Wafer processing

Industry

CPC
G05B2219/2602

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Parent Industries

GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

Current Industry

G05B2219/2602Wafer processing

Industries

Patents Grantslast 30 patents

Information Patent Grant
Wafer processing apparatus and wafer transfer method
- Patent number 12,099,309
- Issue date Sep 24, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xueyu Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of handling transaction request, and semiconductor productio...
- Patent number 12,045,042
- Issue date Jul 23, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Huan-Cheng Li
- G05 - CONTROLLING REGULATING
Information Patent Grant
Abatement system, abatement device, and system control device
- Patent number 12,007,744
- Issue date Jun 11, 2024
- Edwards Japan Limited
- Kobayashi Kenichiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, device management controller, and r...
- Patent number 11,966,210
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Kazuhide Asai
- G05 - CONTROLLING REGULATING
Information Patent Grant
Machine and deep learning methods for spectra-based metrology and p...
- Patent number 11,815,819
- Issue date Nov 14, 2023
- Nova Ltd.
- Barak Bringoltz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining root causes of events of a semiconductor man...
- Patent number 11,796,978
- Issue date Oct 24, 2023
- ASML Netherlands B.V.
- Chang-Wei Chen
- G05 - CONTROLLING REGULATING
Information Patent Grant
Treatment condition setting method, storage medium, and substrate t...
- Patent number 11,726,438
- Issue date Aug 15, 2023
- Tokyo Electron Limited
- Takuya Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing system
- Patent number 11,726,456
- Issue date Aug 15, 2023
- Kokusai Electric Corporation
- Masanori Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport apparatus and adapter pendant
- Patent number 11,670,534
- Issue date Jun 6, 2023
- BROOKS AUTOMATION US, LLC
- Dana L. Atwood
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Semiconductor manufacturing apparatus and method for transferring w...
- Patent number 11,621,185
- Issue date Apr 4, 2023
- Tokyo Electron Limited
- Rintaro Takao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wireless substrate-like teaching sensor for semiconductor processing
- Patent number 11,468,590
- Issue date Oct 11, 2022
- CyberOptics Corporation
- Ferris J. Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor manufacturing apparatus, failure prediction method fo...
- Patent number 11,315,812
- Issue date Apr 26, 2022
- Ebara Corporation
- Jumpei Fujikata
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Plasma processing apparatus
- Patent number 11,289,313
- Issue date Mar 29, 2022
- HITACHI HIGH-TECH CORPORATION
- Shota Umeda
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus, device management controller, and r...
- Patent number 11,237,538
- Issue date Feb 1, 2022
- Kokusai Electric Corporation
- Kazuhide Asai
- G05 - CONTROLLING REGULATING
Information Patent Grant
Systems and methods for calibrating scalar field contribution value...
- Patent number 11,029,668
- Issue date Jun 8, 2021
- Lam Research Corporation
- Marcus Musselman
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor process transport apparatus comprising an adapter pen...
- Patent number 10,903,107
- Issue date Jan 26, 2021
- Brooks Automation, Inc.
- Dana L. Atwood
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Matching process controllers for improved matching of process
- Patent number 10,884,400
- Issue date Jan 5, 2021
- Applied Materials, Inc.
- James Robert Moyne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System, method and computer program product for generating a traini...
- Patent number 10,803,575
- Issue date Oct 13, 2020
- Applied Materials Israel Ltd.
- Ohad Shaubi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Across-wafer profile control in semiconductor processes
- Patent number 10,754,319
- Issue date Aug 25, 2020
- GLOBALFOUNDRIES Inc.
- Richard Good
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for automating user interaction for semiconductor...
- Patent number 10,747,210
- Issue date Aug 18, 2020
- Lam Research Corporation
