Supports specially adapted for semi-conductors

Industry

CPC
F27D5/0037

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Parent Industries

FMECHANICAL ENGINEERING LIGHTING HEATING WEAPONS BLASTING ENGINES OR PUMPS F27Furnaces F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE F27D5/00Supports, screens, or the like for the charge within the furnace

Current Industry

F27D5/0037Supports specially adapted for semi-conductors

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 12,183,602
- Issue date Dec 31, 2024
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater assembly with process gap control for batch processing chambers
- Patent number 12,020,957
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Akshay Gunaji
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Heater lift assembly spring damper
- Patent number 12,009,232
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kai-Wen Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater and heater system
- Patent number 11,961,747
- Issue date Apr 16, 2024
- Kyocera Corporation
- Yuusaku Ishimine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate manufacturing device applicable to large-di...
- Patent number 11,955,354
- Issue date Apr 9, 2024
- Kwansei Gakuin Educational Foundation
- Tadaaki Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate support, and method of ma...
- Patent number 11,929,272
- Issue date Mar 12, 2024
- Kokusai Electric Corporation
- Kenichi Suzaki
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Correction data creating method, substrate processing method, and s...
- Patent number 11,923,211
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Hiroki Endo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 11,923,212
- Issue date Mar 5, 2024
- Semes Co., Ltd.
- Kyungsik Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diffusion furnace
- Patent number 11,862,490
- Issue date Jan 2, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Pengfei Gao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate heat treatment apparatus
- Patent number 11,854,842
- Issue date Dec 26, 2023
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spot heating by moving a beam with horizontal rotary motion
- Patent number 11,842,907
- Issue date Dec 12, 2023
- Applied Materials, Inc.
- Shu-Kwan Danny Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor processing chamber with filament lamps having nonunif...
- Patent number 11,842,908
- Issue date Dec 12, 2023
- ASM IP Holding B.V.
- Shiva K. T. Rajavelu Muralidhar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature-controllable process chambers, electronic device proces...
- Patent number 11,837,478
- Issue date Dec 5, 2023
- Applied Materials, Inc.
- Paul Z. Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method
- Patent number 11,804,388
- Issue date Oct 31, 2023
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 11,798,821
- Issue date Oct 24, 2023
- Tokyo Electron Limited
- Yukinobu Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber for degassing substrates
- Patent number 11,776,825
- Issue date Oct 3, 2023
- EVATEC AG
- Rogier Lodder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 11,735,445
- Issue date Aug 22, 2023
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for doping semiconductor materials
- Patent number 11,621,168
- Issue date Apr 4, 2023
- Gyrotron Technology, Inc.
- Vladislav Sklyarevich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer holder with tapered region
- Patent number 11,395,373
- Issue date Jul 19, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Hung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Baking equipment for use in display panel manufacturing process
- Patent number 11,366,482
- Issue date Jun 21, 2022
- TCL China Star Optoelectronics Technology Co., Ltd.
- Xiaolong Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater lift assembly spring damper
- Patent number 11,367,632
- Issue date Jun 21, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kai-Wen Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Combination vacuum and over-pressure process chamber and methods re...
- Patent number 11,367,640
- Issue date Jun 21, 2022
- Yield Engineering Systems, Inc.
- William Moffat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus
- Patent number 11,302,542
- Issue date Apr 12, 2022
- Tokyo Electron Limited
- Masato Kadobe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature-controllable process chambers, electronic device proces...
- Patent number 11,107,709
- Issue date Aug 31, 2021
- Applied Materials, Inc.
- Paul Z. Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 11,087,997
- Issue date Aug 10, 2021
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method
- Patent number 11,024,523
- Issue date Jun 1, 2021
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating device and heating chamber
- Patent number 10,937,672
- Issue date Mar 2, 2021
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jun Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus emitting flash of light
- Patent number 10,541,150
- Issue date Jan 21, 2020
- SCREEN Holdings Co., Ltd.
- Kenichi Yokouchi
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
System and method for heat treatment of substrates
- Patent number 10,535,538
- Issue date Jan 14, 2020
- Gary Hillman
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Thermal treatment system with collector device
- Patent number 10,510,565
- Issue date Dec 17, 2019
- Soitec
- Didier Landru
- F27 - FURNACES KILNS OVENS RETORTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR THE THERMAL POST-TREATMENT OF AT LEAST ONE...
- Publication number 20240318352
- Publication date Sep 26, 2024
- SiCrystal GmbH
- Bernhard Ecker
- C30 - CRYSTAL GROWTH
Information Patent Application
HEATER LIFT ASSEMBLY SPRING DAMPER
- Publication number 20240304471
- Publication date Sep 12, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Kai-Wen WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER ASSEMBLY WITH PROCESS GAP CONTROL FOR BATCH PROCESSING CHAMBERS
- Publication number 20240304470
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Akshay Gunaji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTS AND TRANSFER APPARATUS FOR SUBSTRATE DEFORMATION
- Publication number 20240213078
- Publication date Jun 27, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBER WITH FILAMENT LAMPS HAVING NONUNIF...
- Publication number 20240055279
- Publication date Feb 15, 2024
- ASM IP HOLDING B.V.
- Shiva K.T. Rajavelu Muralidhar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20240030049
- Publication date Jan 25, 2024
- TOKYO ELECTRON LIMITED
- Yukinobu OTSUKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHAMBER FOR DEGASSING SUBSTRATES
- Publication number 20230395402
- Publication date Dec 7, 2023
- Evatec AG
- Rogier Lodder
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20230395405
- Publication date Dec 7, 2023
- ASM IP HOLDING B.V.
- Theodorus Oosterlaken
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SPOT HEATING BY MOVING A BEAM WITH HORIZONTAL ROTARY MOTION
- Publication number 20230369077
- Publication date Nov 16, 2023
- Applied Materials, Inc.
- Shu-Kwan Danny LAU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
DYNAMIC AND LOCALIZED TEMPERATURE CONTROL FOR EPITAXIAL DEPOSITION...
- Publication number 20230223284
- Publication date Jul 13, 2023
- Applied Materials, Inc.
- Sathya Shrinivas CHARY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230213283
- Publication date Jul 6, 2023
- SEMES CO., LTD.
- Juyeon CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER BAKING APPARATUS
- Publication number 20230187236
- Publication date Jun 15, 2023
- Samsung Electronics Co., Ltd.
- Wonguk Seo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIFFUSION FURNACE
- Publication number 20230031706
- Publication date Feb 2, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Pengfei GAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER LIFT ASSEMBLY SPRING DAMPER
- Publication number 20220319880
- Publication date Oct 6, 2022
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Kai-Wen WU
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220293439
- Publication date Sep 15, 2022
- TOKYO ELECTRON LIMITED
- Yuki WADA
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS AND HEAT TREATMENT...
- Publication number 20220214109
- Publication date Jul 7, 2022
- SCREEN Holdings Co., Ltd.
- Takahiro YAMADA
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE MANUFACTURING DEVICE APPLICABLE TO LARGE-DI...
- Publication number 20220189798
- Publication date Jun 16, 2022
- KWANSEI GAKUIN EDUCATIONAL FOUNDATION
- Tadaaki KANEKO
- C30 - CRYSTAL GROWTH
Information Patent Application
Heat Insulation Structure, Substrate Processing Apparatus, Method o...
- Publication number 20220108900
- Publication date Apr 7, 2022
- Kokusai Electric Corporation
- Hironori SHIMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING EQUIPMENT
- Publication number 20220084847
- Publication date Mar 17, 2022
- SEMES CO., LTD.
- JEE YOUNG LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heater Assembly with Process Gap Control for Batch Processing Chambers
- Publication number 20220068674
- Publication date Mar 3, 2022
- Applied Materials, Inc.
- Akshay Gunaji
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
BAKING EQUIPMENT FOR USE IN DISPLAY PANEL MANUFACTURING PROCESS
- Publication number 20220026938
- Publication date Jan 27, 2022
- TCL China Star Optoelectronics Technology Co., Ltd.
- Xiaolong MENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPOT HEATING BY MOVING A BEAM WITH HORIZONTAL ROTARY MOTION
- Publication number 20220013376
- Publication date Jan 13, 2022
- Applied Materials, Inc.
- Shu-Kwan Danny LAU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20220013372
- Publication date Jan 13, 2022
- SEMES CO., LTD.
- Miso PARK
- B08 - CLEANING
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20210407865
- Publication date Dec 30, 2021
- Kokusai Electric Corporation
- Kenji SHINOZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING APPARATUS
- Publication number 20210366745
- Publication date Nov 25, 2021
- SCREEN Holdings Co., Ltd.
- Masashi FURUKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLANGE AND APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20210366742
- Publication date Nov 25, 2021
- ASM IP HOLDING B.V.
- Jeroen de Jonge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRESS SINTERING PROCESS PRODUCT CARRIER, PRESS SINTERING APPARATUS...
- Publication number 20210354198
- Publication date Nov 18, 2021
- BOSCHMAN TECHNOLOGIES BV
- Johannes Cornelis de Beijer
- B22 - CASTING POWDER METALLURGY
Information Patent Application
TEMPERATURE-CONTROLLABLE PROCESS CHAMBERS, ELECTRONIC DEVICE PROCES...
- Publication number 20210358777
- Publication date Nov 18, 2021
- Applied Materials, Inc.
- Paul Z. Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER LIFT ASSEMBLY SPRING DAMPER
- Publication number 20210351048
- Publication date Nov 11, 2021
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Kai-Wen WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20210320020
- Publication date Oct 14, 2021
- ASM IP HOLDING B.V.
- Theodorus Oosterlaken
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Supports specially adapted for semi-conductors

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus for processing substrates

Heater assembly with process gap control for batch processing chambers

Heater lift assembly spring damper

Heater and heater system

Semiconductor substrate manufacturing device applicable to large-di...

Substrate processing apparatus, substrate support, and method of ma...

Correction data creating method, substrate processing method, and s...

Apparatus and method for treating substrate

Diffusion furnace

Substrate heat treatment apparatus

Spot heating by moving a beam with horizontal rotary motion

Semiconductor processing chamber with filament lamps having nonunif...

Temperature-controllable process chambers, electronic device proces...

Substrate processing apparatus and method

Substrate processing apparatus, substrate processing method, and st...

Chamber for degassing substrates

Substrate processing apparatus for processing substrates

Method and system for doping semiconductor materials

Wafer holder with tapered region

Baking equipment for use in display panel manufacturing process

Heater lift assembly spring damper

Combination vacuum and over-pressure process chamber and methods re...

Processing apparatus

Temperature-controllable process chambers, electronic device proces...

Substrate processing apparatus for processing substrates

Substrate processing apparatus and method

Heating device and heating chamber

Heat treatment apparatus emitting flash of light

System and method for heat treatment of substrates

Thermal treatment system with collector device

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR THE THERMAL POST-TREATMENT OF AT LEAST ONE...

HEATER LIFT ASSEMBLY SPRING DAMPER

HEATER ASSEMBLY WITH PROCESS GAP CONTROL FOR BATCH PROCESSING CHAMBERS

SUBSTRATE SUPPORTS AND TRANSFER APPARATUS FOR SUBSTRATE DEFORMATION

SEMICONDUCTOR PROCESSING CHAMBER WITH FILAMENT LAMPS HAVING NONUNIF...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

CHAMBER FOR DEGASSING SUBSTRATES

SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES

SPOT HEATING BY MOVING A BEAM WITH HORIZONTAL ROTARY MOTION

DYNAMIC AND LOCALIZED TEMPERATURE CONTROL FOR EPITAXIAL DEPOSITION...

SUBSTRATE PROCESSING APPARATUS

WAFER BAKING APPARATUS

DIFFUSION FURNACE

HEATER LIFT ASSEMBLY SPRING DAMPER

SUBSTRATE PROCESSING APPARATUS

LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS AND HEAT TREATMENT...

SEMICONDUCTOR SUBSTRATE MANUFACTURING DEVICE APPLICABLE TO LARGE-DI...

Heat Insulation Structure, Substrate Processing Apparatus, Method o...

SUBSTRATE TREATING EQUIPMENT

Heater Assembly with Process Gap Control for Batch Processing Chambers

BAKING EQUIPMENT FOR USE IN DISPLAY PANEL MANUFACTURING PROCESS

SPOT HEATING BY MOVING A BEAM WITH HORIZONTAL ROTARY MOTION

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

Method of Manufacturing Semiconductor Device, Substrate Processing...

THERMAL PROCESSING APPARATUS

FLANGE AND APPARATUS FOR PROCESSING SUBSTRATES

PRESS SINTERING PROCESS PRODUCT CARRIER, PRESS SINTERING APPARATUS...

TEMPERATURE-CONTROLLABLE PROCESS CHAMBERS, ELECTRONIC DEVICE PROCES...

HEATER LIFT ASSEMBLY SPRING DAMPER

SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES