using photolithography

Industry

CPC
F16K2099/0074

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Parent Industries

FMECHANICAL ENGINEERING LIGHTING HEATING WEAPONS BLASTING ENGINES OR PUMPS F16Engineering elements F16KVALVES TAPS COCKS ACTUATING-FLOATS DEVICES FOR VENTING OR AERATING

Current Industry

F16K2099/0074using photolithography

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Manufacturing method of miniature fluid actuator
- Patent number 11,905,168
- Issue date Feb 20, 2024
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Polymeric microfluidic valve
- Patent number 11,867,320
- Issue date Jan 9, 2024
- National Research Council of Canada
- Kebin Li
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Systems and methods for biochemical analysis including a base instr...
- Patent number 11,590,494
- Issue date Feb 28, 2023
- Illumina, Inc.
- Alex Aravanis
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Low-voltage microfluidic valve device and system for regulating the...
- Patent number 11,592,016
- Issue date Feb 28, 2023
- Arizona Board of Regents on behalf of Arizona State University
- Michael N. Kozicki
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Manufacturing method of micro fluid actuator
- Patent number 11,581,483
- Issue date Feb 14, 2023
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro channel structure
- Patent number 11,478,794
- Issue date Oct 25, 2022
- MICRO JET TECHNOLOGY CO., LTD.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro check valve and system with multiple micro check valves and m...
- Patent number 11,428,345
- Issue date Aug 30, 2022
- MICROFAB SERVICE GMBH
- Marco Cordelair
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Membraneless fluid-controlled valve
- Patent number 11,371,619
- Issue date Jun 28, 2022
- Facebook Technologies, LLC
- Andrew Arthur Stanley
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Surface-modified interfaces of pneumatic valves with enhanced elect...
- Patent number 11,247,205
- Issue date Feb 15, 2022
- Arizona Board of Regents on behalf of the University of Arizona
- Xuemin Wang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Micro-valve
- Patent number 11,242,943
- Issue date Feb 8, 2022
- Shimadzu Corporation
- Wenjian Lu
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Micro electrical mechanical system (MEMS) valve
- Patent number 11,187,349
- Issue date Nov 30, 2021
- International Business Machines Corporation
- Yongchun Xin
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Three-way microvalve device and method of fabrication
- Patent number 11,035,496
- Issue date Jun 15, 2021
- Corporation for National Research Initiatives
- Michael A. Huff
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Low-voltage microfluidic valve device and system for regulating the...
- Patent number 10,710,070
- Issue date Jul 14, 2020
- Arizona Board of Regents on behalf of Arizona State University
- Michael N. Kozicki
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Method of manufacturing microfluidic chip and a microfluidic chip m...
- Patent number 10,646,867
- Issue date May 12, 2020
- Taiwan Green Point Enterprises Co., Ltd.
- Yi-Cheng Lin
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Micro electrical mechanical system (MEMS) valve
- Patent number 10,612,691
- Issue date Apr 7, 2020
- International Business Machines Corporation
- Yongchun Xin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and methods for conducting assays and high throughput scr...
- Patent number 10,509,018
- Issue date Dec 17, 2019
- California Institute of Technology
- Stephen R. Quake
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Systems and methods for biochemical analysis including a base instr...
- Patent number 10,427,155
- Issue date Oct 1, 2019
- Illumina, Inc.
- Alex Aravanis
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Micro electrical mechanical system (MEMS) valve
- Patent number 10,415,721
- Issue date Sep 17, 2019
- International Business Machines Corporation
- Yongchun Xin
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Fluid flow device, comprising a valve unit, as well as method of ma...
- Patent number 10,400,914
- Issue date Sep 3, 2019
- Berkin B.V.
- Joost Conrad Lötters
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Three-way microvalve device and method of fabrication
