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using a plasma
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CPC
C01B21/0724
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Parent Industries
C
CHEMISTRY METALLURGY
C01
Inorganic chemistry
C01B
NON-METALLIC ELEMENTS COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
C01B21/00
Nitrogen Compounds thereof
Current Industry
C01B21/0724
using a plasma
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