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Wait state between two successive machining steps
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CPC
G05B2219/32048
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PHYSICS
G05
Controlling systems
G05B
CONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B2219/00
Program-control systems
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G05B2219/32048
Wait state between two successive machining steps
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last 30 patents
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Patent Grant
Method and system to compensate for scanner system timing variabili...
Patent number
7,139,631
Issue date
Nov 21, 2006
ASML Holding N.V.
Hilario L. Oh
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Method and apparatus for resolving conflicts in a substrate process...
Patent number
6,768,930
Issue date
Jul 27, 2004
ASML Holding N.V.
Hilario Oh
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Machining systems and control systems therefor
Patent number
4,473,883
Issue date
Sep 25, 1984
Toshiba Kikai Kabushiki Kaiha
Tetsu Yoshida
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
Method and system to compensate for scanner system timing variabili...
Publication number
20040241933
Publication date
Dec 2, 2004
Hilario L. Oh
G05 - CONTROLLING REGULATING
Information
Patent Application
Method and apparatus for resolving conflicts in a substrate process...
Publication number
20030154001
Publication date
Aug 14, 2003
Hilario Oh
G05 - CONTROLLING REGULATING