- Rainer Unterguggenberger
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing system
- Patent number 10,671,056
- Issue date Jun 2, 2020
- Kokusai Electric Corporation
- Masanori Nakayama
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods and system for controlling a surface profile of a wafer
- Patent number 10,654,193
- Issue date May 19, 2020
- GlobalWafers Co., Ltd.
- Peter D. Albrecht
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Workpiece processing apparatus and workpiece transfer system
- Patent number 10,496,082
- Issue date Dec 3, 2019
- Daihen Corporation
- Akira Miyamoto
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Crystal oscillator and the use thereof in semiconductor fabrication
- Patent number 10,446,421
- Issue date Oct 15, 2019
- GLOBALFOUNDRIES Inc.
- Cyril Cabral
- G05 - CONTROLLING REGULATING
Information Patent Grant
Systems and methods for calibrating scalar field contribution value...
- Patent number 10,386,821
- Issue date Aug 20, 2019
- Lam Research Corporation
- Marcus Musselman
- G01 - MEASURING TESTING
Information Patent Grant
Methods and system for controlling a surface profile of a wafer
- Patent number 10,315,337
- Issue date Jun 11, 2019
- GlobalWafers Co. Ltd.
- Peter D. Albrecht
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wafer processing apparatus, recording medium and wafer conveying me...
- Patent number 10,290,523
- Issue date May 14, 2019
- ASM IP Holding B.V.
- Toshihisa Nozawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Production management apparatus, production management method and r...
- Patent number 10,108,163
- Issue date Oct 23, 2018
- TOSHIBA MEMORY CORPORATION
- Kensuke Takahashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Crystal oscillator and the use thereof in semiconductor fabrication
- Patent number 9,971,341
- Issue date May 15, 2018
- GLOBALFOUNDRIES Inc.
- Cyril Cabral
- G05 - CONTROLLING REGULATING
Information Patent Grant
Monitor data attachment to product lots for batch processes
- Patent number 9,939,808
- Issue date Apr 10, 2018
- Texas Instruments Incorporated
- Damien Thomas Gilmore
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND SYSTEMS FOR DETERMINING SOURCES OF ANOMALIES IN MANUFAC...
- Publication number 20240361759
- Publication date Oct 31, 2024
- Gauss Labs Inc.
- Byeongchan Lee
- G05 - CONTROLLING REGULATING
Information Patent Application
MACHINE AND DEEP LEARNING METHODS FOR SPECTRA-BASED METROLOGY AND P...
- Publication number 20240310737
- Publication date Sep 19, 2024
- NOVA LTD
- Barak BRINGOLTZ
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD, APPARATUS, AND SYSTEM WITH ABNORMALITY DETERMINATION
- Publication number 20240201673
- Publication date Jun 20, 2024
- Samsung Electronics Co., Ltd.
- Keunseo KIM
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
STATE MANAGEMENT SYSTEM, STATE MANAGEMENT METHOD, AND STORAGE MEDIUM
- Publication number 20230288917
- Publication date Sep 14, 2023
- TOKYO ELECTRON LIMITED
- Ryota AOI
- G05 - CONTROLLING REGULATING
Information Patent Application
MACHINE LEARNING PLATFORM FOR SUBSTRATE PROCESSING
- Publication number 20230089092
- Publication date Mar 23, 2023
- Applied Materials, Inc.
- David Everton Norman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE TREATMENT APPARATUS WITH FLEX-LL FUNCTION, AND SUBSTRATE...
- Publication number 20220359241
- Publication date Nov 10, 2022
- ASM IP HOLDING B.V.
- Yoshiyuki Umeoka
- G05 - CONTROLLING REGULATING
Information Patent Application
INPUT/OUTPUT (IO) HANDLING DURING UPDATE PROCESS FOR MANUFACTURING...
- Publication number 20220277974
- Publication date Sep 1, 2022
- Applied Materials, Inc.
- Eugene Lobovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, FAILURE PREDICTION METHOD FO...
- Publication number 20220181180
- Publication date Jun 9, 2022
- EBARA CORPORATION
- Jumpei FUJIKATA
- G05 - CONTROLLING REGULATING
Information Patent Application
RECIPE UPDATING METHOD
- Publication number 20220137603
- Publication date May 5, 2022
- TOKYO ELECTRON LIMITED
- Masafumi URAKAWA
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD OF HANDLING TRANSACTION REQUEST, AND SEMICONDUCTOR PRODUCTIO...
- Publication number 20220026885
- Publication date Jan 27, 2022
- CHANGXIN MEMORY TECHNOLOGIES, INC
- HUAN-CHENG LI
