with ionisation by means of cold cathodes

Industry

CPC
H01J41/06

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas Discharge tubes for evacuation by diffusion of ions

Current Industry

H01J41/06with ionisation by means of cold cathodes

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Partial pressure gauge assembly for process contaminant detection u...
- Patent number 12,203,887
- Issue date Jan 21, 2025
- Inficon, Inc.
- Shawn M. Briglin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum module and vacuum apparatus and method for regeneration of a...
- Patent number 12,106,950
- Issue date Oct 1, 2024
- Edwards Vacuum LLC
- Marcus Hans Robert Thierley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for characterizing homodyne transmitters and r...
- Patent number 11,268,997
- Issue date Mar 8, 2022
- Keysight Technologies, Inc.
- Jan Verspecht
- G01 - MEASURING TESTING
Information Patent Grant
Ionization vacuum measuring cell
- Patent number 11,164,731
- Issue date Nov 2, 2021
- INFICON AG
- Martin Wüest
- G01 - MEASURING TESTING
Information Patent Grant
Fast pressure sensing system
- Patent number 11,101,120
- Issue date Aug 24, 2021
- SRI International
- Ashish Chaudhary
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ionization gauge and cartridge
- Patent number 11,092,506
- Issue date Aug 17, 2021
- Canon Anelva Corporation
- Yohsuke Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anode electrode shield for inverted magnetron cold cathode ionizati...
- Patent number 10,969,290
- Issue date Apr 6, 2021
- MKS Instruments, Inc.
- Gerardo A. Brucker
- G01 - MEASURING TESTING
Information Patent Grant
Ionization gauge and cartridge
- Patent number 10,969,291
- Issue date Apr 6, 2021
- Canon Anelva Corporation
- Yohsuke Kawasaki
- G01 - MEASURING TESTING
Information Patent Grant
Gas analysis with an inverted magnetron source
- Patent number 10,928,265
- Issue date Feb 23, 2021
- MKS Instruments, Inc.
- Gerardo A. Brucker
- G01 - MEASURING TESTING
Information Patent Grant
Ionization gauge and cartridge
- Patent number 10,914,649
- Issue date Feb 9, 2021
- Canon Anelva Corporation
- Yohsuke Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cold cathode ionization vacuum gauge
- Patent number 10,352,811
- Issue date Jul 16, 2019
- MKS Instruments, Inc.
- Gerardo A. Brucker
- G01 - MEASURING TESTING
Information Patent Grant
Cold cathode ionization vacuum gauge with multiple cathodes
- Patent number 10,337,940
- Issue date Jul 2, 2019
- MKS Instruments, Inc.
- Timothy C. Swinney
- G01 - MEASURING TESTING
Information Patent Grant
Cold cathode ionization gauge and cold cathode ionization gauge car...
- Patent number 10,222,287
- Issue date Mar 5, 2019
- Canon Anelva Corporation
- Yohsuke Kawasaki
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum gauge and contamination diagnosis method
- Patent number 10,094,728
- Issue date Oct 9, 2018
- National Institute of Advanced Industrial Science and Technology
- Hajime Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ionization vacuum measuring cell
- Patent number 9,945,749
- Issue date Apr 17, 2018
- Inficon GmbH
- Bernhard Andreaus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cold cathode ionization vacuum gauge
- Patent number 9,797,797
- Issue date Oct 24, 2017
- MKS Instruments, Inc.
- Gerardo A. Brucker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cold cathode ionization vacuum gauge
- Patent number 9,671,302
- Issue date Jun 6, 2017
- MKS Instruments, Inc.
- Gerardo A. Brucker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Long lifetime cold cathode ionization vacuum gauge design
- Patent number 9,588,004
- Issue date Mar 7, 2017
- MKS Instruments, Inc.
- Gerardo A. Brucker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ionization vacuum gauge
- Patent number 9,355,825
- Issue date May 31, 2016
- Tsinghua University
- Peng Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cold cathode ionization vacuum gauge and inner wall protection member
- Patent number 9,316,555
- Issue date Apr 19, 2016
- Canon Anelva Corporation
- Itaru Enomoto
- G01 - MEASURING TESTING
Information Patent Grant
Ionization vacuum measuring cell
- Patent number 9,116,065
- Issue date Aug 25, 2015
- Inficon GmbH
- Bernhard Andreaus
- G01 - MEASURING TESTING
Information Patent Grant
Ionization gauge having electron multiplier cold emission source
- Patent number 8,686,733
- Issue date Apr 1, 2014
- Brooks Automation, Inc.
- Gerardo A. Brucker
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum ionization gauge
- Patent number 8,614,581
- Issue date Dec 24, 2013
- Tsinghua University
- Yang Wei
- G01 - MEASURING TESTING
Information Patent Grant
Ionisation vacuum gauges and gauge heads
- Patent number 8,456,167
- Issue date Jun 4, 2013
- Edwards Limited
- Matthew Key
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ionization vacuum device
- Patent number 8,350,572
- Issue date Jan 8, 2013
- Ampere Inc.
- Fumio Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cold cathode pressure sensor
- Patent number 7,795,876
- Issue date Sep 14, 2010
- Inficon GmbH
- Daniel Wetzig
- G01 - MEASURING TESTING
Information Patent Grant
Cold-cathode ionization manometer having a longer service life due...
- Patent number 7,173,430
- Issue date Feb 6, 2007
- Otto-von-Guericke Universitaet Magdeburg
- Christian Edelmann
- G01 - MEASURING TESTING
Information Patent Grant
Ion implanting apparatus for manufacturing semiconductor devices
- Patent number 6,737,657
- Issue date May 18, 2004
- Samsung Electronics Co., Ltd.
- Sang-Kee Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Penning type gauge head with ignition aid
- Patent number 5,923,172
- Issue date Jul 13, 1999
- Leybold Aktiengesellschaft
- Gerhard Kuster
- G01 - MEASURING TESTING
Information Patent Grant
Device for starting and/or maintaining a discharge and cold cathode...
- Patent number 5,767,629
- Issue date Jun 16, 1998
- Commissariat a l'Energie Atomique
- Robert Baptist
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
VACUUM MODULE AND VACUUM APPARATUS AND METHOD FOR REGENERATION OF A...
- Publication number 20230088465
- Publication date Mar 23, 2023
- Edwards Vacuum LLC
- Marcus Hans Robert Thierley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IONIZATION GAUGE AND CARTRIDGE
- Publication number 20210123827
- Publication date Apr 29, 2021
- Canon ANELVA Corporation
- Yohsuke KAWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas Analysis with an Inverted Magnetron Source
- Publication number 20190368959
- Publication date Dec 5, 2019
- Gerardo A. Brucker
- G01 - MEASURING TESTING
Information Patent Application
IONIZATION VACUUM MEASURING CELL
- Publication number 20190043702
- Publication date Feb 7, 2019
- INFICON AG
- Martin WÜEST
- G01 - MEASURING TESTING
Information Patent Application
COLD CATHODE IONIZATION GAUGE AND COLD CATHODE IONIZATION GAUGE CAR...
- Publication number 20180259417
- Publication date Sep 13, 2018
- Canon ANELVA Corporation
- YOHSUKE KAWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COLD CATHODE IONIZATION VACUUM GAUGE
- Publication number 20180010977
- Publication date Jan 11, 2018
- MKS Instruments, Inc.
- Gerardo A. Brucker
- G01 - MEASURING TESTING
Information Patent Application
IONIZATION VACUUM MEASURING CELL
- Publication number 20160025587
- Publication date Jan 28, 2016
- INFICON GMBH
- Bernhard ANDREAUS
- G01 - MEASURING TESTING
Information Patent Application
COLD CATHODE IONIZATION VACUUM GAUGE
- Publication number 20150091580
- Publication date Apr 2, 2015
- MKS Instruments, Inc.
- Gerardo A. Brucker
- G01 - MEASURING TESTING
Information Patent Application
COLD CATHODE IONIZATION VACUUM GAUGE AND INNER WALL PROTECTION MEMBER
- Publication number 20140368210
- Publication date Dec 18, 2014
- Canon ANELVA Corporation
- ITARU ENOMOTO
- G01 - MEASURING TESTING
Information Patent Application
IONIZATION VACUUM MEASURING CELL
- Publication number 20140176150
- Publication date Jun 26, 2014
- INFICON GMBH
- Bernhard Andreaus
- G01 - MEASURING TESTING
Information Patent Application
IONIZATION VACUUM GAUGE
- Publication number 20130106431
- Publication date May 2, 2013
- PENG LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM IONIZATION GAUGE
- Publication number 20120169347
- Publication date Jul 5, 2012
- HON HAI Precision Industry CO., LTD.
- YANG WEI
- G01 - MEASURING TESTING
Information Patent Application
Ionization Gauge Having Electron Multiplier Cold Emission Source
- Publication number 20110234233
- Publication date Sep 29, 2011
- Gerardo A. Brucker
- G01 - MEASURING TESTING
Information Patent Application
IONISATION VACUUM GAUGES AND GAUGE HEADS
- Publication number 20110101988
- Publication date May 5, 2011
- Matthew Key
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COLD CATHODE IONIZATION VACUUM GAUGE, VACUUM PROCESSING APPARATUS I...
- Publication number 20100259273
- Publication date Oct 14, 2010
- Canon ANELVA Corporation
- Yohsuke Kawasaki
- G01 - MEASURING TESTING
Information Patent Application
Ionization vacuum device
- Publication number 20090134018
- Publication date May 28, 2009
- VACLAB, INC.
- Fumio Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cold Cathode Pressure Sensor
- Publication number 20080142710
- Publication date Jun 19, 2008
- Inficon gmbH
- Daniel Wetzig
- G01 - MEASURING TESTING
Information Patent Application
Cold-cathode ionisation manometer having a longer service life due...
- Publication number 20060012373
- Publication date Jan 19, 2006
- OTTO-VONGUERICKE-UNIVERSITAET MAGDEBURG
- Christian Edelmann
- G01 - MEASURING TESTING
Information Patent Application
ION IMPLANTING APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20040056214
- Publication date Mar 25, 2004
- Sang-Kee Kim
- H01 - BASIC ELECTRIC ELEMENTS

with ionisation by means of cold cathodes

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Partial pressure gauge assembly for process contaminant detection u...

Vacuum module and vacuum apparatus and method for regeneration of a...

Method and apparatus for characterizing homodyne transmitters and r...

Ionization vacuum measuring cell

Fast pressure sensing system

Ionization gauge and cartridge

Anode electrode shield for inverted magnetron cold cathode ionizati...

Ionization gauge and cartridge

Gas analysis with an inverted magnetron source

Ionization gauge and cartridge

Cold cathode ionization vacuum gauge

Cold cathode ionization vacuum gauge with multiple cathodes

Cold cathode ionization gauge and cold cathode ionization gauge car...

Vacuum gauge and contamination diagnosis method

Ionization vacuum measuring cell

Cold cathode ionization vacuum gauge

Cold cathode ionization vacuum gauge

Long lifetime cold cathode ionization vacuum gauge design

Ionization vacuum gauge

Cold cathode ionization vacuum gauge and inner wall protection member

Ionization vacuum measuring cell

Ionization gauge having electron multiplier cold emission source

Vacuum ionization gauge

Ionisation vacuum gauges and gauge heads

Ionization vacuum device

Cold cathode pressure sensor

Cold-cathode ionization manometer having a longer service life due...

Ion implanting apparatus for manufacturing semiconductor devices

Penning type gauge head with ignition aid

Device for starting and/or maintaining a discharge and cold cathode...

Patents Applicationslast 30 patents

VACUUM MODULE AND VACUUM APPARATUS AND METHOD FOR REGENERATION OF A...

IONIZATION GAUGE AND CARTRIDGE

Gas Analysis with an Inverted Magnetron Source

IONIZATION VACUUM MEASURING CELL

COLD CATHODE IONIZATION GAUGE AND COLD CATHODE IONIZATION GAUGE CAR...

COLD CATHODE IONIZATION VACUUM GAUGE

IONIZATION VACUUM MEASURING CELL

COLD CATHODE IONIZATION VACUUM GAUGE

COLD CATHODE IONIZATION VACUUM GAUGE AND INNER WALL PROTECTION MEMBER

IONIZATION VACUUM MEASURING CELL

IONIZATION VACUUM GAUGE

VACUUM IONIZATION GAUGE

Ionization Gauge Having Electron Multiplier Cold Emission Source

IONISATION VACUUM GAUGES AND GAUGE HEADS

COLD CATHODE IONIZATION VACUUM GAUGE, VACUUM PROCESSING APPARATUS I...

Ionization vacuum device

Cold Cathode Pressure Sensor

Cold-cathode ionisation manometer having a longer service life due...

ION IMPLANTING APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES