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CPC
G05B2219/43033
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PHYSICS
G05
Controlling systems
G05B
CONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B2219/00
Program-control systems
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G05B2219/43033
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Patent Application
ROBOT ARM CONTROL APPARATUS, SUBSTRATE TRANSFER APPARATUS, SUBSTRAT...
Publication number
20140358280
Publication date
Dec 4, 2014
EBARA CORPORATION
Hiroyuki SHINOZAKI
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS