using MEMS techniques

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H03H2009/155

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HELECTRICITY H03Electronic circuits H03HIMPEDANCE NETWORKS

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H03H2009/155using MEMS techniques

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Patents Grantslast 30 patents

Information Patent Grant
Piezo-actuated MEMS resonator with reduced nonlinear tcf
- Patent number 12,166,464
- Issue date Dec 10, 2024
- SiTime Corporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Quartz MEMS piezoelectric resonator for chipscale RF antennae
- Patent number 12,166,471
- Issue date Dec 10, 2024
- HRL Laboratories, LLC
- Randall L. Kubena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Power efficiency optimization method of LC resonant driver for MEMS...
- Patent number 12,072,484
- Issue date Aug 27, 2024
- Microsoft Technology Licensing, LLC
- Chang Joon Park
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Piezoelectric MEMS resonators based on porous silicon technologies
- Patent number 12,034,431
- Issue date Jul 9, 2024
- Xiang Zheng Tu
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonator and resonance device
- Patent number 12,021,501
- Issue date Jun 25, 2024
- Murata Manufacturing Co., Ltd.
- Ryota Kawai
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Microelectromechanical resonator
- Patent number 11,916,534
- Issue date Feb 27, 2024
- SiTime Corporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonance device
- Patent number 11,909,375
- Issue date Feb 20, 2024
- Murata Manufacturing Co., Ltd.
- Keiichi Umeda
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Piezo-actuated MEMS resonator
- Patent number 11,909,376
- Issue date Feb 20, 2024
- SiTime Corporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonance device
- Patent number 11,894,831
- Issue date Feb 6, 2024
- Murata Manufacturing Co., Ltd.
- Yuichi Goto
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Piezoelectric microelectromechanical resonator device and correspon...
- Patent number 11,855,604
- Issue date Dec 26, 2023
- STMicroelectronics S.r.l.
- Federico Vercesi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibrator device, manufacturing method of vibrator device, electroni...
- Patent number 11,784,632
- Issue date Oct 10, 2023
- Seiko Epson Corporation
- Takashi Yamazaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Temperature stable MEMS resonator
- Patent number 11,764,751
- Issue date Sep 19, 2023
- SiTime Corporation
- Paul M. Hagelin
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Micromachined ultrasound transducer using multiple piezoelectric ma...
- Patent number 11,711,067
- Issue date Jul 25, 2023
- Invensense, Inc.
- Stefon Shelton
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Acoustic resonator device with controlled placement of functionaliz...
- Patent number 11,695,384
- Issue date Jul 4, 2023
- QORVO BIOTECHNOLOGIES, LLC
- Matthew Ryder
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Microelectromechanical resonator
- Patent number 11,677,379
- Issue date Jun 13, 2023
- SiTime Corporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Laterally vibrating bulk acoustic wave resonator
- Patent number 11,646,714
- Issue date May 9, 2023
- Texas Instruments Incorporated
- Jeronimo Segovia Fernandez
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Non-linear tethers for suspended devices
- Patent number 11,626,856
- Issue date Apr 11, 2023
- X-CELEPRINT LIMITED
- António José Marques Trindade
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fin bulk acoustic resonator technology for UHF and SHF signal proce...
- Patent number 11,611,328
- Issue date Mar 21, 2023
- University of Florida Research Foundation, Incorporated
- Roozbeh Tabrizian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin-film bulk acoustic resonator and semiconductor apparatus compr...
- Patent number 11,601,106
- Issue date Mar 7, 2023
- Semiconductor Manufacturing International (Shanghai) Corporation
- Herb He Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Piezoelectric MEMS resonators based on porous silicon technologies
- Patent number 11,601,111
- Issue date Mar 7, 2023
- Xiang Zheng Tu
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Guided wave devices with selectively loaded piezoelectric layers
- Patent number 11,588,466
- Issue date Feb 21, 2023
- Qorvo US, Inc.
- Kushal Bhattacharjee
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Nonlinear acoustic medium
- Patent number 11,581,871
- Issue date Feb 14, 2023
- FemtoDx, Inc.
- Pritiraj Mohanty
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Distributed-mode beam and frame resonators for high frequency timin...
- Patent number 11,533,042
- Issue date Dec 20, 2022
- Georgia Tech Research Corporation
- Anosh Daruwalla
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Piezoelectric single crystal silicon carbide microelectromechanical...
- Patent number 11,509,277
- Issue date Nov 22, 2022
- HRL Laboratories, LLC
- Raviv Perahia
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonance device
- Patent number 11,509,283
- Issue date Nov 22, 2022
- Murata Manufacturing Co., Ltd.
- Toshihiko Unami
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Method of fabricating a SiC resonator
- Patent number 11,469,732
- Issue date Oct 11, 2022
- HRL Laboratories, LLC
- Raviv Perahia
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Temperature stable MEMS resonator
- Patent number 11,469,734
- Issue date Oct 11, 2022
- SiTime Corporation
- Paul M. Hagelin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gallium nitride structure, piezoelectric element, method of manufac...
- Patent number 11,451,211
- Issue date Sep 20, 2022
- Murata Manufacturing Co., Ltd.
- Keiichi Umeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interdigital transducers on a piezoelectric thin-film for signal co...
- Patent number 11,451,209
- Issue date Sep 20, 2022
- The Board of Trustees of the University of Illinois
- Songbin Gong
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Acoustic resonator device with controlled placement of functionaliz...
- Patent number 11,444,595
- Issue date Sep 13, 2022
- QORVO BIOTECHNOLOGIES, LLC
- Matthew Ryder
- H03 - BASIC ELECTRONIC CIRCUITRY

