Two y axis to control also rotation

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G05B2219/49258

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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G05B2219/49258Two y axis to control also rotation

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Patents Grantslast 30 patents

Information Patent Grant
Stage position control method and stage position control apparatus...
- Patent number 6,584,367
- Issue date Jun 24, 2003
- Sumitomo Heavy Industries, Ltd.
- Kenichi Makino
- G05 - CONTROLLING REGULATING
Information Patent Grant
Precision positioning apparatus
- Patent number 5,511,930
- Issue date Apr 30, 1996
- Canon Kabushiki Kaisha
- Mikio Sato
- G05 - CONTROLLING REGULATING
Information Patent Grant
Multi-axis gas bearing stage assembly
- Patent number 4,676,649
- Issue date Jun 30, 1987
- Compact Spindle Bearing Corp.
- Edward H. Phillips
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR