using stopper structures for limiting the travel of the seismic mass

Industry

CPC
G01P2015/0871

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Parent Industries

GPHYSICS G01Measuring instruments G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT

Current Industry

G01P2015/0871using stopper structures for limiting the travel of the seismic mass

Industries

Patents Grantslast 30 patents

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Information Patent Grant
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using stopper structures for limiting the travel of the seismic mass

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS device, electronic apparatus, and vehicle

Micromechanical structure and micromechanical sensor

Low stress overtravel stop

MEMS accelerometer with mechanically decoupled proof mass

Accelerometer having an over travel stop with a stop gap less than...

MEMS structure and method of forming same

Microelectromechanical device with stopper

Physical quantity sensor, electronic apparatus, and vehicle

Physical quantity sensor, physical quantity sensor device, electron...

MEMS device, electronic apparatus, and vehicle

Micromechanical component and method for manufacturing a micromecha...

Z-axis inertial sensor with extended motion stops

Micromechanical sensor

3-axis angular accelerometer

Micromechanical sensor system

Physical quantity sensor, electronic device, and vehicle

MEMS device, inertial measurement unit, vehicle positioning device,...

MEMS devices with an element having varying widths

System with oven control and compensation for detecting motion and/...

Physical quantity sensor, physical quantity sensor device, electron...

Physical quantity sensor, complex sensor, inertial measurement unit...

MEMS device, electronic apparatus, and vehicle

Physical quantity sensor, physical quantity sensor device, portable...

Low-power accelerometer

Physical quantity sensor, method for manufacturing physical quantit...

Physical quantity sensor, complex sensor, inertial measurement unit...

Acceleration sensor

Microelectromechanical component

Physical quantity sensor, electronic device, and vehicle

Acceleration event detection and differential sensory devices and m...

Patents Applicationslast 30 patents

MICROMECHANICAL COMPONENT, IN PARTICULAR, INERTIAL SENSOR, INCLUDIN...

MEMS Device, Electronic Apparatus, And Vehicle

LOW STRESS OVERTRAVEL STOP

MEMS Structure and Method of Forming Same

Inertial Sensor And Inertial Measurement Module

ACCELEROMETER HAVING AN OVER TRAVEL STOP WITH A STOP GAP LESS THAN...

LOW STRESS OVERTRAVEL STOP

MEMS Device, Electronic Apparatus, And Vehicle

Physical Quantity Sensor and Inertial Measurement Unit

ACCELEROMETER HAVING AN OVER TRAVEL STOP WITH A STOP GAP LESS THAN...

3-AXIS ANGULAR ACCELEROMETER

MICROMECHANICAL COMPONENT AND METHOD FOR MANUFACTURING A MICROMECHA...

Z-AXIS INERTIAL SENSOR WITH EXTENDED MOTION STOPS

MEMS ACCELEROMETER WITH MECHANICALLY DECOUPLED PROOF MASS

MEMS DEVICE, ELECTRONIC APPARATUS, AND VEHICLE

MICROMECHANICAL SENSOR

THREE-AXIS ACCELEROMETER

MICROELECTROMECHANICAL DEVICE WITH STOPPER

Physical Quantity Sensor, Electronic Device, And Vehicle

INERTIAL SENSOR, ELECTRONIC DEVICE, AND VEHICLE

3-AXIS ANGULAR ACCELEROMETER

MEMS Structure and Method of Forming Same

SYSTEM WITH OVEN CONTROL AND COMPENSATION FOR DETECTING MOTION AND/...

MEMS Devices and Methods of Forming the Same

LOW-POWER ACCELEROMETER

MEMS DEVICE WITH TWO-STAGE MOTION LIMIT STRUCTURE

MEMS Device, Electronic Apparatus, And Vehicle

ELASTIC BUMP STOPS FOR MEMS DEVICES

PHYSICAL QUANTITY DETECTION ELEMENT, PHYSICAL QUANTITY DETECTION DE...

MEMS Structure and Method of Forming Same