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND R...
- Publication number 20220019191
- Publication date Jan 20, 2022
- Kokusai Electric Corporation
- Kazuhide ASAI
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD FOR DETERMINING ROOT CAUSES OF EVENTS OF A SEMICONDUCTOR MAN...
- Publication number 20210397152
- Publication date Dec 23, 2021
- ASML NETHERLANDS B.V.
- Chang-Wei CHEN
- G05 - CONTROLLING REGULATING
Information Patent Application
ABATEMENT SYSTEM, ABATEMENT DEVICE, AND SYSTEM CONTROL DEVICE
- Publication number 20210302935
- Publication date Sep 30, 2021
- EDWARDS JAPAN LIMITED
- Kobayashi Kenichiro
- G05 - CONTROLLING REGULATING
Information Patent Application
TRANSPORT APPARATUS AND ADAPTER PENDANT
- Publication number 20210225685
- Publication date Jul 22, 2021
- Brooks Automation, Inc.
- Dana L. ATWOOD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20200257269
- Publication date Aug 13, 2020
- Kokusai Electric Corporation
- Masanori NAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND R...
- Publication number 20200192324
- Publication date Jun 18, 2020
- Kokusai Electric Corporation
- Kazuhide ASAI
- G05 - CONTROLLING REGULATING
Information Patent Application
METHODS & APPARATUS FOR CONTROLLING AN INDUSTRIAL PROCESS
- Publication number 20200050180
- Publication date Feb 13, 2020
- ASML NETHERLANDS B.V.
- Weitian KOU
- G05 - CONTROLLING REGULATING
Information Patent Application
SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR GENERATING A TRAINI...
- Publication number 20190347785
- Publication date Nov 14, 2019
- APPLIED MATERIALS ISRAEL LTD.
- Ohad SHAUBI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS FOR CALIBRATING SCALAR FIELD CONTRIBUTION VALUE...
- Publication number 20190332094
- Publication date Oct 31, 2019
- LAM RESEARCH CORPORATION
- Marcus Musselman
- G05 - CONTROLLING REGULATING
Information Patent Application
METHODS AND SYSTEM FOR CONTROLLING A SURFACE PROFILE OF A WAFER
- Publication number 20190270222
- Publication date Sep 5, 2019
- GLOBALWAFERS CO., LTD.
- Peter D. Albrecht
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
TRANSPORT APPARATUS AND ADAPTER PENDANT
- Publication number 20190019719
- Publication date Jan 17, 2019
- Brooks Automation, Inc.
- Dana L ATWOOD
- G05 - CONTROLLING REGULATING
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, FAILURE PREDICTION METHOD FO...
- Publication number 20180294174
- Publication date Oct 11, 2018
- EBARA CORPORATION
- Jumpei FUJIKATA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
WAFER PROCESSING APPARATUS, RECORDING MEDIUM AND WAFER CONVEYING ME...
- Publication number 20180269088
- Publication date Sep 20, 2018
- ASM IP HOLDING B.V.
- Toshihisa NOZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRYSTAL OSCILLATOR AND THE USE THEREOF IN SEMICONDUCTOR FABRICATION
- Publication number 20180231957
- Publication date Aug 16, 2018
- GLOBALFOUNDRIES INC.
- Cyril CABRAL
- G05 - CONTROLLING REGULATING
Information Patent Application
WORKPIECE PROCESSING APPARATUS AND WORKPIECE TRANSFER SYSTEM
- Publication number 20180101165
- Publication date Apr 12, 2018
- DAIHEN Corporation
- Koji KURAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEM FOR CONTROLLING A SURFACE PROFILE OF A WAFER
- Publication number 20180056545
- Publication date Mar 1, 2018
- SunEdison Semiconductor Limited (UEN201334164H)
- Peter D. Albrecht
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND R...
- Publication number 20170285613
- Publication date Oct 5, 2017
- Hitachi Kokusai Electric Inc.
- Kazuhide ASAI
- G05 - CONTROLLING REGULATING
Information Patent Application
MATCHING PROCESS CONTROLLERS FOR IMPROVED MATCHING OF PROCESS
- Publication number 20170168477
- Publication date Jun 15, 2017
- Applied Materials, Inc.
- James Robert Moyne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING LIQUID SUPPLY DEVICE, PROCESSING LIQUID SUPPLY METHOD, A...
- Publication number 20160246307
- Publication date Aug 25, 2016
- TOKYO ELECTRON LIMITED
- Tsuyoshi Nogami
- G05 - CONTROLLING REGULATING
Information Patent Application
PRODUCTION MANAGEMENT APPARATUS, PRODUCTION MANAGEMENT METHOD AND R...
- Publication number 20160070250
- Publication date Mar 10, 2016
- Kabushiki Kaisha Toshiba
- Kensuke TAKAHASHI
- G05 - CONTROLLING REGULATING

