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specially adapted for high-vacuum installations

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FMECHANICAL ENGINEERING LIGHTING HEATING WEAPONS BLASTING ENGINES OR PUMPS F16Engineering elements F16KVALVES TAPS COCKS ACTUATING-FLOATS DEVICES FOR VENTING OR AERATING F16K51/00Other details not peculiar to particular types of valves or cut-off apparatus

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F16K51/02specially adapted for high-vacuum installations
Industries

Patents Grantslast 30 patents

  • Information Patent Grant

    Mounting of vacuum valve plate
    • Patent number 12,152,686
    • Issue date Nov 26, 2024
    • VAT Holding AG
    • Mathias Schön
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Vacuum valve
    • Patent number 12,104,715
    • Issue date Oct 1, 2024
    • PFEIFFER VACUUM TECHNOLOGY AG
    • Thomas R. Hodapp
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Valve module and substrate processing device comprising the same
    • Patent number 12,092,235
    • Issue date Sep 17, 2024
    • PRESYS. CO., LTD.
    • Sang Min Kim
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Adjustment device for a vacuum area with pressure measuring functio...
    • Patent number 12,060,951
    • Issue date Aug 13, 2024
    • VAT Holding AG
    • Alejandro Marzinotto
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Gate valve and driving method
    • Patent number 11,994,234
    • Issue date May 28, 2024
    • Tokyo Electron Limited
    • Norihiko Amikura
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Apparatus and method for vacuumizing and sealing a package
    • Patent number 11,994,237
    • Issue date May 28, 2024
    • CRYOVAC, LLC
    • Gregory E. McDonald
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Vacuum valve or vacuum door
    • Patent number 11,971,118
    • Issue date Apr 30, 2024
    • VAT Holding AG
    • Marc Hübener
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Valve for a vacuum apparatus
    • Patent number 11,965,602
    • Issue date Apr 23, 2024
    • Atlas Copco Airpower N.V.
    • Johan Gustaaf Karel Aerts
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Split body, rotary C gate, removeable stem, vacuum valve
    • Patent number 11,953,111
    • Issue date Apr 9, 2024
    • Clay Owens
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Valve structure and substrate processing apparatus including the same
    • Patent number 11,948,814
    • Issue date Apr 2, 2024
    • Samsung Electronics Co., Ltd.
    • Kangmin Park
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum valve and apparatus for fabricating semiconductor having the...
    • Patent number 11,946,138
    • Issue date Apr 2, 2024
    • Samsung Electronics Co., Ltd.
    • Jaeheung Lee
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    U motion gate valve
    • Patent number 11,920,693
    • Issue date Mar 5, 2024
    • SRT Co., LTD
    • Yeongman Son
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Gate valve
    • Patent number 11,920,696
    • Issue date Mar 5, 2024
    • SMC Corporation
    • Takeshi Nishikawa
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Seal support ring for a valve
    • Patent number 11,906,066
    • Issue date Feb 20, 2024
    • VAT Holding AG
    • Christof Bachmann
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Symmetric flow valve for flow conductance control
    • Patent number 11,835,146
    • Issue date Dec 5, 2023
    • Applied Materials, Inc.
    • Andrew Nguyen
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Vacuum valve
    • Patent number 11,815,196
    • Issue date Nov 14, 2023
    • VAT Holding AG
    • Thomas Blecha
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Gate valve
    • Patent number 11,808,371
    • Issue date Nov 7, 2023
    • SMC Corporation
    • Takeshi Nishikawa
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Vacuum valve
    • Patent number 11,788,630
    • Issue date Oct 17, 2023
    • VAT Holding AG
    • Lukas Schaltegger
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Vacuum valve for loading and/or unloading a vacuum chamber
    • Patent number 11,767,931
    • Issue date Sep 26, 2023
    • VAT Holding AG
    • René Bereuter
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Advanced vacuum process control
    • Patent number 11,739,847
    • Issue date Aug 29, 2023
    • VAT Holding AG
    • Michael Zickar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Apparatus and method for vacuumizing and sealing a package
    • Patent number 11,725,748
    • Issue date Aug 15, 2023
    • CRYOVAC, LLC
    • Gregory E. McDonald
    • B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
  • Information Patent Grant

    Valve plate for sealing a valve opening of a vacuum valve
    • Patent number 11,725,739
    • Issue date Aug 15, 2023
    • VAT Holding AG
    • Lukas Schaltegger
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Stepper motor proportional control bellows valve
    • Patent number 11,668,409
    • Issue date Jun 6, 2023
    • The Digivac Company
    • James Gentile
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Dual gate valve
    • Patent number 11,668,401
    • Issue date Jun 6, 2023
    • SMC Corporation
    • Hiromi Shimoda
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Air-valve unit for vacuum system
    • Patent number 11,639,758
    • Issue date May 2, 2023
    • VTEC CO., LTD.
    • Ho-Young Cho
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Vacuum valve and actuator used in vacuum valve
    • Patent number 11,629,796
    • Issue date Apr 18, 2023
    • Sumitomo Heavy Industries, Ltd.
    • Emmanuel Vyers
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Gate valve
    • Patent number 11,608,902
    • Issue date Mar 21, 2023
    • SMC Corporation
    • Tsuyoshi Ochi
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Shake-prevention-mechanism—including gate valve
    • Patent number 11,555,546
    • Issue date Jan 17, 2023
    • SMC Corporation
    • Takashi Nagao
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Vacuum valve with position sensor
    • Patent number 11,543,051
    • Issue date Jan 3, 2023
    • VAT Holding AG
    • Christoph Böhm
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Closure mechanism vacuum chamber isolation device and sub-system
    • Patent number 11,530,751
    • Issue date Dec 20, 2022
    • Applied Materials, Inc.
    • Tuan Anh Nguyen
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PRESSURE CONTROL VALVE
    • Publication number 20240344633
    • Publication date Oct 17, 2024
    • CKD CORPORATION
    • Toshikazu OGISU
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    CLOSURE DEVICE FOR CLOSING AN OPENING IN A WALL IN A VACUUM-TIGHT M...
    • Publication number 20240309970
    • Publication date Sep 19, 2024
    • VAT HOLDING AG
    • Fabian BÜCHEL
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    GATE VALVE AND DRIVING METHOD
    • Publication number 20240309966
    • Publication date Sep 19, 2024
    • TOKYO ELECTRON LIMITED
    • Norihiko AMIKURA
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    VACUUM VALVE WITH A WIRELESS ASSEMBLY
    • Publication number 20240229967
    • Publication date Jul 11, 2024
    • VAT HOLDING AG
    • Andreas HOFER
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    VALVE, IN PARTICULAR A VACUUM VALVE
    • Publication number 20240229969
    • Publication date Jul 11, 2024
    • VAT HOLDING AG
    • Hanspeter FREHNER
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    VALVE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
    • Publication number 20240213053
    • Publication date Jun 27, 2024
    • Samsung Electronics Co., Ltd.
    • Kangmin Park
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FLUID DELIVERY SYSTEM
    • Publication number 20240183463
    • Publication date Jun 6, 2024
    • ICHOR SYSTEMS, INC.
    • Philip Ryan BARROS
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM SWITCHING VALVE AND SUCTION SYSTEM USING VACUUM SWITCHING VALVE
    • Publication number 20240151323
    • Publication date May 9, 2024
    • FUZHUN PRECISION TOOLING (JIASHAN) CO., LTD.
    • XUE-YANG LU
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Application

