Vacuum UV

Industry

CPC
G01N2021/335

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Parent Industries

GPHYSICS G01Measuring instruments G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

Current Industry

G01N2021/335Vacuum UV

Industries

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for element analysis of materials by means of...
- Patent number 12,072,291
- Issue date Aug 27, 2024
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Volker Sturm
- G01 - MEASURING TESTING
Information Patent Grant
Complex spatially-resolved reflectometry/refractometry
- Patent number 11,867,626
- Issue date Jan 9, 2024
- Regents of the Univ of Colorado, a body corporate
- Christina Porter
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for measuring phase of extreme ultraviolet (EU...
- Patent number 11,852,583
- Issue date Dec 26, 2023
- Samsung Electronics Co., Ltd.
- Jongju Park
- G01 - MEASURING TESTING
Information Patent Grant
Extreme ultraviolet radiation in genomic sequencing and other appli...
- Patent number 11,718,871
- Issue date Aug 8, 2023
- Supriya Jaiswal
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Modulus-enforced probe
- Patent number 11,709,132
- Issue date Jul 25, 2023
- Regents of the University of Colorado, a body corporate
- Michael Tanksalvala
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for measuring phase of extreme ultraviolet (EU...
- Patent number 11,635,371
- Issue date Apr 25, 2023
- Samsung Electronics Co., Ltd.
- Jongju Park
- G01 - MEASURING TESTING
Information Patent Grant
Determining one or more characteristics of light in an optical system
- Patent number 11,499,924
- Issue date Nov 15, 2022
- KLA Corp.
- Larissa Juschkin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Testing method for residual organic compounds in a liquid sample
- Patent number 11,307,138
- Issue date Apr 19, 2022
- Paul Hattingh
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Grant
Mid-infrared spectroscopy for measurement of high aspect ratio stru...
- Patent number 11,137,350
- Issue date Oct 5, 2021
- KLA Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Grant
Gas chromatography with vacuum ultra-violet detector and mass spect...
- Patent number 10,866,221
- Issue date Dec 15, 2020
- Micromass UK Limited
- Martin Raymond Green
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multidimensional nanotomography with high harmonics and attosecond...
- Patent number 10,724,952
- Issue date Jul 28, 2020
- B.G. Negev Technologies and Applications Ltd. At Ben-Gurion University
- Evgeny Eugene Frumker
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum ultraviolet absorption spectroscopy system and method
- Patent number 10,677,767
- Issue date Jun 9, 2020
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum ultraviolet absorption spectroscopy system and method
- Patent number 10,641,749
- Issue date May 5, 2020
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Extreme ultraviolet radiation in genomic sequencing and other appli...
- Patent number 10,519,495
- Issue date Dec 31, 2019
- Supriya Jaiswal
- Supriya Jaiswal
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Vacuum ultraviolet absorption spectroscopy system and method
- Patent number 10,338,040
- Issue date Jul 2, 2019
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Infrared spectroscopic reflectometer for measurement of high aspect...
- Patent number 10,215,693
- Issue date Feb 26, 2019
- KLA-Tencor Corporation
- Shankar Krishnan
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum ultraviolet absorption spectroscopy system and method
- Patent number 9,976,996
- Issue date May 22, 2018
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum ultraviolet absorption spectroscopy system and method
- Patent number 9,891,197
- Issue date Feb 13, 2018
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum ultraviolet absorption spectroscopy system and method
- Patent number 9,696,286
- Issue date Jul 4, 2017
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum ultraviolet absorption spectroscopy system and method
