the radical having only two carbon-to-carbon double bonds

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    Homoleptic lanthanide deposition precursors

    • Patent number 11,866,824
    • Issue date Jan 9, 2024
    • Applied Materials, Inc.
    • Thomas Knisley
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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    Homoleptic lanthanide deposition precursors

    • Patent number 11,473,198
    • Issue date Oct 18, 2022
    • Applied Materials, Inc.
    • Thomas Knisley
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

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