Patents Applicationslast 30 patents

Information Patent Application
RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD
- Publication number 20240375940
- Publication date Nov 14, 2024
- Murata Manufacturing Co., Ltd.
- Masakazu FUKUMITSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS FOR ABSORPTION TUNING FOR TOTAL WAVE ABSORPTION...
- Publication number 20240372530
- Publication date Nov 7, 2024
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Xiaopeng Li
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONATOR AND RESONANCE DEVICE
- Publication number 20240305266
- Publication date Sep 12, 2024
- Murata Manufacturing Co., Ltd.
- Yoshiyuki HIGUCHI
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Piezo-actuated MEMS Resonator
- Publication number 20240223151
- Publication date Jul 4, 2024
- SiTime Coporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
PIEZOELECTRIC MICROELECTROMECHANICAL RESONATOR DEVICE AND CORRESPON...
- Publication number 20240154599
- Publication date May 9, 2024
- STMicroelectronics S.r.l.
- Federico VERCESI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR WITH HIGH QUALITY FACTOR AND ITS USE
- Publication number 20230412140
- Publication date Dec 21, 2023
- KYOCERA Tikitin Oy
- Aarne OJA
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
NON-LINEAR TETHERS FOR SUSPENDED DEVICES
- Publication number 20230327640
- Publication date Oct 12, 2023
- X-CELEPRINT LIMITED
- António José Marques Trindade
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Laterally Vibrating Bulk Acoustic Wave Resonator
- Publication number 20230253951
- Publication date Aug 10, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Jeronimo Segovia Fernandez
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Piezoelectric MEMS Resonators based on Porous Silicon Technologies
- Publication number 20230116933
- Publication date Apr 20, 2023
- Xiang Zheng Tu
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
ACOUSTIC RESONATOR DEVICE WITH CONTROLLED PLACEMENT OF FUNCTIONALIZ...
- Publication number 20220385262
- Publication date Dec 1, 2022
- QORVO BIOTECHNOLOGIES, LLC
- Matthew Ryder
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
PACKAGE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20220153573
- Publication date May 19, 2022
- Murata Manufacturing Co., Ltd.
- Yoshiyuki Higuchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Quartz MEMS Piezoelectric Resonator for Chipscale RF Antennae
- Publication number 20220140813
- Publication date May 5, 2022
- HRL LABORATORIES, LLC
- Randall L. Kubena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Piezoelectric MEMS Resonators based on Porous Silicon Technologies
- Publication number 20210409000
- Publication date Dec 30, 2021
- Xiang Zheng Tu
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONANCE DEVICE
- Publication number 20210194454
- Publication date Jun 24, 2021
- Murata Manufacturing Co., Ltd.
- Keiichi Umeda
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONATOR AND RESONANCE DEVICE
- Publication number 20210184651
- Publication date Jun 17, 2021
- Murata Manufacturing Co., Ltd.
- Ryota Kawai
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONANCE DEVICE
- Publication number 20210167751
- Publication date Jun 3, 2021
- Murata Manufacturing Co., Ltd.
- Yuichi Goto
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
PIEZO-ACTUATED MEMS RESONATOR
- Publication number 20210159875
- Publication date May 27, 2021
- SiTime Coporation
- Joseph C. Doll
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-LINEAR TETHERS FOR SUSPENDED DEVICES
- Publication number 20210135649
- Publication date May 6, 2021
- X-CELEPRINT LIMITED
- António José Marques Trindade
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIEZOELECTRIC MICROELECTROMECHANICAL RESONATOR DEVICE AND CORRESPON...
- Publication number 20210099154
- Publication date Apr 1, 2021
- STMicroelectronics S.r.l.
- Federico VERCESI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFABRICATED NOTCH FILTER
- Publication number 20200389149
- Publication date Dec 10, 2020
- Innovative Micro Technology
- Christopher S. GUDEMAN
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
METHOD FOR GENERATING HIGH ORDER HARMONIC FREQUENCIES AND MEMS RESO...
- Publication number 20200382097
- Publication date Dec 3, 2020
- National Tsing Hua University
- Sheng-Shian LI
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Using Acoustic Reflector to Reduce Spurious Modes
- Publication number 20200373908
- Publication date Nov 26, 2020
- TEXAS INSTRUMENTS INCORPORATED
- Ting-Ta Yen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Piezoelectric Resonaor with Patterned Resonant Confiners
- Publication number 20200280300
- Publication date Sep 3, 2020
- TEXAS INSTRUMENTS INCORPORATED
- Jeronimo Segovia Fernandez
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MICROMACHINED ULTRASOUND TRANSDUCER USING MULTIPLE PIEZOELECTRIC MA...
- Publication number 20200266798
- Publication date Aug 20, 2020
- Chirp Microsystems, Inc.
- Stefon Shelton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN-FILM BULK ACOUSTIC RESONATOR AND SEMICONDUCTOR APPARATUS COMPR...
- Publication number 20200266790
- Publication date Aug 20, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- Herb He HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIN BULK ACOUSTIC RESONATOR TECHNOLOGY FOR UHF AND SHF SIGNAL PROCE...
- Publication number 20200259479
- Publication date Aug 13, 2020
- University of Florida Research Foundation, Incorporated
- Roozbeh TABRIZIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESONANCE DEVICE
- Publication number 20200244222
- Publication date Jul 30, 2020
- Murata Manufacturing Co., Ltd.
- Keiichi Umeda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACOUSTIC FILTER APPARATUS HAVING CONFIGURABLE PARALLEL RESONANCE FR...
- Publication number 20200136589
- Publication date Apr 30, 2020
- Qorvo US, Inc.
- Nadim Khlat
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
VIBRATOR DEVICE, MANUFACTURING METHOD OF VIBRATOR DEVICE, ELECTRONI...
- Publication number 20200067484
- Publication date Feb 27, 2020
- SEIKO EPSON CORPORATION
- Takashi YAMAZAKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laterally Vibrating Bulk Acoustic Wave Resonator
- Publication number 20200021272
- Publication date Jan 16, 2020
- TEXAS INSTRUMENTS INCORPORATED
- Jeronimo Segovia Fernandez
- H03 - BASIC ELECTRONIC CIRCUITRY

using MEMS techniques

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Piezo-actuated MEMS resonator with reduced nonlinear tcf

Quartz MEMS piezoelectric resonator for chipscale RF antennae

Power efficiency optimization method of LC resonant driver for MEMS...

