Surface waves

Industry

CPC
H05H2001/4615

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Parent Industries

HELECTRICITY H05Electric techniques H05HPLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS

Current Industry

H05H2001/4615Surface waves

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Scalable multi-role surface-wave plasma generator
- Patent number 10,531,553
- Issue date Jan 7, 2020
- Starfire Industries, LLC
- David N. Ruzic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scalable multi-role surface-wave plasma generator
- Patent number 9,867,269
- Issue date Jan 9, 2018
- Starfire Industries, LLC
- David N. Ruzic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Antenna for plasma generation, plasma processing apparatus and plas...
- Patent number 9,552,966
- Issue date Jan 24, 2017
- Tokyo Electron Limited
- Tomohito Komatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave emission mechanism, microwave plasma source and surface w...
- Patent number 9,520,272
- Issue date Dec 13, 2016
- Tokyo Electron Limited
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for the excitation of a gas column enclosed in a hollow-core...
- Patent number 9,203,203
- Issue date Dec 1, 2015
- Universite de Limoges
- Fetah Benabid
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Adjustable slot antenna for control of uniformity in a surface wave...
- Patent number 9,155,183
- Issue date Oct 6, 2015
- Tokyo Electron Limited
- Sergey A. Voronin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Control of uniformity in a surface wave plasma source
- Patent number 9,101,042
- Issue date Aug 4, 2015
- Tokyo Electron Limited
- Sergey A. Voronin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Low electron temperature microwave surface-wave plasma (SWP) proces...
- Patent number 8,968,588
- Issue date Mar 3, 2015
- Tokyo Electron Limited
- Jianping Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for large scale atmospheric plasma generation
- Patent number 8,124,013
- Issue date Feb 28, 2012
- HRL Laboratories, LLC
- Daniel J. Gregoire
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for surface decontamination using electromagnetic...
- Patent number 7,931,858
- Issue date Apr 26, 2011
- HRL Laboratories, LLC
- Adam F. Gross
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Method of silica optical fiber preform production
- Patent number 6,988,380
- Issue date Jan 24, 2006
- CeramOptec Industries, Inc.
- Wolfgang Neuberger
- C03 - GLASS MINERAL OR SLAG WOOL

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190075644
- Publication date Mar 7, 2019
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20180337023
- Publication date Nov 22, 2018
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SCALABLE MULTI-ROLE SURFACE-WAVE PLASMA GENERATOR
- Publication number 20180199423
- Publication date Jul 12, 2018
- STARFIRE INDUSTRIES, LLC
- David N. Ruzic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE EMISSION MECHANISM, MICROWAVE PLASMA SOURCE AND SURFACE W...
- Publication number 20140361684
- Publication date Dec 11, 2014
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTENNA FOR PLASMA GENERATION, PLASMA PROCESSING APPARATUS AND PLAS...
- Publication number 20140339981
- Publication date Nov 20, 2014
- Tomohito Komatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scalable Multi-Role Surface-Wave Plasma Generator
- Publication number 20140315347
- Publication date Oct 23, 2014
- STARFIRE INDUSTRIES, LLC
- David N. Ruzic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED AND MODULAR APPROACH FOR CONVERTING ELECTRICAL POWER TO...
- Publication number 20140231417
- Publication date Aug 21, 2014
- Charles D. Barton
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DEVICE FOR THE EXCITATION OF A GAS COLUMN ENCLOSED IN A HOLLOW-CORE...
- Publication number 20140048410
- Publication date Feb 20, 2014
- Universite De Limoges
- Fetah Benabid
- G02 - OPTICS
Information Patent Application
ADJUSTABLE SLOT ANTENNA FOR CONTROL OF UNIFORMITY IN A SURFACE WAVE...
- Publication number 20140028190
- Publication date Jan 30, 2014
- TOKYO ELECTRON LIMITED
- Sergey A. Voronin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CONTROL OF UNIFORMITY IN A SURFACE WAVE PLASMA SOURCE
- Publication number 20140028184
- Publication date Jan 30, 2014
- TOKYO ELECTRON LIMITED
- Sergey A. Voronin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA GENERATOR AND CLEANING/PURIFICATION APPARATUS USING SAME
- Publication number 20130334955
- Publication date Dec 19, 2013
- PANASONIC CORPORATION
- Akihiko Saitoh
- A46 - BRUSHWARE
Information Patent Application
LOW ELECTRON TEMPERATURE MICROWAVE SURFACE-WAVE PLASMA (SWP) PROCES...
- Publication number 20130256272
- Publication date Oct 3, 2013
- TOKYO ELECTRON LIMITED
- Jianping Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROWAVE EMITTING DEVICE AND SURFACE WAVE PLASMA PROCESSING APPARATUS
- Publication number 20130192760
- Publication date Aug 1, 2013
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of silica optical fiber preform production
- Publication number 20040031289
- Publication date Feb 19, 2004
- CeramOptec Industries, Inc.
- Wolfgang Neuberger
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Surface waves

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Scalable multi-role surface-wave plasma generator

Scalable multi-role surface-wave plasma generator

Antenna for plasma generation, plasma processing apparatus and plas...

Microwave emission mechanism, microwave plasma source and surface w...

Device for the excitation of a gas column enclosed in a hollow-core...

Adjustable slot antenna for control of uniformity in a surface wave...

Control of uniformity in a surface wave plasma source

Low electron temperature microwave surface-wave plasma (SWP) proces...

System and method for large scale atmospheric plasma generation

System and method for surface decontamination using electromagnetic...

Method of silica optical fiber preform production

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

SCALABLE MULTI-ROLE SURFACE-WAVE PLASMA GENERATOR

MICROWAVE EMISSION MECHANISM, MICROWAVE PLASMA SOURCE AND SURFACE W...

ANTENNA FOR PLASMA GENERATION, PLASMA PROCESSING APPARATUS AND PLAS...

Scalable Multi-Role Surface-Wave Plasma Generator

INTEGRATED AND MODULAR APPROACH FOR CONVERTING ELECTRICAL POWER TO...

DEVICE FOR THE EXCITATION OF A GAS COLUMN ENCLOSED IN A HOLLOW-CORE...

ADJUSTABLE SLOT ANTENNA FOR CONTROL OF UNIFORMITY IN A SURFACE WAVE...

CONTROL OF UNIFORMITY IN A SURFACE WAVE PLASMA SOURCE

PLASMA GENERATOR AND CLEANING/PURIFICATION APPARATUS USING SAME

LOW ELECTRON TEMPERATURE MICROWAVE SURFACE-WAVE PLASMA (SWP) PROCES...

MICROWAVE EMITTING DEVICE AND SURFACE WAVE PLASMA PROCESSING APPARATUS

Method of silica optical fiber preform production