using resonance effects of a vibrating body Vacuum gauges of the Klumb type

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G01L21/22

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GPHYSICS G01Measuring instruments G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE G01L21/00Vacuum gauges

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G01L21/22using resonance effects of a vibrating body Vacuum gauges of the Klumb type

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Patents Grantslast 30 patents

Information Patent Grant
Wide range highly sensitive pressure sensor based on heated microma...
- Patent number 11,703,406
- Issue date Jul 18, 2023
- King Abdullah University of Science and Technology
- Nouha Alcheikh
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum apparatus and method of monitoring particles
- Patent number 9,897,526
- Issue date Feb 20, 2018
- Samsung Display Co., Ltd.
- Eun-Ju Song
- G01 - MEASURING TESTING
Information Patent Grant
Lithography apparatus with segmented mirror
- Patent number 9,846,375
- Issue date Dec 19, 2017
- Carl Zeiss SMT GmbH
- Joachim Hartjes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
MEMS vacuum level monitor in sealed package
- Patent number 8,887,573
- Issue date Nov 18, 2014
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tung-Tsun Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure gauge
- Patent number 8,627,726
- Issue date Jan 14, 2014
- NXP, B.V.
- Kim Phan Le
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for detection of air ingress into cryogen ves...
- Patent number 8,418,534
- Issue date Apr 16, 2013
- Siemens Plc
- Patrick William Retz
- G01 - MEASURING TESTING
Information Patent Grant
MEMS pressure sensor
- Patent number 8,256,298
- Issue date Sep 4, 2012
- NXP B.V.
- Matthijs Suijlen
- G01 - MEASURING TESTING
Information Patent Grant
MEMS vacuum sensor based on the friction principle
- Patent number 8,186,225
- Issue date May 29, 2012
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Steffen Kurth
- G01 - MEASURING TESTING
Information Patent Grant
Resonator measurement device and method employing the device
- Patent number 7,798,005
- Issue date Sep 21, 2010
- Thales
- Bertrand Leverrier
- G01 - MEASURING TESTING
Information Patent Grant
Pressure sensor
- Patent number 7,059,192
- Issue date Jun 13, 2006
- Varian S.p.A.
- Raffaele Correale
- G01 - MEASURING TESTING
Information Patent Grant
Micro-electro-mechanical pressure sensor
- Patent number 7,047,810
- Issue date May 23, 2006
- Ahura Corporation
- Yakov Kogan
- G01 - MEASURING TESTING
Information Patent Grant
Micromechanical pressure sensor-with improved range
- Patent number 5,939,635
- Issue date Aug 17, 1999
- Varian Inc.
- Jacob H. Martin
- G01 - MEASURING TESTING
Information Patent Grant
Micromechanical pressure gauge having extended sensor range
- Patent number 5,528,939
- Issue date Jun 25, 1996
- Jacob H. Martin
- G01 - MEASURING TESTING
Information Patent Grant
Quartz crystal pressure sensor
- Patent number 5,136,885
- Issue date Aug 11, 1992
- Tif Instruments, Inc.
- Leonard N. Liebermann
- G01 - MEASURING TESTING
Information Patent Grant
Quartz vacuum gauge
- Patent number 5,033,306
- Issue date Jul 23, 1991
- Seiko Electronic Components Ltd.
- Fujio Tamura
- G01 - MEASURING TESTING
Information Patent Grant
Tuning fork quartz manometer
- Patent number 4,995,263
- Issue date Feb 26, 1991
- Balzers Aktiengesellschaft
- Rudolf Stocker
- G01 - MEASURING TESTING
Information Patent Grant
Gas pressure gauge and pressure measuring method
- Patent number 4,995,264
- Issue date Feb 26, 1991
- Balzers Aktiengesellschaft
- Rudolf Stocker
- G01 - MEASURING TESTING
Information Patent Grant
Degradation and contamination compensated tuning fork quartz monome...
- Patent number 4,995,265
- Issue date Feb 26, 1991
- Balzers Aktiengesellschaft
- Rudolf Stocker
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum gauge of thermo-conductive type with quartz oscillator
- Patent number 4,959,999
- Issue date Oct 2, 1990
- Seiko Electronic Components Ltd.
- Fujio Tamura
- G01 - MEASURING TESTING
Information Patent Grant
Vibrating vane pressure gauge
- Patent number 4,409,840
- Issue date Oct 18, 1983
- National Research Development Corporation
- Griffith T. Roberts
- G01 - MEASURING TESTING
Information Patent Grant
3446075
- Patent number 3,446,075
- Issue date May 27, 1969
- G01 - MEASURING TESTING
Information Patent Grant
3079800
- Patent number 3,079,800
- Issue date Mar 5, 1963
- G01 - MEASURING TESTING
Information Patent Grant
2552895
- Patent number 2,552,895
- Issue date May 15, 1951
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MEMS CAPACITIVE PRESSURE SENSOR
- Publication number 20130233086
- Publication date Sep 12, 2013
- NXP B.V.
- Willem Frederik Adrianus Besling
- G01 - MEASURING TESTING
Information Patent Application
MEMS VACUUM LEVEL MONITOR IN SEALED PACKAGE
- Publication number 20130213139
- Publication date Aug 22, 2013
- Taiwan Semiconductor Manufacturing Co., LTD
- Tung-Tsun CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PRESSURE SENSOR
- Publication number 20110107838
- Publication date May 12, 2011
- NXP B.V.
- Matthijs SUIJLEN
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND APPARATUS FOR DETECTION OF AIR INGRESS INTO CRYOGEN VES...
- Publication number 20100199765
- Publication date Aug 12, 2010
- Patrick William Retz
- G01 - MEASURING TESTING
Information Patent Application
PRESSURE GAUGE
- Publication number 20100154553
- Publication date Jun 24, 2010
- NXP B.V.
- Kim Phan Le
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MEMS VACUUM SENSOR BASED ON THE FRICTION PRINCIPLE
- Publication number 20100024562
- Publication date Feb 4, 2010
- FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.,
- Steffen Kurth
- G01 - MEASURING TESTING
Information Patent Application
Resonator Measurement Device and Method Employing the Device
- Publication number 20080184804
- Publication date Aug 7, 2008
- THALES
- Bertrand Leverrier
- G01 - MEASURING TESTING
Information Patent Application
Micro-electro-mechanical pressure sensor
- Publication number 20070074574
- Publication date Apr 5, 2007
- Yakov Kogan
- G01 - MEASURING TESTING
Information Patent Application
Pressure sensor
- Publication number 20050126295
- Publication date Jun 16, 2005
- Raffaele Correale
- G01 - MEASURING TESTING
Information Patent Application
Micro-electro-mechanical pressure sensor
- Publication number 20040250625
- Publication date Dec 16, 2004
- Yakov Kogan
- G01 - MEASURING TESTING

