the resonators or networks being of the micro-electro-mechanical [MEMS] type

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HELECTRICITY H03Electronic circuits H03HIMPEDANCE NETWORKS

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H03H2003/027the resonators or networks being of the micro-electro-mechanical [MEMS] type

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Patents Grantslast 30 patents

Information Patent Grant
Microelectromechanical resonator
- Patent number 12,218,647
- Issue date Feb 4, 2025
- SiTime Corporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Piezo-actuated MEMS resonator with reduced nonlinear tcf
- Patent number 12,166,464
- Issue date Dec 10, 2024
- SiTime Corporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Method for manufacturing a piezoelectric resonator
- Patent number 12,160,215
- Issue date Dec 3, 2024
- Robert Bosch GmbH
- Friedjof Heuck
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Method of manufacturing quartz crystal element
- Patent number 12,113,502
- Issue date Oct 8, 2024
- Seiko Epson Corporation
- Masaya Kanno
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Piezoelectric MEMS resonators based on porous silicon technologies
- Patent number 12,034,431
- Issue date Jul 9, 2024
- Xiang Zheng Tu
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Multiplexer
- Patent number 11,984,913
- Issue date May 14, 2024
- Murata Manufacturing Co., Ltd.
- Tetsuro Okuda
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Microelectromechanical resonator
- Patent number 11,916,534
- Issue date Feb 27, 2024
- SiTime Corporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Piezo-actuated MEMS resonator
- Patent number 11,909,376
- Issue date Feb 20, 2024
- SiTime Corporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Elastic wave device and method for manufacturing the same
- Patent number 11,863,152
- Issue date Jan 2, 2024
- Murata Manufacturing Co., Ltd.
- Munehisa Watanabe
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Non-linear tethers for suspended devices
- Patent number 11,863,154
- Issue date Jan 2, 2024
- X-CELEPRINT LIMITED
- António José Marques Trindade
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Piezoelectric microelectromechanical resonator device and correspon...
- Patent number 11,855,604
- Issue date Dec 26, 2023
- STMicroelectronics S.r.l.
- Federico Vercesi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming an integrated resonator with a mass bias
- Patent number 11,799,436
- Issue date Oct 24, 2023
- Texas Instruments Incorporated
- Byron Neville Burgess
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device on ceramic substrate
- Patent number 11,791,226
- Issue date Oct 17, 2023
- QUALCOMM Incorporated
- Je-Hsiung Lan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vibrator device, manufacturing method of vibrator device, electroni...
- Patent number 11,784,632
- Issue date Oct 10, 2023
- Seiko Epson Corporation
- Takashi Yamazaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Acoustic resonator device with controlled placement of functionaliz...
- Patent number 11,695,384
- Issue date Jul 4, 2023
- QORVO BIOTECHNOLOGIES, LLC
- Matthew Ryder
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Microelectromechanical resonator
- Patent number 11,677,379
- Issue date Jun 13, 2023
- SiTime Corporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Super-regenerative transceiver with improved frequency discrimination
- Patent number 11,658,612
- Issue date May 23, 2023
- MuMec, Inc.
- Thura Lin Naing
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Non-linear tethers for suspended devices
- Patent number 11,637,540
- Issue date Apr 25, 2023
- X-CELEPRINT LIMITED
- António José Marques Trindade
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Fin bulk acoustic resonator technology for UHF and SHF signal proce...
- Patent number 11,611,328
- Issue date Mar 21, 2023
- University of Florida Research Foundation, Incorporated
- Roozbeh Tabrizian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin-film bulk acoustic resonator and semiconductor apparatus compr...
- Patent number 11,601,106
- Issue date Mar 7, 2023
- Semiconductor Manufacturing International (Shanghai) Corporation
- Herb He Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Piezoelectric MEMS resonators based on porous silicon technologies
- Patent number 11,601,111
- Issue date Mar 7, 2023
- Xiang Zheng Tu
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Guided wave devices with selectively loaded piezoelectric layers
- Patent number 11,588,466
- Issue date Feb 21, 2023
- Qorvo US, Inc.
- Kushal Bhattacharjee
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Plate wave devices with wave confinement structures and fabrication...
- Patent number 11,545,955
- Issue date Jan 3, 2023
- Qorvo US, Inc.
- Kushal Bhattacharjee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Elastic wave device and method for manufacturing the same
- Patent number 11,509,280
- Issue date Nov 22, 2022
- Murata Manufacturing Co., Ltd.
- Munehisa Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Piezoelectric single crystal silicon carbide microelectromechanical...
- Patent number 11,509,277
- Issue date Nov 22, 2022
- HRL Laboratories, LLC
- Raviv Perahia
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Method of manufacturing integrated circuit configured with two or m...
- Patent number 11,496,109
- Issue date Nov 8, 2022
- AKOUSTIS, INC.
- Jeffrey B. Shealy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spurious-mode-free, laterally-vibrating microelectromechanical syst...
- Patent number 11,496,110
- Issue date Nov 8, 2022
- The Board of Trustees of the University of Illinois
- Songbin Gong
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Method of manufacture for single crystal capacitor dielectric for a...
- Patent number 11,495,734
- Issue date Nov 8, 2022
- AKOUSTIS, INC.
- Jeffrey B. Shealy
- C30 - CRYSTAL GROWTH
Information Patent Grant
Multi-frequency guided wave devices and fabrication methods
- Patent number 11,476,827
- Issue date Oct 18, 2022
- Qorvo US, Inc.
- Kushal Bhattacharjee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating a SiC resonator
- Patent number 11,469,732
- Issue date Oct 11, 2022
- HRL Laboratories, LLC
- Raviv Perahia
- H03 - BASIC ELECTRONIC CIRCUITRY

Patents Applicationslast 30 patents

Information Patent Application
MICROELECTROMECHANICAL RESONATOR
- Publication number 20250007492
- Publication date Jan 2, 2025
- SiTime Corporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
ION IRRADIATION OF MICROELECTROMECHANICAL RESONATORS
- Publication number 20240297630
- Publication date Sep 5, 2024
- Government of the United States as Represented by the Secretary of the Air Force
- Hengky Chandrahalim
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Piezo-actuated MEMS Resonator
- Publication number 20240223151
- Publication date Jul 4, 2024
- SiTime Coporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
PIEZOELECTRIC MICROELECTROMECHANICAL RESONATOR DEVICE AND CORRESPON...
- Publication number 20240154599
- Publication date May 9, 2024
- STMicroelectronics S.r.l.
- Federico VERCESI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20240088863
- Publication date Mar 14, 2024
- Murata Manufacturing Co., Ltd.
- Munehisa WATANABE
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Integrated Acoustic Devices
- Publication number 20230387877
- Publication date Nov 30, 2023
- The Government of the United States of America, as represented by the Secreta...
- Vikrant J. GOKHALE
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MEMS DEVICE AND FABRICATION METHOD THEREOF
- Publication number 20230336149
- Publication date Oct 19, 2023
- NINGBO SEMICONDUCTOR INTERNATIONAL CORPORATION
- Wei LI
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
PLATE WAVE DEVICES WITH WAVE CONFINEMENT STRUCTURES AND FABRICATION...
- Publication number 20230134688
- Publication date May 4, 2023
- Qorvo US, Inc.
- Kushal Bhattacharjee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Piezoelectric MEMS Resonators based on Porous Silicon Technologies
- Publication number 20230116933
- Publication date Apr 20, 2023
- Xiang Zheng Tu
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONATOR AND METHOD OF MANUFACTURING THE RESONATOR, AND STRAIN SEN...
- Publication number 20230103757
- Publication date Apr 6, 2023
- Samsung Electronics Co., Ltd.
- Cheheung KIM
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
NON-LINEAR TETHERS FOR SUSPENDED DEVICES
- Publication number 20230085815
- Publication date Mar 23, 2023
- X-CELEPRINT LIMITED
- António José Marques Trindade
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20230037734
- Publication date Feb 9, 2023
- Murata Manufacturing Co., Ltd.
- Munehisa WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING INTEGRATED CIRCUIT CONFIGURED WITH TWO OR M...
- Publication number 20230025951
- Publication date Jan 26, 2023
- Akoustis, Inc.
- Jeffrey B. SHEALY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACOUSTIC RESONATOR DEVICE WITH CONTROLLED PLACEMENT OF FUNCTIONALIZ...
- Publication number 20220385262
- Publication date Dec 1, 2022
- QORVO BIOTECHNOLOGIES, LLC
- Matthew Ryder
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MICROELECTROMECHANICAL RESONATOR
- Publication number 20220337218
- Publication date Oct 20, 2022
- SiTime Coporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
METHOD FOR MANUFACTURING A PIEZOELECTRIC RESONATOR
- Publication number 20220231652
- Publication date Jul 21, 2022
- ROBERT BOSCH GmbH
- Friedjof Heuck
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MICROELECTROMECHANICAL RESONATOR
- Publication number 20220166403
- Publication date May 26, 2022
- SiTime Coporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MULTIPLEXER
- Publication number 20210297097
- Publication date Sep 23, 2021
- Murata Manufacturing Co., Ltd.
- Tetsuro OKUDA
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
NON-LINEAR TETHERS FOR SUSPENDED DEVICES
- Publication number 20210135648
- Publication date May 6, 2021
- X-Celeprint Limited
- António José Marques Trindade
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
DEVICE ON CERAMIC SUBSTRATE
- Publication number 20210098319
- Publication date Apr 1, 2021
- QUALCOMM Incorporated
- Je-Hsiung LAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Buk Acoustic Wave Resonator with Guard Rings having Recessed Space...
- Publication number 20200274514
- Publication date Aug 27, 2020
- TEXAS INSTRUMENTS INCORPORATED
- Ting-Ta Yen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FIN BULK ACOUSTIC RESONATOR TECHNOLOGY FOR UHF AND SHF SIGNAL PROCE...
- Publication number 20200259479
- Publication date Aug 13, 2020
- University of Florida Research Foundation, Incorporated
- Roozbeh TABRIZIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPURIOUS-MODE-FREE, LATERALLY-VIBRATING MICROELECTROMECHANICAL SYST...
- Publication number 20200212873
- Publication date Jul 2, 2020
- Board of Trustees of the University of Illinois
- Songbin Gong
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20200083859
- Publication date Mar 12, 2020
- Murata Manufacturing Co., Ltd.
- Munehisa WATANABE
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MICROELECTROMECHANICAL RESONATOR
- Publication number 20200028485
- Publication date Jan 23, 2020
- SiTime Coporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
SUPER-REGENERATIVE TRANSCEIVER WITH IMPROVED FREQUENCY DISCRIMINATION
- Publication number 20190379416
- Publication date Dec 12, 2019
- MuMec, Inc.
- Thura Lin Naing
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
PLATE WAVE DEVICES WITH WAVE CONFINEMENT STRUCTURES AND FABRICATION...
- Publication number 20190379345
- Publication date Dec 12, 2019
- Qorvo US, Inc.
- Kushal Bhattacharjee
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MULTI-FREQUENCY GUIDED WAVE DEVICES AND FABRICATION METHODS
- Publication number 20190341904
- Publication date Nov 7, 2019
- Qorvo US, Inc.
- Kushal Bhattacharjee
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
METHOD OF FABRICATING A SIC RESONATOR
- Publication number 20190305744
- Publication date Oct 3, 2019
- HRL LABORATORIES, LLC
- Raviv PERAHIA
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
GUIDED WAVE DEVICES WITH SELECTIVELY LOADED PIEZOELECTRIC LAYERS
- Publication number 20190296713
- Publication date Sep 26, 2019
- Qorvo US, Inc.
- Kushal Bhattacharjee
- H03 - BASIC ELECTRONIC CIRCUITRY

the resonators or networks being of the micro-electro-mechanical [MEMS] type

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Microelectromechanical resonator

Piezo-actuated MEMS resonator with reduced nonlinear tcf

Method for manufacturing a piezoelectric resonator

Method of manufacturing quartz crystal element

Piezoelectric MEMS resonators based on porous silicon technologies

Multiplexer

Microelectromechanical resonator

Piezo-actuated MEMS resonator

Elastic wave device and method for manufacturing the same

Non-linear tethers for suspended devices

Piezoelectric microelectromechanical resonator device and correspon...

Method of forming an integrated resonator with a mass bias

Device on ceramic substrate

Vibrator device, manufacturing method of vibrator device, electroni...

Acoustic resonator device with controlled placement of functionaliz...

Microelectromechanical resonator

Super-regenerative transceiver with improved frequency discrimination

Non-linear tethers for suspended devices

Fin bulk acoustic resonator technology for UHF and SHF signal proce...

Thin-film bulk acoustic resonator and semiconductor apparatus compr...

Piezoelectric MEMS resonators based on porous silicon technologies

Guided wave devices with selectively loaded piezoelectric layers

Plate wave devices with wave confinement structures and fabrication...

Elastic wave device and method for manufacturing the same

Piezoelectric single crystal silicon carbide microelectromechanical...

Method of manufacturing integrated circuit configured with two or m...

Spurious-mode-free, laterally-vibrating microelectromechanical syst...

Method of manufacture for single crystal capacitor dielectric for a...

Multi-frequency guided wave devices and fabrication methods

Method of fabricating a SiC resonator

Patents Applicationslast 30 patents

MICROELECTROMECHANICAL RESONATOR

ION IRRADIATION OF MICROELECTROMECHANICAL RESONATORS

Piezo-actuated MEMS Resonator

PIEZOELECTRIC MICROELECTROMECHANICAL RESONATOR DEVICE AND CORRESPON...

ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME

Integrated Acoustic Devices

MEMS DEVICE AND FABRICATION METHOD THEREOF

PLATE WAVE DEVICES WITH WAVE CONFINEMENT STRUCTURES AND FABRICATION...

Piezoelectric MEMS Resonators based on Porous Silicon Technologies

RESONATOR AND METHOD OF MANUFACTURING THE RESONATOR, AND STRAIN SEN...

NON-LINEAR TETHERS FOR SUSPENDED DEVICES

ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME

METHOD OF MANUFACTURING INTEGRATED CIRCUIT CONFIGURED WITH TWO OR M...

ACOUSTIC RESONATOR DEVICE WITH CONTROLLED PLACEMENT OF FUNCTIONALIZ...

MICROELECTROMECHANICAL RESONATOR

METHOD FOR MANUFACTURING A PIEZOELECTRIC RESONATOR

MICROELECTROMECHANICAL RESONATOR

MULTIPLEXER

NON-LINEAR TETHERS FOR SUSPENDED DEVICES

DEVICE ON CERAMIC SUBSTRATE

Buk Acoustic Wave Resonator with Guard Rings having Recessed Space...

FIN BULK ACOUSTIC RESONATOR TECHNOLOGY FOR UHF AND SHF SIGNAL PROCE...

SPURIOUS-MODE-FREE, LATERALLY-VIBRATING MICROELECTROMECHANICAL SYST...

ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME

MICROELECTROMECHANICAL RESONATOR

SUPER-REGENERATIVE TRANSCEIVER WITH IMPROVED FREQUENCY DISCRIMINATION

PLATE WAVE DEVICES WITH WAVE CONFINEMENT STRUCTURES AND FABRICATION...

MULTI-FREQUENCY GUIDED WAVE DEVICES AND FABRICATION METHODS

METHOD OF FABRICATING A SIC RESONATOR

GUIDED WAVE DEVICES WITH SELECTIVELY LOADED PIEZOELECTRIC LAYERS