Wafer processing

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Wafer processing apparatus and wafer transfer method

Method of handling transaction request, and semiconductor productio...

Abatement system, abatement device, and system control device

Substrate processing apparatus, device management controller, and r...

Machine and deep learning methods for spectra-based metrology and p...

Method for determining root causes of events of a semiconductor man...

Treatment condition setting method, storage medium, and substrate t...

Substrate processing system

Transport apparatus and adapter pendant

Semiconductor manufacturing apparatus and method for transferring w...

Wireless substrate-like teaching sensor for semiconductor processing

Semiconductor manufacturing apparatus, failure prediction method fo...

Plasma processing apparatus

Substrate processing apparatus, device management controller, and r...

Systems and methods for calibrating scalar field contribution value...

Semiconductor process transport apparatus comprising an adapter pen...

Matching process controllers for improved matching of process

System, method and computer program product for generating a traini...

Across-wafer profile control in semiconductor processes

System and method for automating user interaction for semiconductor...

Substrate processing system

Methods and system for controlling a surface profile of a wafer

Workpiece processing apparatus and workpiece transfer system

Crystal oscillator and the use thereof in semiconductor fabrication

Systems and methods for calibrating scalar field contribution value...

Methods and system for controlling a surface profile of a wafer

Wafer processing apparatus, recording medium and wafer conveying me...

Production management apparatus, production management method and r...

Crystal oscillator and the use thereof in semiconductor fabrication

Monitor data attachment to product lots for batch processes

Patents Applicationslast 30 patents

METHODS AND SYSTEMS FOR DETERMINING SOURCES OF ANOMALIES IN MANUFAC...

MACHINE AND DEEP LEARNING METHODS FOR SPECTRA-BASED METROLOGY AND P...

METHOD, APPARATUS, AND SYSTEM WITH ABNORMALITY DETERMINATION

STATE MANAGEMENT SYSTEM, STATE MANAGEMENT METHOD, AND STORAGE MEDIUM

MACHINE LEARNING PLATFORM FOR SUBSTRATE PROCESSING

SUBSTRATE TREATMENT APPARATUS WITH FLEX-LL FUNCTION, AND SUBSTRATE...

INPUT/OUTPUT (IO) HANDLING DURING UPDATE PROCESS FOR MANUFACTURING...

SEMICONDUCTOR MANUFACTURING APPARATUS, FAILURE PREDICTION METHOD FO...

RECIPE UPDATING METHOD

METHOD OF HANDLING TRANSACTION REQUEST, AND SEMICONDUCTOR PRODUCTIO...

SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND R...

METHOD FOR DETERMINING ROOT CAUSES OF EVENTS OF A SEMICONDUCTOR MAN...

ABATEMENT SYSTEM, ABATEMENT DEVICE, AND SYSTEM CONTROL DEVICE

TRANSPORT APPARATUS AND ADAPTER PENDANT

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND R...

METHODS & APPARATUS FOR CONTROLLING AN INDUSTRIAL PROCESS

SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR GENERATING A TRAINI...

SYSTEMS AND METHODS FOR CALIBRATING SCALAR FIELD CONTRIBUTION VALUE...

METHODS AND SYSTEM FOR CONTROLLING A SURFACE PROFILE OF A WAFER

TRANSPORT APPARATUS AND ADAPTER PENDANT

SEMICONDUCTOR MANUFACTURING APPARATUS, FAILURE PREDICTION METHOD FO...

WAFER PROCESSING APPARATUS, RECORDING MEDIUM AND WAFER CONVEYING ME...

CRYSTAL OSCILLATOR AND THE USE THEREOF IN SEMICONDUCTOR FABRICATION

WORKPIECE PROCESSING APPARATUS AND WORKPIECE TRANSFER SYSTEM

METHODS AND SYSTEM FOR CONTROLLING A SURFACE PROFILE OF A WAFER

SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND R...

MATCHING PROCESS CONTROLLERS FOR IMPROVED MATCHING OF PROCESS

PROCESSING LIQUID SUPPLY DEVICE, PROCESSING LIQUID SUPPLY METHOD, A...

PRODUCTION MANAGEMENT APPARATUS, PRODUCTION MANAGEMENT METHOD AND R...