using interferometers

Industry

CPC
B23Q17/2495

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B23Machine tools B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS B23Q17/00Arrangements for observing, indicating or measuring on machine tools

Current Industry

B23Q17/2495using interferometers

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Direct pose feedback control method and direct pose feedback contro...
- Patent number 11,498,179
- Issue date Nov 15, 2022
- LEI & SO Co., Ltd.
- Wei-Tai Lei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Tool device and method for measuring a condition of a machining tool
- Patent number 11,484,984
- Issue date Nov 1, 2022
- AGATHON AG, MASCHINENFABRIK
- Stephan Scholze
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Multi-degree-of-freedom error measurement system for rotary axes an...
- Patent number 11,148,245
- Issue date Oct 19, 2021
- National Chung Cheng University
- Chien-Sheng Liu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Manufacturing system
- Patent number 11,014,212
- Issue date May 25, 2021
- Broetje-Automation GmbH
- Wilfried Ficken
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Measurement, calibration and compensation system and method for mac...
- Patent number 10,189,133
- Issue date Jan 29, 2019
- NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY
- Yi-Yuh Hwang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Error measurement method and machine tool
- Patent number 9,506,745
- Issue date Nov 29, 2016
- Makino Milling Machine Co., Ltd.
- Tadashi Kasahara
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Precision feeding device and precision transfer equipment
- Patent number 9,227,286
- Issue date Jan 5, 2016
- Mitutoyo Corporation
- Hisayoshi Sakai
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Precision transfer equipment
- Patent number 8,919,219
- Issue date Dec 30, 2014
- Mitutoyo Corporation
- Hisayoshi Sakai
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Measuring apparatus and measuring method thereof, apparatus for cor...
- Patent number 8,885,038
- Issue date Nov 11, 2014
- Fuji Machine Mfg. Co., Ltd.
- Tosuke Kawada
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chucking fixture with device for measuring the distance between a c...
- Patent number 8,308,169
- Issue date Nov 13, 2012
- System 3R International AB
- Håkan Dahlquist
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Positioning apparatus, exposure apparatus, and device manufacturing...
- Patent number 7,646,488
- Issue date Jan 12, 2010
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Two-dimensional nanopositioner with crude and fine stages
- Patent number 7,605,928
- Issue date Oct 20, 2009
- Vadim I. Rakhovsky
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Decoupled planar positioning system
- Patent number 7,271,879
- Issue date Sep 18, 2007
- Agency for Science, Technology and Research
- Ser Yong Lim
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for calibrating the geometry of a multi-axis metrology system
- Patent number 7,173,691
- Issue date Feb 6, 2007
- QED Technologies International, Inc.
- Paul Murphy
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Compensating for cable drag forces in high precision stages
- Patent number 6,937,911
- Issue date Aug 30, 2005
- Nikon Corporation
- Douglas C. Watson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and system for ultra-precision positioning
- Patent number 6,839,970
- Issue date Jan 11, 2005
- The Regents of the University of California
- Richard C. Montesanti
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Travelling worktable apparatus
- Patent number 6,659,441
- Issue date Dec 9, 2003
- Hitachi, Ltd.
- Masaki Mizuochi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Travelling worktable apparatus
- Patent number 6,446,950
- Issue date Sep 10, 2002
- Hitachi, Ltd.
- Masaki Mizuochi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Ultra-precision positioning assembly
- Patent number 6,408,526
- Issue date Jun 25, 2002
- The Regents of the University of California
- Richard C. Montesanti
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Stage apparatus
- Patent number 6,281,643
- Issue date Aug 28, 2001
- Nikon Corporation
- Akimitsu Ebihara
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Measurement and compensation system for thermal errors in machine t...
- Patent number 6,167,634
- Issue date Jan 2, 2001
- SNU Precision Co., Ltd.
- Heui Jae Pahk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement for sensing elastic deformation in a tool stem in a mac...
- Patent number 6,023,325
- Issue date Feb 8, 2000
- Reflex Instrument AB
- Bengt Sahlgren
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser interferometer measurement system for use with machine tools
- Patent number 5,940,180
- Issue date Aug 17, 1999
- Giddings & Lewis
- Lyle D. Ostby
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Stage apparatus
- Patent number 5,726,542
- Issue date Mar 10, 1998
- Nikon Corporation
- Akimitsu Ebihara
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Machine tool vibration isolation system
- Patent number 5,538,373
- Issue date Jul 23, 1996
- Giddings & Lewis, Inc.
- Edward E. Kirkham
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Movable stage mechanism and exposure apparatus using the same
- Patent number 5,537,186
- Issue date Jul 16, 1996
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
3-D measurement of cutting tool wear
- Patent number 5,361,308
- Issue date Nov 1, 1994
- General Motors Corporation
- Yong H. Lee
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Movable table system
- Patent number 4,750,721
- Issue date Jun 14, 1988
- Dainippon Screen Mfg. Co., Ltd.
- Shigeru Sasada
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Multi-axis gas bearing stage assembly
- Patent number 4,676,649
- Issue date Jun 30, 1987
- Compact Spindle Bearing Corp.
- Edward H. Phillips
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Adjustable machining system and implement therefore
- Patent number 4,581,808
- Issue date Apr 15, 1986
- The Charles Stark Draper Laboratory
- John R. Lawson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
DIRECT POSE FEEDBACK CONTROL METHOD AND DIRECT POSE FEEDBACK CONTRO...
- Publication number 20210291310
- Publication date Sep 23, 2021
- LEI & SO Co., Ltd.
- Wei-Tai LEI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MULTI-DEGREE-OF-FREEDOM ERROR MEASUREMENT SYSTEM FOR ROTARY AXES AN...
- Publication number 20190314947
- Publication date Oct 17, 2019
- NATIONAL CHUNG CHENG UNIVERSITY
- CHIEN-SHENG LIU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MANUFACTURING SYSTEM
- Publication number 20170151643
- Publication date Jun 1, 2017
- BROETJE-AUTOMATION GMBH
- Wilfried Ficken
- B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...
Information Patent Application
ERROR MEASUREMENT METHOD AND MACHINE TOOL
- Publication number 20140355002
- Publication date Dec 4, 2014
- MAKINO MILLING MACHINE CO., LTD.
- Tadashi Kasahara
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PRECISION FEEDING DEVICE AND PRECISION TRANSFER EQUIPMENT
- Publication number 20130068051
- Publication date Mar 21, 2013
- MITUTOYO CORPORATION
- Hisayoshi SAKAI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PRECISION TRANSFER EQUIPMENT
- Publication number 20130068050
- Publication date Mar 21, 2013
- MITUTOYO CORPORATION
- Hisayoshi SAKAI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MEASURING APPARATUS AND MEASURING METHOD THEREOF, APPARATUS FOR COR...
- Publication number 20120038763
- Publication date Feb 16, 2012
- FUJI MACHINE MFG. CO., LTD.
- Tosuke Kawada
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CHUCKING FIXTURE WITH DEVICE FOR MEASURING THE DISTANCE BETWEEN A C...
- Publication number 20090315280
- Publication date Dec 24, 2009
- SYSTEM 3R INTERNATIONAL AB
- Håkan Dahlquist
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
POSITIONING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING...
- Publication number 20080136078
- Publication date Jun 12, 2008
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Nanopositioner
- Publication number 20060138871
- Publication date Jun 29, 2006
- Vadim I. Rakhovsky
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method for calibrating the geometry of a multi-axis metrology system
- Publication number 20050134851
- Publication date Jun 23, 2005
- QED Technologies, Inc.
- Paul Murphy
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Decoupled planar positioning system
- Publication number 20040263108
- Publication date Dec 30, 2004
- Ser Yong Lim
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Compensating for cable drag forces in high precision stages
- Publication number 20030173556
- Publication date Sep 18, 2003
- Douglas C. Watson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Travelling worktable apparatus
- Publication number 20030020225
- Publication date Jan 30, 2003
- Hitachi, Ltd
- Masaki Mizuochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Travelling worktable apparatus
- Publication number 20020185799
- Publication date Dec 12, 2002
- Hitachi, Ltd
- Masaki Mizuochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
#1ultra-precision positioning assembly
- Publication number 20020138993
- Publication date Oct 3, 2002
- The Regents of the University of California.
- Richard C. Montesanti
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Travelling worktable apparatus
- Publication number 20010024008
- Publication date Sep 27, 2001
- Hitachi, Ltd.
- Masaki Mizuochi
- H01 - BASIC ELECTRIC ELEMENTS

