Wafer cassette transporting

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CPC
Y10S414/14

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YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S414/00Material or article handling

Current Industry

Y10S414/14Wafer cassette transporting

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Article accommodation facility
- Patent number 12,112,966
- Issue date Oct 8, 2024
- Daifuku Co., Ltd.
- Kazuya Omori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus, system and method for providing an end effector
- Patent number 12,042,930
- Issue date Jul 23, 2024
- JABIL INC.
- Jeroen Bosboom
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Apparatus, system and method for providing an end effector
- Patent number 11,602,859
- Issue date Mar 14, 2023
- Jabil Inc.
- Jeroen Bosboom
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Article storage facility
- Patent number 11,460,766
- Issue date Oct 4, 2022
- Taiwan Daifuku Co., Ltd.
- Isamu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-level hand apparatus and conveying robot provided with the same
- Patent number 11,414,278
- Issue date Aug 16, 2022
- Daihen Corporation
- Kimihiro Kasahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Side opening unified pod
- Patent number 11,201,070
- Issue date Dec 14, 2021
- Brooks Automation, Inc.
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin-plate substrate holding finger and transfer robot provided wit...
- Patent number 11,107,722
- Issue date Aug 31, 2021
- Rorze Corporation
- Katsunori Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 11,069,548
- Issue date Jul 20, 2021
- Tokyo Electron Limited
- Toru Nishino
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Apparatus, system and method for providing an end effector
- Patent number 11,059,183
- Issue date Jul 13, 2021
- Jabil Inc.
- Jeroen Bosboom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer device and method for transferring substrate without unexp...
- Patent number 11,037,809
- Issue date Jun 15, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Pei-Lun Hung
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Workpiece stocker with circular configuration
- Patent number 10,930,536
- Issue date Feb 23, 2021
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated systems for interfacing with substrate container storage...
- Patent number 10,593,583
- Issue date Mar 17, 2020
- Brooks Automation, Inc.
- Anthony C. Bonora
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Apparatus, system and method for providing an end effector
- Patent number 10,576,639
- Issue date Mar 3, 2020
- Jabil Inc.
- Jeroen Bosboom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 10,403,525
- Issue date Sep 3, 2019
- Tokyo Electron Limited
- Toru Nishino
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate transport appartatus with multiple movable arms utilizing...
- Patent number 10,335,945
- Issue date Jul 2, 2019
- Brooks Automation, Inc.
- Christopher Hofmeister
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Temporary storage system, conveyance system using same, and tempora...
- Patent number 10,266,341
- Issue date Apr 23, 2019
- Murata Machinery, Ltd.
- Masazumi Fukushima
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Wafer transfer device
- Patent number 10,192,794
- Issue date Jan 29, 2019
- SK SILTRON CO., LTD.
- So Mi Kim
- B08 - CLEANING
Information Patent Grant
Side opening unified pod
- Patent number 9,978,623
- Issue date May 22, 2018
- Brooks Automation, Inc.
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Article transport facility
- Patent number 9,969,551
- Issue date May 15, 2018
- Daifuku Co., Ltd.
- Takeshi Abe
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Workpiece stocker with circular configuration
- Patent number 9,947,565
- Issue date Apr 17, 2018
- Brooks Automation, Inc.
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus, system and method for providing an end effector
- Patent number 9,919,430
- Issue date Mar 20, 2018
- Jabil Inc.
- Jeroen Bosboom
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Integrated systems for interfacing with substrate container storage...
- Patent number 9,842,756
- Issue date Dec 12, 2017
- Brooks Automation, Inc.
- Anthony C. Bonora
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Container transport facility
- Patent number 9,685,361
- Issue date Jun 20, 2017
- Daifuku Co., Ltd.
- Hideo Yoshioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate loading and unloading station with buffer
- Patent number 9,670,010
- Issue date Jun 6, 2017
- Brooks Automation, Inc.
- Ulysses Gilchrist
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Robot having end effector and method of operating the same
- Patent number 9,616,577
- Issue date Apr 11, 2017
- Kawasaki Jukogyo Kabushiki Kaisha
- Yasuhiko Hashimoto
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Method of etching and cleaning wafers
- Patent number 9,583,352
- Issue date Feb 28, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chang Tsai
- G05 - CONTROLLING REGULATING
Information Patent Grant
Device for machining a substrate and a method for this purpose
- Patent number 9,431,284
- Issue date Aug 30, 2016
- solar-semi GmbH
- Pirmin Muffler
- B44 - DECORATIVE ARTS
Information Patent Grant
Elevator-based tool loading and buffering system
- Patent number 9,368,382
- Issue date Jun 14, 2016
- Brooks Automation, Inc.
- Gerald M. Friedman
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Systems, apparatus and methods for transporting substrates in elect...
- Patent number 9,334,127
- Issue date May 10, 2016
- Applied Materials, Inc.
- Izya Kremerman
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Conveying robot
- Patent number 9,302,395
- Issue date Apr 5, 2016
- Kabushiki Kaisha Yaskawa Denki
- Ryuji Ando
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS, SYSTEM AND METHOD FOR PROVIDING AN END EFFECTOR