    VACUUM VALVE WITH A WIRELESS ASSEMBLY
    • Publication number 20240133484
    • Publication date Apr 25, 2024
    • VAT HOLDING AG
    • Andreas HOFER
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    VALVE, IN PARTICULAR A VACUUM VALVE
    • Publication number 20240133486
    • Publication date Apr 25, 2024
    • VAT HOLDING AG
    • Hanspeter FREHNER
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    VACUUM VALVE OR VACUUM DOOR
    • Publication number 20240102581
    • Publication date Mar 28, 2024
    • VAT HOLDING AG
    • Marc HÜBENER
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    VACUUM VALVE FOR A VACUUM CONVEYING SYSTEM
    • Publication number 20240026979
    • Publication date Jan 25, 2024
    • VAT HOLDING AG
    • Hanspeter FREHNER
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    CONTROL DEVICE, SUBSTRATE PROCESSING SYSTEM, AND METHOD OF CONTROLL...
    • Publication number 20240030046
    • Publication date Jan 25, 2024
    • TOKYO ELECTRON LIMITED
    • Takuya YAMAMOTO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ADJUSTMENT DEVICE FOR A VACUUM AREA WITH PRESSURE MEASURING FUNCTIO...
    • Publication number 20240003464
    • Publication date Jan 4, 2024
    • VAT HOLDING AG
    • Alejandro Marzinotto
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MODULAR VACUUM VALVE SYSTEM FOR A VACUUM TRANSPORT SYSTEM
    • Publication number 20230383864
    • Publication date Nov 30, 2023
    • VAT HOLDING AG
    • Hanspeter FREHNER
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    SEAL FOR A VACUUM VALVE
    • Publication number 20230349470
    • Publication date Nov 2, 2023
    • Atlas Copco Airpower N.V.
    • Johan Gustaaf Karel Aerts
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    APPARATUS AND METHOD FOR VACUUMIZING AND SEALING A PACKAGE
    • Publication number 20230341069
    • Publication date Oct 26, 2023
    • CRYOVAC, LLC
    • Gregory E. McDonald
    • B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
  • Information Patent Application

    INTEGRATION BOX AND PNEUMATIC HIGH VACUUM FLAPPER VALVE
    • Publication number 20230313899
    • Publication date Oct 5, 2023
    • MILO INNOVATION (SHENZHEN) CO., LTD.
    • Shiping XIE
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    VACUUM VALVE
    • Publication number 20230287993
    • Publication date Sep 14, 2023
    • PFEIFFER VACUUM TECHNOLOGY AG
    • Thomas R. HODAPP
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    METHOD AND APPARATUS FOR PRODUCING A GAS CURTAIN OF PURGE GAS IN A...
    • Publication number 20230287566
    • Publication date Sep 14, 2023
    • Siltronic AG
    • Patrick MOOS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VALVE
    • Publication number 20230258278
    • Publication date Aug 17, 2023
    • VAT HOLDING AG
    • Thomas Mayer
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    GAS PRESSURE BALANCE VALVE, GAS PRESSURE BALANCE METHOD, AND LOAD L...
    • Publication number 20230250894
    • Publication date Aug 10, 2023
    • CHANGXIN MEMORY TECHNOLOGIES, INC
    • Wenzhe LI
    • G05 - CONTROLLING REGULATING
  • Information Patent Application

    GATE VALVE AND DRIVING METHOD
    • Publication number 20230160494
    • Publication date May 25, 2023
    • TOKYO ELECTRON LIMITED
    • Norihiko AMIKURA
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    VALVE PLATE
    • Publication number 20230151892
    • Publication date May 18, 2023
    • VAT HOLDING AG
    • Mathias SCHÖN
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    VALVE FOR A VACUUM APPARATUS
    • Publication number 20230094347
    • Publication date Mar 30, 2023
    • Atlas Copco Airpower N.V.
    • Johan Gustaaf Karel Aerts
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    LOADLOCK APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE...
    • Publication number 20230097418
    • Publication date Mar 30, 2023
    • Samsung Electronics Co., Ltd.
    • Jinhyuk CHOI
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    VACUUM VALVE WITH POSITION SENSOR
    • Publication number 20230057447
    • Publication date Feb 23, 2023
    • VAT HOLDING AG
    • Christoph BÖHM
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    VACUUM MACHINING SYSTEM HAVING A PROCESS CHAMBER WITH A VACUUM REGU...
    • Publication number 20230001529
    • Publication date Jan 5, 2023
    • VAT HOLDING AG
    • Simon Naef
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    APPARATUS AND METHOD FOR VACUUMIZING AND SEALING A PACKAGE
    • Publication number 20220403955
    • Publication date Dec 22, 2022
    • CRYOVAC, LLC
    • Gregory E. McDonald
    • B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
  • Information Patent Application

    GAS INLET VALVE FOR VACUUM PROCESS CHAMBERS
    • Publication number 20220403953
    • Publication date Dec 22, 2022
    • VAT HOLDING AG
    • Florian EHRNE
    • H01 - BASIC ELECTRIC ELEMENTS