Synchronization between AGV movement and workpiece treatment chambers

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G05B2219/31014

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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G05B2219/31014Synchronization between AGV movement and workpiece treatment chambers

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Patents Grantslast 30 patents

Information Patent Grant
Matching process controllers for improved matching of process
- Patent number 10,884,400
- Issue date Jan 5, 2021
- Applied Materials, Inc.
- James Robert Moyne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Efficient transfer of materials in manufacturing
- Patent number 9,901,210
- Issue date Feb 27, 2018
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Chew Foo Chan
- G05 - CONTROLLING REGULATING
Information Patent Grant
Transfer system
- Patent number 9,805,961
- Issue date Oct 31, 2017
- Denso Corporation
- Masaaki Kuroyanagi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate transport apparatus and method for manufacturing magnetic...
- Patent number 8,534,975
- Issue date Sep 17, 2013
- Canon Anelva Corporation
- Itaru Hagiwara
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SELF-AWARE AND CORRECTING HETEROGENOUS PLATFORM INCORPORATING INTEG...
- Publication number 20200043764
- Publication date Feb 6, 2020
- TOKYO ELECTRON LIMITED
- Robert Clark
- G05 - CONTROLLING REGULATING
Information Patent Application
MATCHING PROCESS CONTROLLERS FOR IMPROVED MATCHING OF PROCESS
- Publication number 20170168477
- Publication date Jun 15, 2017
- Applied Materials, Inc.
- James Robert Moyne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EFFICIENT TRANSFER OF MATERIALS IN MANUFACTURING
- Publication number 20130184849
- Publication date Jul 18, 2013
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Chew Foo CHAN
- A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS AND METHOD FOR MANUFACTURING MAGNETIC...
- Publication number 20100101075
- Publication date Apr 29, 2010
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- Itaru HAGIWARA
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