- Publication date Jun 6, 2024
- TOKYO ELECTRON LIMITED
- Seiya NASU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONSTANT HEADSPACE AMPOULE
- Publication number 20240068619
- Publication date Feb 29, 2024
- David Marquardt
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
CYLINDRICAL SUB-ATMOSPHERIC PRESSURE REGULATING DEVICE FOR INSERTIO...
- Publication number 20240011605
- Publication date Jan 11, 2024
- Rotarex S.A.
- Philippe SCHMITZ
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
SUPPLY CONTROL SYSTEM FOR A PLURALITY OF TANKS
- Publication number 20230408034
- Publication date Dec 21, 2023
- VERSUM MATERIALS US, LLC
- WILLIAM THOMAS PILTZ
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
METHOD AND SYSTEM FOR OPTIMIZED GAS DELIVERY WITH AUTOMATED REDUNDA...
- Publication number 20230313951
- Publication date Oct 5, 2023
- Douglas C. Heiderman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR STORING MOLECULAR DIBORANE
- Publication number 20230235856
- Publication date Jul 27, 2023
- Entegris, Inc.
- Oleg Byl
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
GAS CYLINDER AUTOMATION SYSTEM
- Publication number 20230129083
- Publication date Apr 27, 2023
- Samsung Electronics Co., Ltd.
- Jinho SO
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
DEPRESSURIZATION SYSTEM, APPARATUS AND METHOD FOR HIGH PRESSURE GAS...
- Publication number 20230071679
- Publication date Mar 9, 2023
- Messer Industries USA, Inc
- James Kim
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
GAS STORAGE AND DISPENSING CONTAINER AND A METHOD OF DISPENSING THE...
- Publication number 20220290812
- Publication date Sep 15, 2022
- Entegris, Inc.
- Edward E. Jones
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
PROCESSING APPARATUS AND GAS SUPPLY METHOD
- Publication number 20220290814
- Publication date Sep 15, 2022
- TOKYO ELECTRON LIMITED
- Seiya NASU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACETYLENE FLUID SUPPLY PACKAGE, SYSTEM COMPRISING THE SAME AND METH...
- Publication number 20220260212
- Publication date Aug 18, 2022
- Ashwini K. Sinha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY APPARATUS AND GAS SUPPLY METHOD
- Publication number 20220251703
- Publication date Aug 11, 2022
- SHOWA DENKO K.K.
- Takanori AOKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS STORAGE SYSTEMS AND METHOD THEREOF
- Publication number 20220194804
- Publication date Jun 23, 2022
- Entegris, Inc.
- Oleg Byl
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Storage and Delivery Veseel for Storing GeH4, Using a Zeolitic Adso...
- Publication number 20220112986
- Publication date Apr 14, 2022
- Entegris, Inc.
- Oleg BYL
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
METHOD FOR AUTOMATICALLY REPLACING HIGH-PRESSURE GAS BARRELS
- Publication number 20210190269
- Publication date Jun 24, 2021
- AMT CO., LTD.
- Won Ho CHOI
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
AUTOMATIC ALIGNMENT METHOD OF HIGH-PRESSURE GAS CONTAINER
- Publication number 20210190268
- Publication date Jun 24, 2021
- AMT CO., LTD.
- Won Ho CHOI
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
HIGH-PRESSURE GAS CYLINDER GASKET AUTOMATIC REPLACEMENT DEVICE
- Publication number 20210080061
- Publication date Mar 18, 2021
- AMT CO., LTD.
- Won Ho CHOI
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
PROCESS AND APPARATUS FOR DISPENSING AND CHARGING GAS TO A STORAGE...
- Publication number 20210048148
- Publication date Feb 18, 2021
- Numat Technologies Inc.
- Glenn McPherson Tom
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
VACUUM SUPPLY GAS CYLINDER
- Publication number 20210041068
- Publication date Feb 11, 2021
- FENG YUAN KU
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
FLUID SUPPLY APPARATUS
- Publication number 20200292131
- Publication date Sep 17, 2020
- KCTECH CO., LTD.
- Dong Min Kim
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
GAS SUPPLY METHOD AND GAS SUPPLY SYSTEM
- Publication number 20200278084
- Publication date Sep 3, 2020
- TOKYO ELECTRON LIMITED
- Yukimasa SAITO
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
GAS SUPPLY SYSTEM
- Publication number 20200208783
- Publication date Jul 2, 2020
- VERSUM MATERIALS US, LLC
- Tae-Jun LIM
- G05 - CONTROLLING REGULATING
Information Patent Application
SMART PACKAGE
- Publication number 20200011482
- Publication date Jan 9, 2020
- Entegris, Inc.
- Joseph D. SWEENEY
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
METHOD FOR MANUFACTURING GAS-FILLED CONTAINER, AND METHOD FOR STORI...
- Publication number 20190330749
- Publication date Oct 31, 2019
- Zeon Corporation
- Yuko KOHINATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cryogenic Ferrofluid Sealed Rotary Union
- Publication number 20190301616
- Publication date Oct 3, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Robert Mitchell
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
GAS SUPPLY APPARATUS AND GAS SUPPLY METHOD
- Publication number 20190292660
- Publication date Sep 26, 2019
- SHOWA DENKO K.K.
- Takanori AOKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY VESSEL
- Publication number 20190277452
- Publication date Sep 12, 2019
- Entegris, Inc.
- Joseph Robert DESPRES
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
SMART PACKAGE
- Publication number 20190170302
- Publication date Jun 6, 2019
- Entegris, Inc.
- Joseph D. SWEENEY
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
SYSTEM AND METHOD FOR LIQUID NITROGEN RECYCLING
- Publication number 20190137040
- Publication date May 9, 2019
- Delta Design, Inc.
- Jerry Ihor TUSTANIWSKYJ
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS

Semiconductors

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Storage and delivery veseel for storing GeH4, using a zeolitic adso...

Depressurization system, apparatus and method for high pressure gas...

Systems and methods for storing molecular diborane

Vacuum supply gas cylinder

Method and supply equipment for supplying fluorine gas-containing gas

Method and system for optimized gas delivery with automated redunda...

Processing apparatus and gas supply method

Automatic alignment method of high-pressure gas container

Gas supply system

Method for automatically replacing high-pressure gas barrels

Precursor supply cabinet

High-pressure gas cylinder gasket automatic replacement device

Gas supply apparatus and gas supply method

System for automatically replacing high-pressure gas tank and metho...

Material, storage container using the material, valve attached to t...

Smart package

Gas supply vessel

Pivotable touchscreen for a gas-distribution facility

Cryogenic ferrofluid sealed rotary union

Valve with interchangeable outlet connections for high purity gases

Smart package

Liquid gas system

Microporous carbon monoliths from natural carbohydrates

Inactive gas introducing facility and inactive gas introducing method

Smart package

Heating vaporization system and heating vaporization method

Vessels with personnel access provisions

Gas injection device and assisting member

Preparation of high pressure BF3/H2 mixtures

Modified vacuum actuated valve assembly and sealing mechanism for i...

Patents Applicationslast 30 patents

GAS FILLING DOCKING TRAY AND GAS FILLING DEVICE

PROCESSING APPARATUS AND GAS SUPPLY METHOD

CONSTANT HEADSPACE AMPOULE

CYLINDRICAL SUB-ATMOSPHERIC PRESSURE REGULATING DEVICE FOR INSERTIO...

SUPPLY CONTROL SYSTEM FOR A PLURALITY OF TANKS

METHOD AND SYSTEM FOR OPTIMIZED GAS DELIVERY WITH AUTOMATED REDUNDA...

SYSTEMS AND METHODS FOR STORING MOLECULAR DIBORANE

GAS CYLINDER AUTOMATION SYSTEM

DEPRESSURIZATION SYSTEM, APPARATUS AND METHOD FOR HIGH PRESSURE GAS...

GAS STORAGE AND DISPENSING CONTAINER AND A METHOD OF DISPENSING THE...

PROCESSING APPARATUS AND GAS SUPPLY METHOD

ACETYLENE FLUID SUPPLY PACKAGE, SYSTEM COMPRISING THE SAME AND METH...

GAS SUPPLY APPARATUS AND GAS SUPPLY METHOD

GAS STORAGE SYSTEMS AND METHOD THEREOF

Storage and Delivery Veseel for Storing GeH4, Using a Zeolitic Adso...

METHOD FOR AUTOMATICALLY REPLACING HIGH-PRESSURE GAS BARRELS

AUTOMATIC ALIGNMENT METHOD OF HIGH-PRESSURE GAS CONTAINER

HIGH-PRESSURE GAS CYLINDER GASKET AUTOMATIC REPLACEMENT DEVICE

PROCESS AND APPARATUS FOR DISPENSING AND CHARGING GAS TO A STORAGE...

VACUUM SUPPLY GAS CYLINDER

FLUID SUPPLY APPARATUS

GAS SUPPLY METHOD AND GAS SUPPLY SYSTEM

GAS SUPPLY SYSTEM

SMART PACKAGE

METHOD FOR MANUFACTURING GAS-FILLED CONTAINER, AND METHOD FOR STORI...

Cryogenic Ferrofluid Sealed Rotary Union

GAS SUPPLY APPARATUS AND GAS SUPPLY METHOD

GAS SUPPLY VESSEL

SMART PACKAGE

SYSTEM AND METHOD FOR LIQUID NITROGEN RECYCLING