Two xy tables, on top and below workpiece, in between a cutting wire

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CPC
G05B2219/49266

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Parent Industries

GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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G05B2219/49266Two xy tables, on top and below workpiece, in between a cutting wire

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Patents Grantslast 30 patents

Information Patent Grant
XY table for a semiconductor manufacturing apparatus
- Patent number 6,727,666
- Issue date Apr 27, 2004
- Kabushiki Kaisha Shinkawa
- Ryuichi Kyomasu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
XY table for a semiconductor manufacturing apparatus
- Publication number 20020180386
- Publication date Dec 5, 2002
- Ryuichi Kyomasu
- G05 - CONTROLLING REGULATING