- Patent number 9,465,015
- Issue date Oct 11, 2016
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for vacuum ultraviolet (VUV) or shorter wavel...
- Patent number 9,310,292
- Issue date Apr 12, 2016
- VUV Analytics, Inc.
- Phillip Walsh
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum ultraviolet absorption spectroscopy system and method
- Patent number 9,116,158
- Issue date Aug 25, 2015
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Device for UV-spectrometric analysis of gaseous compounds
- Patent number 9,018,592
- Issue date Apr 28, 2015
- Labio A.S.
- Stanislav Vozka
- G01 - MEASURING TESTING
Information Patent Grant
Device for UV-spectrometric analysis of gaseous compounds
- Patent number 8,841,626
- Issue date Sep 23, 2014
- Labio A.S.
- Stanislav Vozka
- G01 - MEASURING TESTING
Information Patent Grant
Optical method and system utilizing operating with deep or vacuum U...
- Patent number 8,658,982
- Issue date Feb 25, 2014
- Nova Measuring Instruments Ltd.
- Boaz Brill
- G01 - MEASURING TESTING
Information Patent Grant
Automated calibration methodology for VUV metrology system
- Patent number 8,153,987
- Issue date Apr 10, 2012
- Jordan Valley Semiconductors Ltd.
- Jeffrey B. Hurst
- G01 - MEASURING TESTING
Information Patent Grant
Broad band referencing reflectometer
- Patent number 8,054,453
- Issue date Nov 8, 2011
- Jordan Valley Semiconductors Ltd.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Broad band referencing reflectometer
- Patent number 8,014,000
- Issue date Sep 6, 2011
- Jordan Valley Semiconductors Ltd.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Contamination monitoring and control techniques for use with an opt...
- Patent number 7,663,747
- Issue date Feb 16, 2010
- MetroSol, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum ultra-violet reflectometer with stray light correction
- Patent number 7,446,876
- Issue date Nov 4, 2008
- MetroSol Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR MEASURING PHASE OF EXTREME ULTRAVIOLET (EU...
- Publication number 20230236124
- Publication date Jul 27, 2023
- Samsung Electronics Co., Ltd.
- Jongju Park
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR ELEMENT ANALYSIS OF MATERIALS BY MEANS OF...
- Publication number 20210396679
- Publication date Dec 23, 2021
- Fraunhofer Gesellschaft zur Forderung der angewandten Forschung e.V.
- Volker STURM
- G01 - MEASURING TESTING
Information Patent Application
DETERMINING ONE OR MORE CHARACTERISTICS OF LIGHT IN AN OPTICAL SYSTEM
- Publication number 20200378901
- Publication date Dec 3, 2020
- KLA Corporation
- Larissa Juschkin
- G01 - MEASURING TESTING
Information Patent Application
TESTING METHOD FOR RESIDUAL ORGANIC COMPOUNDS IN A LIQUID SAMPLE
- Publication number 20200292444
- Publication date Sep 17, 2020
- Paul Hattingh
- G01 - MEASURING TESTING
Information Patent Application
Mid-Infrared Spectroscopy For Measurement Of High Aspect Ratio Stru...
- Publication number 20200240907
- Publication date Jul 30, 2020
- KLA Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Application
SPECTROMETER COMPATIBLE VACUUM AMPOULE DETECTION SYSTEM FOR RAPIDLY...
- Publication number 20190345530
- Publication date Nov 14, 2019
- AMT Scientific LLC
- He Zheng
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Application
GAS CHROMATOGRAPHY WITH VACUUM ULTRA-VIOLET DETECTOR AND MASS SPECT...
- Publication number 20190324003
- Publication date Oct 24, 2019
- Micromass UK Limited
- Martin Raymond Green
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Complex Spatially-Resolved Reflectometry/Refractometry
- Publication number 20190302010
- Publication date Oct 3, 2019
- The Regents of the University of Colorado, a Body Corporate
- Christina Porter
- G01 - MEASURING TESTING
Information Patent Application
Vacuum Ultraviolet Absorption Spectroscopy System And Method
- Publication number 20190293614
- Publication date Sep 26, 2019
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
MULTIDIMENSIONAL NANOTOMOGRAPHY WITH HIGH HARMONICS AND ATTOSECOND...
- Publication number 20190242819
- Publication date Aug 8, 2019
- B.G. NEGEV TECHNOLOGIES AND APPLICATIONS LTD., AT BEN-GURION UNIVERSITY
- Evgeny Eugene Frumker
- G01 - MEASURING TESTING
Information Patent Application
Infrared Spectroscopic Reflectometer For Measurement Of High Aspect...
- Publication number 20180088040
- Publication date Mar 29, 2018
- KLA-Tencor Corporation
- Shankar Krishnan
- G01 - MEASURING TESTING
Information Patent Application
Vacuum Ultraviolet Absorption Spectroscopy System And Method
- Publication number 20170030828
- Publication date Feb 2, 2017
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Vacuum Ultraviolet Absorption Spectroscopy System And Method
- Publication number 20170030874
- Publication date Feb 2, 2017
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Vacuum Ultraviolet Absorption Spectroscopy System And Method
- Publication number 20160377531
- Publication date Dec 29, 2016
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Vacuum Ultraviolet Absorption Spectroscopy System And Method
- Publication number 20160377581
- Publication date Dec 29, 2016
- VUV Analytics, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Methods And Apparatus For Vacuum Ultraviolet (VUV) Or Shorter Wavel...
- Publication number 20140264053
- Publication date Sep 18, 2014
- Phillip Walsh
- G01 - MEASURING TESTING
Information Patent Application
Vacuum Ultraviolet Absorption Spectroscopy System And Method
- Publication number 20140192343
- Publication date Jul 10, 2014
- VUV ANALYTICS, INC.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
DEVICE FOR UV-SPECTROMETRIC ANALYSIS OF GASEOUS COMPOUNDS
- Publication number 20140145087
- Publication date May 29, 2014
- LABIO A.S.
- Stanislav Vozka
- G01 - MEASURING TESTING
Information Patent Application
DEVICE FOR UV-SPECTROMETRIC ANALYSIS OF GASEOUS COMPOUNDS
- Publication number 20130256549
- Publication date Oct 3, 2013
- LABIO A.S.
- Stanislav Vozka
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND APPARATUS FOR VACUUM ULTRAVIOLET (VUV) OR SHORTER WAVEL...
- Publication number 20120268740
- Publication date Oct 25, 2012
- Phillip Walsh
- G01 - MEASURING TESTING
Information Patent Application
BROAD BAND REFERENCING REFLECTOMETER
- Publication number 20100328648
- Publication date Dec 30, 2010
- JORDAN VALLEY SEMICONDUCTORS LTD.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Automated calibration methodology for VUV metrology system
- Publication number 20100294922
- Publication date Nov 25, 2010
- JEFFREY B. HURST
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL METHOD AND SYSTEM UTILIZING OPERATING WITH DEEP OR VACUUM U...
- Publication number 20100181490
- Publication date Jul 22, 2010
- NOVA MEASURING INSTRUMENT LTD.
- Boaz Brill
- G01 - MEASURING TESTING
Information Patent Application
Broad band referencing reflectometer
- Publication number 20100051822
- Publication date Mar 4, 2010
- MetroSol, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
CONTAMINATION MONITORING AND CONTROL TECHNIQUES FOR USE WITH AN OPT...
- Publication number 20100000569
- Publication date Jan 7, 2010
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Broad band referencing reflectometer
- Publication number 20090002711
- Publication date Jan 1, 2009
- MetroSol, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Broad band referencing reflectometer
- Publication number 20080042071
- Publication date Feb 21, 2008
- MetroSol, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Broad band referencing reflectometer
- Publication number 20070030488
- Publication date Feb 8, 2007
- MetroSol, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Vacuum ultraviolet reflectometer integrated with processing system
- Publication number 20060208198
- Publication date Sep 21, 2006
- MetroSol, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING
Information Patent Application
Vacuum ultraviolet reflectometer having collimated beam
- Publication number 20060192958
- Publication date Aug 31, 2006
- MetroSol, Inc.
- Dale A. Harrison
- G01 - MEASURING TESTING

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus and method for element analysis of materials by means of...

Complex spatially-resolved reflectometry/refractometry

Apparatus and method for measuring phase of extreme ultraviolet (EU...

Extreme ultraviolet radiation in genomic sequencing and other appli...

Modulus-enforced probe

Apparatus and method for measuring phase of extreme ultraviolet (EU...

Determining one or more characteristics of light in an optical system

Testing method for residual organic compounds in a liquid sample

Mid-infrared spectroscopy for measurement of high aspect ratio stru...

Gas chromatography with vacuum ultra-violet detector and mass spect...

Multidimensional nanotomography with high harmonics and attosecond...

Vacuum ultraviolet absorption spectroscopy system and method

Vacuum ultraviolet absorption spectroscopy system and method

Extreme ultraviolet radiation in genomic sequencing and other appli...

Vacuum ultraviolet absorption spectroscopy system and method

Infrared spectroscopic reflectometer for measurement of high aspect...

Vacuum ultraviolet absorption spectroscopy system and method

Vacuum ultraviolet absorption spectroscopy system and method

Vacuum ultraviolet absorption spectroscopy system and method

Vacuum ultraviolet absorption spectroscopy system and method

Methods and apparatus for vacuum ultraviolet (VUV) or shorter wavel...

Vacuum ultraviolet absorption spectroscopy system and method

Device for UV-spectrometric analysis of gaseous compounds

Device for UV-spectrometric analysis of gaseous compounds

Optical method and system utilizing operating with deep or vacuum U...

Automated calibration methodology for VUV metrology system

Broad band referencing reflectometer

Broad band referencing reflectometer

Contamination monitoring and control techniques for use with an opt...

Vacuum ultra-violet reflectometer with stray light correction

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR MEASURING PHASE OF EXTREME ULTRAVIOLET (EU...

APPARATUS AND METHOD FOR ELEMENT ANALYSIS OF MATERIALS BY MEANS OF...

DETERMINING ONE OR MORE CHARACTERISTICS OF LIGHT IN AN OPTICAL SYSTEM

TESTING METHOD FOR RESIDUAL ORGANIC COMPOUNDS IN A LIQUID SAMPLE

Mid-Infrared Spectroscopy For Measurement Of High Aspect Ratio Stru...

SPECTROMETER COMPATIBLE VACUUM AMPOULE DETECTION SYSTEM FOR RAPIDLY...

GAS CHROMATOGRAPHY WITH VACUUM ULTRA-VIOLET DETECTOR AND MASS SPECT...

Complex Spatially-Resolved Reflectometry/Refractometry

Vacuum Ultraviolet Absorption Spectroscopy System And Method

MULTIDIMENSIONAL NANOTOMOGRAPHY WITH HIGH HARMONICS AND ATTOSECOND...

Infrared Spectroscopic Reflectometer For Measurement Of High Aspect...

Vacuum Ultraviolet Absorption Spectroscopy System And Method

Vacuum Ultraviolet Absorption Spectroscopy System And Method

Vacuum Ultraviolet Absorption Spectroscopy System And Method

Vacuum Ultraviolet Absorption Spectroscopy System And Method

Methods And Apparatus For Vacuum Ultraviolet (VUV) Or Shorter Wavel...

Vacuum Ultraviolet Absorption Spectroscopy System And Method

DEVICE FOR UV-SPECTROMETRIC ANALYSIS OF GASEOUS COMPOUNDS

DEVICE FOR UV-SPECTROMETRIC ANALYSIS OF GASEOUS COMPOUNDS

METHODS AND APPARATUS FOR VACUUM ULTRAVIOLET (VUV) OR SHORTER WAVEL...

BROAD BAND REFERENCING REFLECTOMETER

Automated calibration methodology for VUV metrology system

OPTICAL METHOD AND SYSTEM UTILIZING OPERATING WITH DEEP OR VACUUM U...

Broad band referencing reflectometer

CONTAMINATION MONITORING AND CONTROL TECHNIQUES FOR USE WITH AN OPT...

Broad band referencing reflectometer

Broad band referencing reflectometer

Broad band referencing reflectometer

Vacuum ultraviolet reflectometer integrated with processing system

Vacuum ultraviolet reflectometer having collimated beam