using resonance effects of a vibrating body Vacuum gauges of the Klumb type

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Wide range highly sensitive pressure sensor based on heated microma...

Vacuum apparatus and method of monitoring particles

Lithography apparatus with segmented mirror

MEMS vacuum level monitor in sealed package

Pressure gauge

Methods and apparatus for detection of air ingress into cryogen ves...

MEMS pressure sensor

MEMS vacuum sensor based on the friction principle

Resonator measurement device and method employing the device

Pressure sensor

Micro-electro-mechanical pressure sensor

Micromechanical pressure sensor-with improved range

Micromechanical pressure gauge having extended sensor range

Quartz crystal pressure sensor

Quartz vacuum gauge

Tuning fork quartz manometer

Gas pressure gauge and pressure measuring method

Degradation and contamination compensated tuning fork quartz monome...

Vacuum gauge of thermo-conductive type with quartz oscillator

Vibrating vane pressure gauge

3446075

3079800

2552895

Patents Applicationslast 30 patents

MEMS CAPACITIVE PRESSURE SENSOR

MEMS VACUUM LEVEL MONITOR IN SEALED PACKAGE

MEMS PRESSURE SENSOR

METHODS AND APPARATUS FOR DETECTION OF AIR INGRESS INTO CRYOGEN VES...

PRESSURE GAUGE

MEMS VACUUM SENSOR BASED ON THE FRICTION PRINCIPLE

Resonator Measurement Device and Method Employing the Device

Micro-electro-mechanical pressure sensor

Pressure sensor

Micro-electro-mechanical pressure sensor