using interferometers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Direct pose feedback control method and direct pose feedback contro...

Tool device and method for measuring a condition of a machining tool

Multi-degree-of-freedom error measurement system for rotary axes an...

Manufacturing system

Measurement, calibration and compensation system and method for mac...

Error measurement method and machine tool

Precision feeding device and precision transfer equipment

Precision transfer equipment

Measuring apparatus and measuring method thereof, apparatus for cor...

Chucking fixture with device for measuring the distance between a c...

Positioning apparatus, exposure apparatus, and device manufacturing...

Two-dimensional nanopositioner with crude and fine stages

Decoupled planar positioning system

Method for calibrating the geometry of a multi-axis metrology system

Compensating for cable drag forces in high precision stages

Method and system for ultra-precision positioning

Travelling worktable apparatus

Travelling worktable apparatus

Ultra-precision positioning assembly

Stage apparatus

Measurement and compensation system for thermal errors in machine t...

Arrangement for sensing elastic deformation in a tool stem in a mac...

Laser interferometer measurement system for use with machine tools

Stage apparatus

Machine tool vibration isolation system

Movable stage mechanism and exposure apparatus using the same

3-D measurement of cutting tool wear

Movable table system

Multi-axis gas bearing stage assembly

Adjustable machining system and implement therefore

Patents Applicationslast 30 patents

DIRECT POSE FEEDBACK CONTROL METHOD AND DIRECT POSE FEEDBACK CONTRO...

MULTI-DEGREE-OF-FREEDOM ERROR MEASUREMENT SYSTEM FOR ROTARY AXES AN...

MANUFACTURING SYSTEM

ERROR MEASUREMENT METHOD AND MACHINE TOOL

PRECISION FEEDING DEVICE AND PRECISION TRANSFER EQUIPMENT

PRECISION TRANSFER EQUIPMENT

MEASURING APPARATUS AND MEASURING METHOD THEREOF, APPARATUS FOR COR...

CHUCKING FIXTURE WITH DEVICE FOR MEASURING THE DISTANCE BETWEEN A C...

POSITIONING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING...

Nanopositioner

Method for calibrating the geometry of a multi-axis metrology system

Decoupled planar positioning system

Compensating for cable drag forces in high precision stages

Travelling worktable apparatus

Travelling worktable apparatus

#1ultra-precision positioning assembly

Travelling worktable apparatus