- Publication number 20240424688
- Publication date Dec 26, 2024
- Jabil Inc.
- Jeroen Bosboom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS, SYSTEM AND METHOD FOR PROVIDING AN END EFFECTOR
- Publication number 20200306990
- Publication date Oct 1, 2020
- Jabil Inc.
- Jeroen Bosboom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20190362996
- Publication date Nov 28, 2019
- TOKYO ELECTRON LIMITED
- Toru NISHINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKPIECE STOCKER WITH CIRCULAR CONFIGURATION
- Publication number 20190019709
- Publication date Jan 17, 2019
- BROOKS AUTOMATION (GERMANY) GmbH
- Lutz REBSTOCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIDE OPENING UNIFIED POD
- Publication number 20180269094
- Publication date Sep 20, 2018
- Brooks Automation, Inc.
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS, SYSTEM AND METHOD FOR PROVIDING AN END EFFECTOR
- Publication number 20180161989
- Publication date Jun 14, 2018
- Jabil Inc.
- Jeroen Bosboom
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
INTEGRATED SYSTEMS FOR INTERFACING WITH SUBSTRATE CONTAINER STORAGE...
- Publication number 20180096873
- Publication date Apr 5, 2018
- Brooks Automation, Inc.
- Anthony C. Bonora
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140356106
- Publication date Dec 4, 2014
- TOKYO ELECTRON LIMITED
- Yuji KAMIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEM
- Publication number 20140341679
- Publication date Nov 20, 2014
- Brooks Automation, Inc.
- Gerald M. Friedman
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
Scalable stockers with automatic handling buffer
- Publication number 20140328654
- Publication date Nov 6, 2014
- Lutz Rebstock
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SPRING RETAINED END EFFECTOR CONTACT PAD
- Publication number 20140306474
- Publication date Oct 16, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Michael A. Schrameyer
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING...
- Publication number 20140294551
- Publication date Oct 2, 2014
- Christopher Hofmeister
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SYSTEMS, APPARATUS AND METHODS FOR TRANSPORTING SUBSTRATES IN ELECT...
- Publication number 20140286736
- Publication date Sep 25, 2014
- Applied Materials, Inc.
- Izya Kremerman
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Shear-Layer Chuck for Lithographic Apparatus
- Publication number 20140233009
- Publication date Aug 21, 2014
- ASML Holding N.V.
- Samir A. NAYFEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LCD GLASS SUBSTRATE STORAGE TRAY
- Publication number 20140076771
- Publication date Mar 20, 2014
- SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Rui Fang
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
Storage System for Glass Substrate and Method for Storing Glass Sub...
- Publication number 20140064887
- Publication date Mar 6, 2014
- Shenzhen China Star Optoelectronics Technology Co. Ltd.
- Zenghong Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shear-Layer Chuck for Lithographic Apparatus
- Publication number 20140016110
- Publication date Jan 16, 2014
- ASML Holding N.V.
- Samir A. NAYFEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORT SYSTEM
- Publication number 20130333174
- Publication date Dec 19, 2013
- Brooks Automation, Inc.
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LOADING AND UNLOADING STATION WITH BUFFER
- Publication number 20130336749
- Publication date Dec 19, 2013
- Brooks Automation, Inc.
- Ulysses Gilchrist
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
CONVEYING ROBOT
- Publication number 20130195591
- Publication date Aug 1, 2013
- KABUSHIKI KAISHA YASKAWA DENKI
- Ryuji ANDO
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
ROBOT SYSTEM
- Publication number 20130190924
- Publication date Jul 25, 2013
- KABUSHIKI KAISHA YASKAWA DENKI
- Yoshiki KIMURA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Panel Pickup and Placing Method of UVM Process and Combined Pickup...
- Publication number 20130142613
- Publication date Jun 6, 2013
- Shenzhen China Star Opoelectronics Technology Co., LTD.
- Fengming Yin
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
DEVICE FOR MACHINING A SUBSTRATE AND A METHOD FOR THIS PURPOSE
- Publication number 20130140274
- Publication date Jun 6, 2013
- SOLAR-SEMI GMBH
- Pirmin Muffler
- B44 - DECORATIVE ARTS
Information Patent Application
METHOD AND APPARATUS FOR REMOVING A VERTICALLY-ORIENTED SUBSTRATE F...
- Publication number 20130089395
- Publication date Apr 11, 2013
- Varian Semiconductor Equipment Associates, Inc.
- John Robert Fairhurst
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Controlled Surface Roughness in Vacuum Retention
- Publication number 20130082448
- Publication date Apr 4, 2013
- Electro Scientific Industries, Inc.
- Robert A. Ferguson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS
- Publication number 20130071217
- Publication date Mar 21, 2013
- CHRISTOPHER HOFMEISTER
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
HEAT TREATMENT APPARATUS AND METHOD OF TRANSFERRING SUBSTRATES TO T...
- Publication number 20130028687
- Publication date Jan 31, 2013
- TOKYO ELECTRON LIMITED
- Kiichi TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Frame Feeding System and Frame Feeding Method
- Publication number 20130017040
- Publication date Jan 17, 2013
- Hitachi High-Tech Instruments Co., Ltd.
- Tatsuyuki OHKUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Transferring System and Substrate Transferring Method
- Publication number 20120308342
- Publication date Dec 6, 2012
- Shenzhen China Star Optoelectronics Technology Co., LTD.
- Chun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORT SYSTEM AND TRANSPORT METHOD
- Publication number 20120275886
- Publication date Nov 1, 2012
- MURATEC AUTOMATION CO., LTD.
- Tatsuji OTA
- H01 - BASIC ELECTRIC ELEMENTS

Wafer cassette transporting

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Article accommodation facility

Apparatus, system and method for providing an end effector

Apparatus, system and method for providing an end effector

Article storage facility

Multi-level hand apparatus and conveying robot provided with the same

Side opening unified pod

Thin-plate substrate holding finger and transfer robot provided wit...

Substrate processing method and substrate processing system

Apparatus, system and method for providing an end effector

Transfer device and method for transferring substrate without unexp...

Workpiece stocker with circular configuration

Integrated systems for interfacing with substrate container storage...

Apparatus, system and method for providing an end effector

Substrate processing method and substrate processing system

Substrate transport appartatus with multiple movable arms utilizing...

Temporary storage system, conveyance system using same, and tempora...

Wafer transfer device

Side opening unified pod

Article transport facility

Workpiece stocker with circular configuration

Apparatus, system and method for providing an end effector

Integrated systems for interfacing with substrate container storage...

Container transport facility

Substrate loading and unloading station with buffer

Robot having end effector and method of operating the same

Method of etching and cleaning wafers

Device for machining a substrate and a method for this purpose

Elevator-based tool loading and buffering system

Systems, apparatus and methods for transporting substrates in elect...

Conveying robot

Patents Applicationslast 30 patents

APPARATUS, SYSTEM AND METHOD FOR PROVIDING AN END EFFECTOR

APPARATUS, SYSTEM AND METHOD FOR PROVIDING AN END EFFECTOR

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

WORKPIECE STOCKER WITH CIRCULAR CONFIGURATION

SIDE OPENING UNIFIED POD

APPARATUS, SYSTEM AND METHOD FOR PROVIDING AN END EFFECTOR

INTEGRATED SYSTEMS FOR INTERFACING WITH SUBSTRATE CONTAINER STORAGE...

SUBSTRATE PROCESSING APPARATUS

ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEM

Scalable stockers with automatic handling buffer

SPRING RETAINED END EFFECTOR CONTACT PAD

SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING...

SYSTEMS, APPARATUS AND METHODS FOR TRANSPORTING SUBSTRATES IN ELECT...

Shear-Layer Chuck for Lithographic Apparatus

LCD GLASS SUBSTRATE STORAGE TRAY

Storage System for Glass Substrate and Method for Storing Glass Sub...

Shear-Layer Chuck for Lithographic Apparatus

TRANSPORT SYSTEM

SUBSTRATE LOADING AND UNLOADING STATION WITH BUFFER

CONVEYING ROBOT

ROBOT SYSTEM

Panel Pickup and Placing Method of UVM Process and Combined Pickup...

DEVICE FOR MACHINING A SUBSTRATE AND A METHOD FOR THIS PURPOSE

METHOD AND APPARATUS FOR REMOVING A VERTICALLY-ORIENTED SUBSTRATE F...

Controlled Surface Roughness in Vacuum Retention

SUBSTRATE TRANSPORT APPARATUS

HEAT TREATMENT APPARATUS AND METHOD OF TRANSFERRING SUBSTRATES TO T...

Frame Feeding System and Frame Feeding Method

Substrate Transferring System and Substrate Transferring Method

TRANSPORT SYSTEM AND TRANSPORT METHOD