Vacuum

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CPC
Y10T279/11

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YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION Y10T279/00Chucks or sockets

Current Industry

Y10T279/11Vacuum

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Wafer processing apparatus and wafer processing method
- Patent number 12,074,054
- Issue date Aug 27, 2024
- ZEUS CO., LTD.
- Woon Kong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing apparatus and wafer processing method
- Patent number 11,901,212
- Issue date Feb 13, 2024
- ZEUS CO., LTD.
- Woon Kong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support unit
- Patent number 10,861,735
- Issue date Dec 8, 2020
- Semigear, Inc.
- Yonghoe Heo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Vacuum chuck and semiconductor manufacturing apparatus having the same
- Patent number 10,825,712
- Issue date Nov 3, 2020
- Samsung Electronics Co., Ltd.
- Young-min Kim
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Vacuum suction pad and substrate holder
- Patent number 10,639,727
- Issue date May 5, 2020
- Ebara Corporation
- Satoru Yamamoto
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Suction nozzle, mounting device, and component release method
- Patent number 10,568,249
- Issue date Feb 18, 2020
- FUJI CORPORATION
- Yusuke Tsuchiya
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chuck for a high precision machine tool
- Patent number 10,507,532
- Issue date Dec 17, 2019
- WIELANDTS UPMT
- Marc Wielandts
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wafer chuck apparatus with micro-channel regions
- Patent number 10,468,290
- Issue date Nov 5, 2019
- Ultratech, Inc.
- Raymond Ellis
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate supporting apparatus
- Patent number 10,410,906
- Issue date Sep 10, 2019
- ACM Research (Shanghai) Inc.
- Hui Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Multi-size adaptable spin chuck system
- Patent number 10,204,820
- Issue date Feb 12, 2019
- Cost Effective Equipment LLC
- Kirk Emory
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method for providing a planarizable workpiece support, a workpiece...
- Patent number 10,199,255
- Issue date Feb 5, 2019
- Infineon Technologioes AG
- Ingo Muri
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Sealant liner applicator with vacuum chuck
- Patent number 10,076,828
- Issue date Sep 18, 2018
- Custom Machining Corp.
- Allan Ross
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High voltage chuck for a probe station
- Patent number 10,062,597
- Issue date Aug 28, 2018
- FormFactor Beaverton, Inc.
- Michael E. Simmons
- G01 - MEASURING TESTING
Information Patent Grant
Chucking apparatus for a workpiece with honeycomb structure
- Patent number 9,956,622
- Issue date May 1, 2018
- GFM-GmbH
- Franz Heidlmayer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for planarizing one or more workpieces, a workpiece planariz...
- Patent number 9,862,037
- Issue date Jan 9, 2018
- Infineon Technologies AG
- Ingo Muri
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Mount flange
- Patent number 9,833,922
- Issue date Dec 5, 2017
- Disco Corporation
- Shuji Nitta
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High voltage chuck for a probe station
- Patent number 9,741,599
- Issue date Aug 22, 2017
- Cascade Microtech, Inc.
- Michael E. Simmons
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for non-contact wafer chucking
- Patent number 9,653,338
- Issue date May 16, 2017
- KLA-Tencor Corporation
- Luping Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for holding a planar substrate
- Patent number 9,558,984
- Issue date Jan 31, 2017
- Mechatronic Systemtechnik GmbH
- Alexander Oremus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 9,558,979
- Issue date Jan 31, 2017
- Samsung Electronics Co., Ltd.
- Hwa Seob Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum chuck
- Patent number 9,558,985
- Issue date Jan 31, 2017
- ACM Research (Shanghai) Inc.
- Jian Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Adjustment mechanism for rotation runout and dynamic balance of rot...
- Patent number 9,511,464
- Issue date Dec 6, 2016
- FANUC CORPORATION
- Kenzo Ebihara
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High voltage chuck for a probe station
- Patent number 9,506,973
- Issue date Nov 29, 2016
- Cascade Microtech, Inc.
- Michael E. Simmons
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder assembly for controlled layer transfer
- Patent number 9,502,278
- Issue date Nov 22, 2016
- International Business Machines Corporation
- Stephen W. Bedell
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Chucks for supporting solar cell in hot spot testing
- Patent number 9,435,848
- Issue date Sep 6, 2016
- SunPower Corporation
- Jose Francisco Capulong
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Device for machining a substrate and a method for this purpose
- Patent number 9,431,284
- Issue date Aug 30, 2016
- solar-semi GmbH
- Pirmin Muffler
- B44 - DECORATIVE ARTS
Information Patent Grant
Retention device and retention method
- Patent number 9,406,542
- Issue date Aug 2, 2016
- Tokyo Ohka Kogyo Co., Ltd.
- Atsushi Miyanari
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Releasing apparatus for separating a semiconductor substrate from a...
- Patent number 9,397,250
- Issue date Jul 19, 2016
- Solexel, Inc.
- Mehrdad M. Moslehi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Chuck table
- Patent number 9,381,577
- Issue date Jul 5, 2016
- Disco Corporation
- Kentaro Iizuka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Holding device for holding a patterned wafer
- Patent number 9,378,996
- Issue date Jun 28, 2016
- EV Group W. Thallner GmbH
- Werner Thallner
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
WAFER PROCESSING APPARATUS AND WAFER PROCESSING METHOD
- Publication number 20240038573
- Publication date Feb 1, 2024
- ZEUS CO., LTD.
- Woon Kong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH VOLTAGE CHUCK FOR A PROBE STATION
- Publication number 20170338142
- Publication date Nov 23, 2017
- Cascade Microtech, Inc.
- Michael E. Simmons
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20140319784
- Publication date Oct 30, 2014
- Samsung Electronics Co., Ltd.
- Hwa Seob CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER ASSEMBLY FOR CONTROLLED LAYER TRANSFER
- Publication number 20140312576
- Publication date Oct 23, 2014
- International Business Machines Corporation
- Stephen W. Bedell
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE HOLDER ASSEMBLY FOR CONTROLLED LAYER TRANSFER
- Publication number 20140312094
- Publication date Oct 23, 2014
- International Business Machines Corporation
- Stephen W. Bedell
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20140225335
- Publication date Aug 14, 2014
- KABUSHIKI KAISHA TOSHIBA
- Takehisa KURASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR HOLDING A PLANAR SUBSTRATE
- Publication number 20140191478
- Publication date Jul 10, 2014
- MECHATRONIC SYSTEMTECHNIK GMBH
- Alexander Oremus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHUCKING DEVICE AND CHUCKING METHOD
- Publication number 20140189998
- Publication date Jul 10, 2014
- Lasertec Corporation
- Haruhiko KUSUNOSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chuck for Mounting a Semiconductor Wafer for Liquid Immersion Proce...
- Publication number 20140166050
- Publication date Jun 19, 2014
- Intermolecular, Inc.
- Rajesh Kelekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOLDING DEVICE FOR HOLDING A PATTERNED WAFER
- Publication number 20140159321
- Publication date Jun 12, 2014
- EV Group E. Thallner GmbH
- Werner Thallner
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
RETENTION DEVICE AND RETENTION METHOD
- Publication number 20140109941
- Publication date Apr 24, 2014
- Tokyo Ohka Kogyo Co., Ltd.
- Atsushi Miyanari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHUCKS FOR SUPPORTING SOLAR CELL IN HOT SPOT TESTING
- Publication number 20140103953
- Publication date Apr 17, 2014
- Jose Francisco Capulong
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CHUCK TABLE
- Publication number 20140091537
- Publication date Apr 3, 2014
- Disco Corporation
- Kentaro Iizuka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CHUCK AND SEMICONDUCTOR PROCESS USING THE SAME
- Publication number 20140065553
- Publication date Mar 6, 2014
- UNITED MICROELECTRONICS CORPORATION
- Chung-Sung JANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chuck Exhaust Openings
- Publication number 20140042715
- Publication date Feb 13, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hao Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Suction Chuck and Workpiece Transfer Apparatus Including the Same
- Publication number 20140037413
- Publication date Feb 6, 2014
- MURATA MACHINERY, LTD.
- Hiroki Takashima
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
CHUCKS FOR SUPPORTING SOLAR CELL IN HOT SPOT TESTING
- Publication number 20130300446
- Publication date Nov 14, 2013
- Jose Francisco Capulong
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE HOLDING APPARATUS AND SUBSTRATE HOLDING METHOD
- Publication number 20130264780
- Publication date Oct 10, 2013
- TOKYO ELECTRON LIMITED
- Yasuharu IWASHITA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR WAFER ISOLATED TRANSFER CHUCK
- Publication number 20130168929
- Publication date Jul 4, 2013
- MULTIPROBE, INC.
- Andrew N. Erickson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF TESTING A SEMICONDUCTOR DEVICE AND SUCTIONING A SEMICONDU...
- Publication number 20130171748
- Publication date Jul 4, 2013
- FUJITSU SEMICONDUCTOR LIMITED
- Shigeyuki Maruyama
- G01 - MEASURING TESTING
Information Patent Application
Track Spin Wafer Chuck
- Publication number 20130156947
- Publication date Jun 20, 2013
- Taiwan Semiconductor Manufacturing Co., LTD
- Wei-Hsiang Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER SUPPORTING STRUCTURE
- Publication number 20130147129
- Publication date Jun 13, 2013
- Nan Ya Technology Corporation
- Chui Fu Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR MACHINING A SUBSTRATE AND A METHOD FOR THIS PURPOSE
- Publication number 20130140274
- Publication date Jun 6, 2013
- SOLAR-SEMI GMBH
- Pirmin Muffler
- B44 - DECORATIVE ARTS
Information Patent Application
Controlled Surface Roughness in Vacuum Retention
- Publication number 20130082448
- Publication date Apr 4, 2013
- Electro Scientific Industries, Inc.
- Robert A. Ferguson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
HIGH VOLTAGE CHUCK FOR A PROBE STATION
- Publication number 20130075982
- Publication date Mar 28, 2013
- Cascade Microtech, Inc.
- Michael E. Simmons
- G01 - MEASURING TESTING
Information Patent Application
AIR FLOW MANAGEMENT IN A SYSTEM WITH HIGH SPEED SPINNING CHUCK
- Publication number 20130038866
- Publication date Feb 14, 2013
- KLA-Tencor Corporation
- George J. Kren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF MANUFACTURING SEMICONDUCTOR PACKAGES AND METHODS OF MA...
- Publication number 20120313332
- Publication date Dec 13, 2012
- Chang-Seong Jeon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR RELEASING A THIN SEMICONDUCTOR SUBSTRATE FROM A REUSABLE...
- Publication number 20120272490
- Publication date Nov 1, 2012
- SOLEXEL, INC.
- Mehrdad M. Moslehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING APPARATUS AND METHOD
- Publication number 20120213925
- Publication date Aug 23, 2012
- TOKYO ELECTRON LIMITED
- Takahiro KITANO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HIGH TEMPERATURE VACUUM CHUCK ASSEMBLY
- Publication number 20120205878
- Publication date Aug 16, 2012
- Alexander N. Lerner
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Wafer processing apparatus and wafer processing method

Wafer processing apparatus and wafer processing method

Substrate support unit

Vacuum chuck and semiconductor manufacturing apparatus having the same

Vacuum suction pad and substrate holder

Suction nozzle, mounting device, and component release method

Chuck for a high precision machine tool

Wafer chuck apparatus with micro-channel regions

Substrate supporting apparatus

Multi-size adaptable spin chuck system

Method for providing a planarizable workpiece support, a workpiece...

Sealant liner applicator with vacuum chuck

High voltage chuck for a probe station

Chucking apparatus for a workpiece with honeycomb structure

Method for planarizing one or more workpieces, a workpiece planariz...

Mount flange

High voltage chuck for a probe station

System and method for non-contact wafer chucking

Device for holding a planar substrate

Method for manufacturing semiconductor device

Vacuum chuck

Adjustment mechanism for rotation runout and dynamic balance of rot...

High voltage chuck for a probe station

Substrate holder assembly for controlled layer transfer

Chucks for supporting solar cell in hot spot testing

Device for machining a substrate and a method for this purpose

Retention device and retention method

Releasing apparatus for separating a semiconductor substrate from a...

Chuck table

Holding device for holding a patterned wafer

Patents Applicationslast 30 patents

WAFER PROCESSING APPARATUS AND WAFER PROCESSING METHOD

HIGH VOLTAGE CHUCK FOR A PROBE STATION

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

SUBSTRATE HOLDER ASSEMBLY FOR CONTROLLED LAYER TRANSFER

SUBSTRATE HOLDER ASSEMBLY FOR CONTROLLED LAYER TRANSFER

SUBSTRATE TREATMENT APPARATUS

DEVICE FOR HOLDING A PLANAR SUBSTRATE

CHUCKING DEVICE AND CHUCKING METHOD

Chuck for Mounting a Semiconductor Wafer for Liquid Immersion Proce...

HOLDING DEVICE FOR HOLDING A PATTERNED WAFER

RETENTION DEVICE AND RETENTION METHOD

CHUCKS FOR SUPPORTING SOLAR CELL IN HOT SPOT TESTING

CHUCK TABLE

CHUCK AND SEMICONDUCTOR PROCESS USING THE SAME

Chuck Exhaust Openings

Suction Chuck and Workpiece Transfer Apparatus Including the Same

CHUCKS FOR SUPPORTING SOLAR CELL IN HOT SPOT TESTING

SUBSTRATE HOLDING APPARATUS AND SUBSTRATE HOLDING METHOD

SEMICONDUCTOR WAFER ISOLATED TRANSFER CHUCK

METHOD OF TESTING A SEMICONDUCTOR DEVICE AND SUCTIONING A SEMICONDU...

Track Spin Wafer Chuck

WAFER SUPPORTING STRUCTURE

DEVICE FOR MACHINING A SUBSTRATE AND A METHOD FOR THIS PURPOSE

Controlled Surface Roughness in Vacuum Retention

HIGH VOLTAGE CHUCK FOR A PROBE STATION

AIR FLOW MANAGEMENT IN A SYSTEM WITH HIGH SPEED SPINNING CHUCK

APPARATUS OF MANUFACTURING SEMICONDUCTOR PACKAGES AND METHODS OF MA...

METHOD FOR RELEASING A THIN SEMICONDUCTOR SUBSTRATE FROM A REUSABLE...

COATING APPARATUS AND METHOD

HIGH TEMPERATURE VACUUM CHUCK ASSEMBLY