Piezoelectric MEMS resonators based on porous silicon technologies

Resonator and resonance device

Microelectromechanical resonator

Resonance device

Piezo-actuated MEMS resonator

Resonance device

Piezoelectric microelectromechanical resonator device and correspon...

Vibrator device, manufacturing method of vibrator device, electroni...

Temperature stable MEMS resonator

Micromachined ultrasound transducer using multiple piezoelectric ma...

Acoustic resonator device with controlled placement of functionaliz...

Microelectromechanical resonator

Laterally vibrating bulk acoustic wave resonator

Non-linear tethers for suspended devices

Fin bulk acoustic resonator technology for UHF and SHF signal proce...

Thin-film bulk acoustic resonator and semiconductor apparatus compr...

Piezoelectric MEMS resonators based on porous silicon technologies

Guided wave devices with selectively loaded piezoelectric layers

Nonlinear acoustic medium

Distributed-mode beam and frame resonators for high frequency timin...

Piezoelectric single crystal silicon carbide microelectromechanical...

Resonance device

Method of fabricating a SiC resonator

Temperature stable MEMS resonator

Gallium nitride structure, piezoelectric element, method of manufac...

Interdigital transducers on a piezoelectric thin-film for signal co...

Acoustic resonator device with controlled placement of functionaliz...

Patents Applicationslast 30 patents

RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD

SYSTEMS AND METHODS FOR ABSORPTION TUNING FOR TOTAL WAVE ABSORPTION...

RESONATOR AND RESONANCE DEVICE

Piezo-actuated MEMS Resonator

PIEZOELECTRIC MICROELECTROMECHANICAL RESONATOR DEVICE AND CORRESPON...

MEMS RESONATOR WITH HIGH QUALITY FACTOR AND ITS USE

NON-LINEAR TETHERS FOR SUSPENDED DEVICES

Laterally Vibrating Bulk Acoustic Wave Resonator

Piezoelectric MEMS Resonators based on Porous Silicon Technologies

ACOUSTIC RESONATOR DEVICE WITH CONTROLLED PLACEMENT OF FUNCTIONALIZ...

PACKAGE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

Quartz MEMS Piezoelectric Resonator for Chipscale RF Antennae

Piezoelectric MEMS Resonators based on Porous Silicon Technologies

RESONANCE DEVICE

RESONATOR AND RESONANCE DEVICE

RESONANCE DEVICE

PIEZO-ACTUATED MEMS RESONATOR

NON-LINEAR TETHERS FOR SUSPENDED DEVICES

PIEZOELECTRIC MICROELECTROMECHANICAL RESONATOR DEVICE AND CORRESPON...

MICROFABRICATED NOTCH FILTER

METHOD FOR GENERATING HIGH ORDER HARMONIC FREQUENCIES AND MEMS RESO...

Using Acoustic Reflector to Reduce Spurious Modes

Piezoelectric Resonaor with Patterned Resonant Confiners

MICROMACHINED ULTRASOUND TRANSDUCER USING MULTIPLE PIEZOELECTRIC MA...

THIN-FILM BULK ACOUSTIC RESONATOR AND SEMICONDUCTOR APPARATUS COMPR...

FIN BULK ACOUSTIC RESONATOR TECHNOLOGY FOR UHF AND SHF SIGNAL PROCE...

RESONANCE DEVICE

ACOUSTIC FILTER APPARATUS HAVING CONFIGURABLE PARALLEL RESONANCE FR...

VIBRATOR DEVICE, MANUFACTURING METHOD OF VIBRATOR DEVICE, ELECTRONI...

Laterally Vibrating Bulk Acoustic Wave Resonator