- Patent number 10,323,772
- Issue date Jun 18, 2019
- Corporation for National Research Initiatives
- Michael A. Huff
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Valved, microwell cell-culture device and method
- Patent number 10,174,278
- Issue date Jan 8, 2019
- EMD Millipore Corporation
- Paul Ju-Sung Hung
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Microfabricated elastomeric valve and pump systems
- Patent number 10,155,250
- Issue date Dec 18, 2018
- California Institute of Technology
- Hou-Pu Chou
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Microfluidic pump and valve structures and fabrication methods
- Patent number 10,119,619
- Issue date Nov 6, 2018
- Rheonix, Inc.
- Peng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Singulation of valves
- Patent number 10,088,076
- Issue date Oct 2, 2018
- KCI Licensing, Inc.
- Jonathan Paul Jaeb
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Micro-fluidic system
- Patent number 10,060,554
- Issue date Aug 28, 2018
- MENARINI SILICON BIOSYSTEMS S.P.A.
- Nicolò Manaresi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Sieve valves, microfluidic circuits, microfluidic devices, kits, an...
- Patent number 10,053,731
- Issue date Aug 21, 2018
- The Broad Institute, Inc.
- Paul Blainey
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
High throughput screening of crystallization of materials
- Patent number 9,932,687
- Issue date Apr 3, 2018
- California Institute of Technology
- Carl L. Hansen
- C30 - CRYSTAL GROWTH
Information Patent Grant
Sieve valves, microfluidic circuits, microfluidic devices, kits, an...
- Patent number 9,790,549
- Issue date Oct 17, 2017
- The Broad Institute, Inc.
- Paul Blainey
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Microfabricated structure having parallel and orthogonal flow chann...
- Patent number 9,714,443
- Issue date Jul 25, 2017
- California Institute of Technology
- Sebastian J. Maerkl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic free interface diffusion techniques
- Patent number 9,643,136
- Issue date May 9, 2017
- Fluidigm Corporation
- Carl L. Hansen
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ELECTRONIC DEVICE
- Publication number 20230204025
- Publication date Jun 29, 2023
- Innolux Corporation
- Chin-Lung Ting
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SYSTEMS AND METHODS FOR BIOCHEMICAL ANALYSIS INCLUDING A BASE INSTR...
- Publication number 20230145389
- Publication date May 11, 2023
- Illumina, Inc.
- Alex Aravanis
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
METHOD FOR MANUFACTURING A MICROMECHANICAL DEVICE AND MICROMECHANIC...
- Publication number 20220082181
- Publication date Mar 17, 2022
- FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
- Henry LEISTNER
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
MICRO-VALVE
- Publication number 20210088155
- Publication date Mar 25, 2021
- Shimadzu Corporation
- Wenjian LU
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
LOW-VOLTAGE MICROFLUIDIC VALVE DEVICE AND SYSTEM FOR REGULATING THE...
- Publication number 20200338556
- Publication date Oct 29, 2020
- Arizona Board of Regents on behalf of Arizona State University
- Michael N. Kozicki
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD OF MANUFACTURING MICROFLUIDIC CHIP AND A MICROFLUIDIC CHIP M...
- Publication number 20200197933
- Publication date Jun 25, 2020
- TAIWAN GREEN POINT ENTERPRISES CO., LTD.
- Yi-Cheng Lin
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
MICRO CHECK VALVE AND SYSTEM WITH MULTIPLE MICRO CHECK VALVES AND M...
- Publication number 20200166156
- Publication date May 28, 2020
- MICROFAB SERVICE GMBH
- Marco CORDELAIR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THREE-WAY MICROVALVE DEVICE AND METHOD OF FABRICATION
- Publication number 20200025311
- Publication date Jan 23, 2020
- Michael A. HUFF
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
MICRO ELECTRICAL MECHANICAL SYSTEM (MEMS) VALVE
- Publication number 20190323627
- Publication date Oct 24, 2019
- International Business Machines Corporation
- Yongchun XIN
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
LOW-VOLTAGE MICROFLUIDIC VALVE DEVICE AND SYSTEM FOR REGULATING THE...
- Publication number 20190291107
- Publication date Sep 26, 2019
- Arizona Board of Regents on behalf of Arizona State University
- Michael N. Kozicki
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SYSTEMS AND METHODS FOR BIOCHEMICAL ANALYSIS INCLUDING A BASE INSTR...
- Publication number 20190283024
- Publication date Sep 19, 2019
- Illumina, Inc.
- Alex Aravanis
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
MICRO ELECTRICAL MECHANICAL SYSTEM (MEMS) VALVE
- Publication number 20190219192
- Publication date Jul 18, 2019
- International Business Machines Corporation
- Yongchun XIN
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
MICRO ELECTRICAL MECHANICAL SYSTEM (MEMS) VALVE
- Publication number 20190219193
- Publication date Jul 18, 2019
- International Business Machines Corporation
- Yongchun XIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLUID FLOW DEVICE, COMPRISING A VALVE UNIT, AS WELL AS METHOD OF MA...
- Publication number 20180128397
- Publication date May 10, 2018
- BERKIN B.V.
- Joost Conrad LÖTTERS
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Sieve Valves, Microfluidic Circuits, Microfluidic Devices, Kits, an...
- Publication number 20180016633
- Publication date Jan 18, 2018
- THE BROAD INSTITUTE, INC.
- PAUL BLAINEY
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Application
MICROFLUIDIC PUMP AND VALVE STRUCTURES AND FABRICATION METHODS
- Publication number 20170151560
- Publication date Jun 1, 2017
- RHEONIX, INC.
- Peng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Three-Way Microvalve device and method of fabrication
- Publication number 20170097108
- Publication date Apr 6, 2017
- Corporation for National Research Initiatives
- Michael A. Huff
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SINGULATION OF VALVES
- Publication number 20160319957
- Publication date Nov 3, 2016
- KCI Licensing, Inc.
- Jonathan Paul JAEB
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
MICROFLUIDIC FREE INTERFACE DIFFUSION TECHNIQUES
- Publication number 20140347953
- Publication date Nov 27, 2014
- California Institute of Technology
- Carl L. Hansen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFABRICATED ELASTOMERIC VALVE AND PUMP SYSTEMS
- Publication number 20140322489
- Publication date Oct 30, 2014
- California Institute of Technology
- Marc A. Unger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC PUMP AND VALVE STRUCTURES AND FABRICATION METHODS
- Publication number 20140246618
- Publication date Sep 4, 2014
- RHEONIX, INC.
- Peng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LAMINATED MICROFLUIDIC STRUCTURES AND METHOD FOR MAKING
- Publication number 20140238599
- Publication date Aug 28, 2014
- RHEONIX, INC.
- Peng Zhou
- B32 - LAYERED PRODUCTS
Information Patent Application
APPARATUS AND METHODS FOR CONDUCTING ASSAYS AND HIGH THROUGHPUT SCR...
- Publication number 20140199713
- Publication date Jul 17, 2014
- California Institute of Technology
- Stephen R. Quake
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Application
High Efficiency and High Precision Microfluidic Devices and Methods
- Publication number 20140193896
- Publication date Jul 10, 2014
- Fluidigm Corporation
- David S. Cohen
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
MICROFABRICATED FLUIDIC CIRCUIT ELEMENTS AND APPLICATIONS
- Publication number 20140130920
- Publication date May 15, 2014
- Fluidigm Corporation
- David Fernandes
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Valved, Microwell Cell-Culture Device And Method
- Publication number 20140090735
- Publication date Apr 3, 2014
- EMD Millipore Corporation
- Paul Ju-sung HUNG
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Application
MICROFLUIDIC LARGE SCALE INTEGRATION
- Publication number 20140065653
- Publication date Mar 6, 2014
- California Institute of Technology
- Sebastian J. Maerkl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH THROUGHPUT SCREENING OF CRYSTALLIZATION OF MATERIALS
- Publication number 20140041727
- Publication date Feb 13, 2014
- The Regents of the University of California
- Carl L. Hansen
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Application
Pump produced in a substrate
- Publication number 20140037481
- Publication date Feb 6, 2014
- Nicolas Stéphane
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
MICROFLUIDIC DEVICE REGENERATION
- Publication number 20130186433
- Publication date Jul 25, 2013
- Fluidigm Corporation
- Jing Wang
- B08 - CLEANING

using photolithography

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Manufacturing method of miniature fluid actuator

Polymeric microfluidic valve

Systems and methods for biochemical analysis including a base instr...

Low-voltage microfluidic valve device and system for regulating the...

Manufacturing method of micro fluid actuator

Micro channel structure

Micro check valve and system with multiple micro check valves and m...

Membraneless fluid-controlled valve

Surface-modified interfaces of pneumatic valves with enhanced elect...

Micro-valve

Micro electrical mechanical system (MEMS) valve

Three-way microvalve device and method of fabrication

Low-voltage microfluidic valve device and system for regulating the...

Method of manufacturing microfluidic chip and a microfluidic chip m...

Micro electrical mechanical system (MEMS) valve

Apparatus and methods for conducting assays and high throughput scr...

Systems and methods for biochemical analysis including a base instr...

Micro electrical mechanical system (MEMS) valve

Fluid flow device, comprising a valve unit, as well as method of ma...

Three-way microvalve device and method of fabrication

Valved, microwell cell-culture device and method

Microfabricated elastomeric valve and pump systems

Microfluidic pump and valve structures and fabrication methods

Singulation of valves

Micro-fluidic system

Sieve valves, microfluidic circuits, microfluidic devices, kits, an...

High throughput screening of crystallization of materials

Sieve valves, microfluidic circuits, microfluidic devices, kits, an...

Microfabricated structure having parallel and orthogonal flow chann...

Microfluidic free interface diffusion techniques

Patents Applicationslast 30 patents

ELECTRONIC DEVICE

SYSTEMS AND METHODS FOR BIOCHEMICAL ANALYSIS INCLUDING A BASE INSTR...

METHOD FOR MANUFACTURING A MICROMECHANICAL DEVICE AND MICROMECHANIC...

MICRO-VALVE

LOW-VOLTAGE MICROFLUIDIC VALVE DEVICE AND SYSTEM FOR REGULATING THE...

METHOD OF MANUFACTURING MICROFLUIDIC CHIP AND A MICROFLUIDIC CHIP M...

MICRO CHECK VALVE AND SYSTEM WITH MULTIPLE MICRO CHECK VALVES AND M...

THREE-WAY MICROVALVE DEVICE AND METHOD OF FABRICATION

MICRO ELECTRICAL MECHANICAL SYSTEM (MEMS) VALVE

LOW-VOLTAGE MICROFLUIDIC VALVE DEVICE AND SYSTEM FOR REGULATING THE...

SYSTEMS AND METHODS FOR BIOCHEMICAL ANALYSIS INCLUDING A BASE INSTR...

MICRO ELECTRICAL MECHANICAL SYSTEM (MEMS) VALVE

MICRO ELECTRICAL MECHANICAL SYSTEM (MEMS) VALVE

FLUID FLOW DEVICE, COMPRISING A VALVE UNIT, AS WELL AS METHOD OF MA...

Sieve Valves, Microfluidic Circuits, Microfluidic Devices, Kits, an...

MICROFLUIDIC PUMP AND VALVE STRUCTURES AND FABRICATION METHODS

Three-Way Microvalve device and method of fabrication

SINGULATION OF VALVES

MICROFLUIDIC FREE INTERFACE DIFFUSION TECHNIQUES

MICROFABRICATED ELASTOMERIC VALVE AND PUMP SYSTEMS

MICROFLUIDIC PUMP AND VALVE STRUCTURES AND FABRICATION METHODS

LAMINATED MICROFLUIDIC STRUCTURES AND METHOD FOR MAKING

APPARATUS AND METHODS FOR CONDUCTING ASSAYS AND HIGH THROUGHPUT SCR...

High Efficiency and High Precision Microfluidic Devices and Methods

MICROFABRICATED FLUIDIC CIRCUIT ELEMENTS AND APPLICATIONS

Valved, Microwell Cell-Culture Device And Method

MICROFLUIDIC LARGE SCALE INTEGRATION

HIGH THROUGHPUT SCREENING OF CRYSTALLIZATION OF MATERIALS

Pump produced in a substrate

MICROFLUIDIC DEVICE REGENERATION