using members oscillating about a vertical axis

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G01L21/20

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GPHYSICS G01Measuring instruments G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE G01L21/00Vacuum gauges

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G01L21/20using members oscillating about a vertical axis

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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

Information Patent Application
PRESSURE SENSOR USING MEMS RESONATOR
- Publication number 20140202260
- Publication date Jul 24, 2014
- PANASONIC CORPORATION
- Kunihiko Nakamura
- B81 - MICRO-STRUCTURAL TECHNOLOGY