Wafers positioned vertically within cassette

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CPC
Y10S414/138

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YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S414/00Material or article handling

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Y10S414/138Wafers positioned vertically within cassette

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer device and method of operating the same
- Patent number 11,839,968
- Issue date Dec 12, 2023
- Kawasaki Jukogyo Kabushiki Kaisha
- Takayuki Fukushima
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Wafer transfer device
- Patent number 10,192,794
- Issue date Jan 29, 2019
- SK SILTRON CO., LTD.
- So Mi Kim
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate conveying apparatus fo...
- Patent number 9,624,046
- Issue date Apr 18, 2017
- SCREEN Holdings Co., Ltd.
- Ichiro Mitsuyoshi
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Apparatus and method for detecting substrates
- Patent number 9,202,732
- Issue date Dec 1, 2015
- Kawasaki Jukogyo Kabushiki Kaisha
- Masayuki Enomoto
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and apparatus for removing a vertically-oriented substrate f...
- Patent number 9,070,730
- Issue date Jun 30, 2015
- Varian Semiconductor Equipment Associates, Inc.
- John Robert Fairhurst
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Anodizing apparatus
- Patent number 8,992,746
- Issue date Mar 31, 2015
- Dainippon Screen Mfg. Co., Ltd.
- Yasuyoshi Miyaji
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Ancillary apparatus and method for loading glass substrates into a...
- Patent number 8,936,425
- Issue date Jan 20, 2015
- Tera Autotech Corporation
- Yi-Lung Lee
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Substrate support apparatus and vacuum processing apparatus
- Patent number 8,920,107
- Issue date Dec 30, 2014
- Canon Anelva Corporation
- Tadashi Ikeda
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing apparatus and substrate conveying apparatus fo...
- Patent number 8,851,821
- Issue date Oct 7, 2014
- Dainippon Screen Mfg. Co., Ltd.
- Ichiro Mitsuyoshi
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Processing system for process object and thermal processing method...
- Patent number 8,231,381
- Issue date Jul 31, 2012
- Tokyo Electron Limited
- Katsuyuki Hishiya
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Semiconductor wafer robot alignment system and method
- Patent number 8,215,890
- Issue date Jul 10, 2012
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuo-Shu Tseng
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate transfer apparatus, substrate transfer method, and storag...
- Patent number 8,029,224
- Issue date Oct 4, 2011
- Tokyo Electron Limited
- Yo Abe
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Batch forming apparatus, substrate processing system, batch forming...
- Patent number 8,002,511
- Issue date Aug 23, 2011
- Tokyo Electron Limited
- Yuji Kamikawa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Holder manufacturing method for loading substrate of semiconductor...
- Patent number 7,963,735
- Issue date Jun 21, 2011
- Terasemicon Corporation
- Taek Young Jang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Detachable edge ring for thermal processing support towers
- Patent number 7,736,436
- Issue date Jun 15, 2010
- Integrated Materials, Incorporated
- Tom L. Cadwell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical type of thermal processing apparatus and method of using t...
- Patent number 7,416,405
- Issue date Aug 26, 2008
- Tokyo Electron Limited
- Satoshi Asari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load lock chamber, processing system
- Patent number 7,236,229
- Issue date Jun 26, 2007
- Canon Kabushiki Kaisha
- Ryo Edo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load lock system for supercritical fluid cleaning
- Patent number 7,226,512
- Issue date Jun 5, 2007
- EKC Technology, Inc.
- Michael A. Fury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduced footprint tool for automated processing of microelectronic...
- Patent number 7,134,827
- Issue date Nov 14, 2006
- FSI International, Inc.
- Robert E. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing-purpose substrate detecting method and dev...
- Patent number 7,105,847
- Issue date Sep 12, 2006
- Tokyo Electron Limited
- Hiroki Oka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated system for handling and processing wafers within a carrier
- Patent number 7,067,018
- Issue date Jun 27, 2006
- Semitool, Inc.
- Jeffry Davis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer robot and inspection method for thin substrate
- Patent number 7,008,884
- Issue date Mar 7, 2006
- Kabushiki Kaisha Yaskawa Denki
- Hitoshi Wakizako
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Reduced footprint tool for automated processing of microelectronic...
- Patent number 6,979,165
- Issue date Dec 27, 2005
- FSI International, Inc.
- Robert E. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing system with wafer container docking and lo...
- Patent number 6,960,257
- Issue date Nov 1, 2005
- Semitool, Inc.
- Raymon F. Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer robot and inspection method for thin substrate
- Patent number 6,927,181
- Issue date Aug 9, 2005
- Kabushiki Kaisha Yaskawa Denki
- Hitoshi Wakizako
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Method and apparatus for accessing microelectronic workpiece contai...
- Patent number 6,878,955
- Issue date Apr 12, 2005
- Semitool, Inc.
- Randy Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage with two substrate buffer station
- Patent number 6,854,948
- Issue date Feb 15, 2005
- Nanometrics Incorporated
- Blaine R. Spady
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece sorter operating with modular bare workpiece stockers and...
- Patent number 6,848,876
- Issue date Feb 1, 2005
- Asyst Technologies, Inc.
- Daniel J. Babbs
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Method of manufacturing SOI wafer
- Patent number 6,844,242
- Issue date Jan 18, 2005
- Renesas Technology Corp.
- Hideki Naruoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Loading and unloading station for semiconductor processing installa...
- Patent number 6,837,663
- Issue date Jan 4, 2005
- Brooks Automation, Inc.
- Andreas Mages
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE CONVEYING APPARATUS FO...
- Publication number 20140377044
- Publication date Dec 25, 2014
- Dainippon Screen Mfg. Co., Ltd.
- Ichiro MITSUYOSHI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
METHOD AND APPARATUS FOR REMOVING A VERTICALLY-ORIENTED SUBSTRATE F...
- Publication number 20130089395
- Publication date Apr 11, 2013
- Varian Semiconductor Equipment Associates, Inc.
- John Robert Fairhurst
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANODIZING APPARATUS
- Publication number 20120138455
- Publication date Jun 7, 2012
- Yasuyoshi MIYAJI
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE SUPPORT APPARATUS AND VACUUM PROCESSING APPARATUS
- Publication number 20110286826
- Publication date Nov 24, 2011
- Canon ANELVA Corporation
- Tadashi Ikeda
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
MANUFACTURING METHOD OF A HOLDER OF A BOAT FOR LOADING A SUBSTRATE
- Publication number 20110217461
- Publication date Sep 8, 2011
- Taek Young Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR DETECTING SUBSTRATES
- Publication number 20110205354
- Publication date Aug 25, 2011
- Kawasaki Jukogyo Kabushiki Kaisha
- Masayuki Enomoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR WAFER ROBOT ALIGNMENT SYSTEM AND METHOD
- Publication number 20100234992
- Publication date Sep 16, 2010
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuo-Shu TSENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE CONVEYING APPARATUS FO...
- Publication number 20100068014
- Publication date Mar 18, 2010
- Ichiro Mitsuyoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing system for process object and thermal processing method...
- Publication number 20090092940
- Publication date Apr 9, 2009
- TOKYO ELECTRON LIMITED
- Katsuyuki Hishiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Batch forming apparatus, substrate processing system, batch forming...
- Publication number 20090010748
- Publication date Jan 8, 2009
- Yuji Kamikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate transfer apparatus, substrate transfer method, and storag...
- Publication number 20080232937
- Publication date Sep 25, 2008
- TOKYO ELECTRON LIMITED
- Yo Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Load lock system for supercritical fluid cleaning
- Publication number 20070246074
- Publication date Oct 25, 2007
- Michael A. Fury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vertical Type of Thermal Processing Apparatus and Method of Using t...
- Publication number 20070231763
- Publication date Oct 4, 2007
- Satoshi Asari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Detachable edge ring for thermal processing support towers
- Publication number 20070006803
- Publication date Jan 11, 2007
- Tom L. Cadwell
- C30 - CRYSTAL GROWTH
Information Patent Application
Holder manufacturing method for loading substrate of semiconductor...
- Publication number 20060239799
- Publication date Oct 26, 2006
- Taek Young Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing-purpose substrate detecting method and dev...
- Publication number 20050242305
- Publication date Nov 3, 2005
- TOKYO ELECTRON LIMITED
- Hiroki Oka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reduced footprint tool for automated processing of microelectronic...
- Publication number 20050063799
- Publication date Mar 24, 2005
- Robert E. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transfer robot and inspection method for thin substrate
- Publication number 20050036863
- Publication date Feb 17, 2005
- Kabushiki Kaisha Yaskawa Denki
- Hitoshi Wakizako
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Load lock system for supercritical fluid cleaning
- Publication number 20040255979
- Publication date Dec 23, 2004
- Michael A. Fury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Load lock chamber, processing system
- Publication number 20040175906
- Publication date Sep 9, 2004
- Ryo Edo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reticle storage system
- Publication number 20040158348
- Publication date Aug 12, 2004
- R. Foulke Development Company, LLC
- Richard F. Foulke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for accessing microelectronic workpiece contai...
- Publication number 20040140442
- Publication date Jul 22, 2004
- Randy Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR REDUCING CONTAMINATION OF SEMICONDUCTOR SUBSTRATES
- Publication number 20040137741
- Publication date Jul 15, 2004
- Robert Chebi
- B08 - CLEANING
Information Patent Application
Wafer handling for a reflow tool
- Publication number 20040076495
- Publication date Apr 22, 2004
- Robert D. Henderson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Transfer robot and inspection method for thin substrate
- Publication number 20040034976
- Publication date Feb 26, 2004
- Hitoshi Wakizako
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Loading and unloading station for semiconductor processing installa...
- Publication number 20030206795
- Publication date Nov 6, 2003
- Andreas Mages
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing system with wafer container docking and lo...
- Publication number 20030202871
- Publication date Oct 30, 2003
- Raymon F. Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum heat-treatment apparatus
- Publication number 20030113186
- Publication date Jun 19, 2003
- JH CORPORATION
- Noboru Hiramoto
- C21 - METALLURGY OF IRON
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20030106571
- Publication date Jun 12, 2003
- Yuji Kamikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reduced footprint tool for automated processing of microelectronic...
- Publication number 20030091410
- Publication date May 15, 2003
- Robert E. Larson
- H01 - BASIC ELECTRIC ELEMENTS

Wafers positioned vertically within cassette

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate transfer device and method of operating the same

Wafer transfer device

Substrate processing apparatus and substrate conveying apparatus fo...

Apparatus and method for detecting substrates

Method and apparatus for removing a vertically-oriented substrate f...

Anodizing apparatus

Ancillary apparatus and method for loading glass substrates into a...

Substrate support apparatus and vacuum processing apparatus

Substrate processing apparatus and substrate conveying apparatus fo...

Processing system for process object and thermal processing method...

Semiconductor wafer robot alignment system and method

Substrate transfer apparatus, substrate transfer method, and storag...

Batch forming apparatus, substrate processing system, batch forming...

Holder manufacturing method for loading substrate of semiconductor...

Detachable edge ring for thermal processing support towers

Vertical type of thermal processing apparatus and method of using t...

Load lock chamber, processing system

Load lock system for supercritical fluid cleaning

Reduced footprint tool for automated processing of microelectronic...

Semiconductor processing-purpose substrate detecting method and dev...

Automated system for handling and processing wafers within a carrier

Transfer robot and inspection method for thin substrate

Reduced footprint tool for automated processing of microelectronic...

Semiconductor processing system with wafer container docking and lo...

Transfer robot and inspection method for thin substrate

Method and apparatus for accessing microelectronic workpiece contai...

Stage with two substrate buffer station

Workpiece sorter operating with modular bare workpiece stockers and...

Method of manufacturing SOI wafer

Loading and unloading station for semiconductor processing installa...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE CONVEYING APPARATUS FO...

METHOD AND APPARATUS FOR REMOVING A VERTICALLY-ORIENTED SUBSTRATE F...

ANODIZING APPARATUS

SUBSTRATE SUPPORT APPARATUS AND VACUUM PROCESSING APPARATUS

MANUFACTURING METHOD OF A HOLDER OF A BOAT FOR LOADING A SUBSTRATE

APPARATUS AND METHOD FOR DETECTING SUBSTRATES

SEMICONDUCTOR WAFER ROBOT ALIGNMENT SYSTEM AND METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE CONVEYING APPARATUS FO...

Processing system for process object and thermal processing method...

Batch forming apparatus, substrate processing system, batch forming...

Substrate transfer apparatus, substrate transfer method, and storag...

Load lock system for supercritical fluid cleaning

Vertical Type of Thermal Processing Apparatus and Method of Using t...

Detachable edge ring for thermal processing support towers

Holder manufacturing method for loading substrate of semiconductor...

Semiconductor processing-purpose substrate detecting method and dev...

Reduced footprint tool for automated processing of microelectronic...

Transfer robot and inspection method for thin substrate

Load lock system for supercritical fluid cleaning

Load lock chamber, processing system

Reticle storage system

Method and apparatus for accessing microelectronic workpiece contai...

METHODS FOR REDUCING CONTAMINATION OF SEMICONDUCTOR SUBSTRATES

Wafer handling for a reflow tool

Transfer robot and inspection method for thin substrate

Loading and unloading station for semiconductor processing installa...

Semiconductor processing system with wafer container docking and lo...

Vacuum heat-treatment apparatus

Substrate processing apparatus and substrate processing method

Reduced footprint tool for automated processing of microelectronic...