with magnetic or electrostatic means

Industry

CPC
Y10T279/23

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Parent Industries

YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION Y10T279/00Chucks or sockets

Current Industry

Y10T279/23with magnetic or electrostatic means

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Multipurpose chuck
- Patent number 12,076,794
- Issue date Sep 3, 2024
- Hammill Manufacturing Company, Co-op Tool Division
- Greg Lentner
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrostatic chuck and plasma processing apparatus
- Patent number 11,476,095
- Issue date Oct 18, 2022
- Tokyo Electron Limited
- Shin Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for spatial and temporal control of temperature on a subs...
- Patent number 11,302,556
- Issue date Apr 12, 2022
- Lam Research Corporation
- Anthony J. Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High temperature electrostatic chuck bonding adhesive
- Patent number 11,264,261
- Issue date Mar 1, 2022
- Applied Materials, Inc.
- Jennifer Y. Sun
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Electrostatic chuck and manufacturing method therefor
- Patent number 11,251,061
- Issue date Feb 15, 2022
- KSM COMPONENT CO., LTD.
- Yun Ho Kim
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Methods of milling a piece of raw steel stock into a machine-ready...
- Patent number 11,207,739
- Issue date Dec 28, 2021
- Steel 21, LLC
- Kimm Eric Slater
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wafer support device and method for removing lift pin therefrom
- Patent number 10,998,219
- Issue date May 4, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Zong-Han Hu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods of minimizing wafer backside damage in semiconductor wafer...
- Patent number 10,971,390
- Issue date Apr 6, 2021
- Applied Materials, Inc.
- Abdul Aziz Khaja
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 10,910,252
- Issue date Feb 2, 2021
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge ring assembly for a substrate support in a plasma processing c...
- Patent number 10,847,347
- Issue date Nov 24, 2020
- Applied Materials, Inc.
- Hamid Noorbakhsh
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Process kit components for use with an extended and independent RF...
- Patent number 10,825,708
- Issue date Nov 3, 2020
- Applied Materials, Inc.
- Valentin Todorow
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electrostatic chuck and plasma processing apparatus
- Patent number 10,825,660
- Issue date Nov 3, 2020
- Tokyo Electron Limited
- Shin Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for de-chucking a workpiece using a swing volt...
- Patent number 10,784,132
- Issue date Sep 22, 2020
- Applied Materials, Inc.
- Haitao Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mounting table and plasma processing apparatus
- Patent number 10,714,370
- Issue date Jul 14, 2020
- Tokyo Electron Limited
- Taketoshi Tomioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Micro device electrostatic chuck
- Patent number 10,665,493
- Issue date May 26, 2020
- MIKRO MESA TECHNOLOGY CO., LTD.
- Li-Yi Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for spatial and temporal control of temperature on a subs...
- Patent number 10,636,689
- Issue date Apr 28, 2020
- Lam Research Corporation
- Anthony J. Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of milling a piece of raw steel stock into a machine-ready...
- Patent number 10,603,727
- Issue date Mar 31, 2020
- Steel 21, LLC
- Kimm Eric Slater
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for semiconductor wafer leveling, force balanc...
- Patent number 10,580,678
- Issue date Mar 3, 2020
- Suss Microtec Lithography, GmbH
- Hale Johnson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chuck for a high precision machine tool
- Patent number 10,507,532
- Issue date Dec 17, 2019
- WIELANDTS UPMT
- Marc Wielandts
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Cooling element for an electrostatic chuck assembly
- Patent number 10,490,435
- Issue date Nov 26, 2019
- Applied Materials, Inc.
- Michael D. Willwerth
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Multiple tool
- Patent number 10,421,137
- Issue date Sep 24, 2019
- Pass Stanztechnik AG
- Stefan Kraft
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma processing apparatus
- Patent number 10,410,902
- Issue date Sep 10, 2019
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 10,388,558
- Issue date Aug 20, 2019
- Tokyo Electron Limited
- Yasuharu Sasaki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Electrostatic chuck and wafer processing apparatus
- Patent number 10,373,853
- Issue date Aug 6, 2019
- Toto Ltd.
- Kazuki Anada
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Mounting table and plasma processing apparatus
- Patent number 10,340,174
- Issue date Jul 2, 2019
- Tokyo Electron Limited
- Shin Yamaguchi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Multi-zone heated ESC with independent edge zones
- Patent number 10,332,772
- Issue date Jun 25, 2019
- Applied Materials, Inc.
- Kyle Tantiwong
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and apparatus for de-chucking a workpiece using a swing volt...
- Patent number 10,242,893
- Issue date Mar 26, 2019
- Applied Materials, Inc.
- Haitao Wang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Work holder and work machining method
- Patent number 10,207,332
- Issue date Feb 19, 2019
- JTEKT Corporation
- Takashi Yokoyama
- B24 - GRINDING POLISHING
Information Patent Grant
High speed low temperature method for manufacturing and repairing s...
- Patent number 10,153,183
- Issue date Dec 11, 2018
- Component Re-Engineering Company, Inc.
- Alfred Grant Elliot
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods for bonding substrates
- Patent number 10,131,126
- Issue date Nov 20, 2018
- Applied Materials, Inc.
- Kadthala Ramaya Narendrnath
- B32 - LAYERED PRODUCTS

Patents Applicationslast 30 patents

Information Patent Application
EDGE RING ASSEMBLY FOR A SUBSTRATE SUPPORT IN A PLASMA PROCESSING C...
- Publication number 20210043428
- Publication date Feb 11, 2021
- Applied Materials, Inc.
- Hamid NOORBAKHSH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND PLASMA PROCESSING APPARATUS
- Publication number 20210005432
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Shin YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...
- Publication number 20200251370
- Publication date Aug 6, 2020
- LAM RESEARCH CORPORATION
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190326153
- Publication date Oct 24, 2019
- TOKYO ELECTRON LIMITED
- Yasuharu SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS KIT COMPONENTS FOR USE WITH AN EXTENDED AND INDEPENDENT RF...
- Publication number 20190221463
- Publication date Jul 18, 2019
- Applied Materials, Inc.
- VALENTIN TODOROW
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
METHOD AND APPARATUS FOR DE-CHUCKING A WORKPIECE USING A SWING VOLT...
- Publication number 20190189481
- Publication date Jun 20, 2019
- Applied Materials, Inc.
- Haitao Wang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20180204756
- Publication date Jul 19, 2018
- TOKYO ELECTRON LIMITED
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180130695
- Publication date May 10, 2018
- SCREEN Holdings Co., Ltd.
- Noriyuki KIKUMOTO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Apparatus and Method for Semiconductor Wafer Leveling, Force Balanc...
- Publication number 20180102270
- Publication date Apr 12, 2018
- SUSS MICROTEC LITHOGRAPHY, GMBH
- HALE JOHNSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20170345691
- Publication date Nov 30, 2017
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY HAVING METAL BONDED PROTECTIVE LAYER
- Publication number 20170271179
- Publication date Sep 21, 2017
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTATION PRESERVING QUICK CONNECT DEVICE
- Publication number 20140360305
- Publication date Dec 11, 2014
- Kevin Olds
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
ELECTROMAGNETIC CLAMPING METHOD
- Publication number 20140360003
- Publication date Dec 11, 2014
- Branko Sarh
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
MULTI-ZONED PLASMA PROCESSING ELECTROSTATIC CHUCK WITH IMPROVED TEM...
- Publication number 20140346743
- Publication date Nov 27, 2014
- Hamid Tavassoli
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...
- Publication number 20140332161
- Publication date Nov 13, 2014
- Anthony J. Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLING PEDESTAL WITH COATING OF DIAMOND-LIKE CARBON
- Publication number 20140326184
- Publication date Nov 6, 2014
- Applied Materials, Inc.
- Vijay D. Parkhe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE HOLDER ASSEMBLY FOR CONTROLLED LAYER TRANSFER
- Publication number 20140312576
- Publication date Oct 23, 2014
- International Business Machines Corporation
- Stephen W. Bedell
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE HOLDER ASSEMBLY FOR CONTROLLED LAYER TRANSFER
- Publication number 20140312094
- Publication date Oct 23, 2014
- International Business Machines Corporation
- Stephen W. Bedell
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING DEVICE
- Publication number 20140300064
- Publication date Oct 9, 2014
- Tocalo Co., Ltd.
- Mitsuharu Inaba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOUNTING TABLE AND PLASMA PROCESSING APPARATUS
- Publication number 20140238609
- Publication date Aug 28, 2014
- TOKYO ELECTRON LIMITED
- Taketoshi TOMIOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOUNTING TABLE AND PLASMA PROCESSING APPARATUS
- Publication number 20140202635
- Publication date Jul 24, 2014
- TOKYO ELECTRON LIMITED
- Shin YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE MANAGEMENT OF ALUMINIUM NITRIDE ELECTROSTATIC CHUCK
- Publication number 20140203526
- Publication date Jul 24, 2014
- Applied Materials, Inc.
- Sumanth Banda
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Application
MICRO DEVICE TRANSFER SYSTEM WITH PIVOT MOUNT
- Publication number 20140169924
- Publication date Jun 19, 2014
- LUXVUE TECHNOLOGY CORPORATION
- Dariusz Golda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY HAVING METAL BONDED PROTECTIVE LAYER
- Publication number 20140159325
- Publication date Jun 12, 2014
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPLIANT MICRO DEVICE TRANSFER HEAD ARRAY WITH METAL ELECTRODES
- Publication number 20140159324
- Publication date Jun 12, 2014
- LUXVUE TECHNOLOGY CORPORATION
- Dariusz Golda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Apparatus and Method for Carrying Substrates
- Publication number 20140150246
- Publication date Jun 5, 2014
- Plasma-Therm LLC
- David Johnson
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
DIELECTRIC LAYER FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK
- Publication number 20140103612
- Publication date Apr 17, 2014
- NIPPON TUNGSTEN CO., LTD.
- Kouta Tsutsumi
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
METHODS FOR BONDING SUBSTRATES
- Publication number 20140099485
- Publication date Apr 10, 2014
- Kadthala Ramaya NARENDRNATH
- B32 - LAYERED PRODUCTS
Information Patent Application
WAFER SUPPORT DEVICE
- Publication number 20140057052
- Publication date Feb 27, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tien-Chih Cheng
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
ELECTROSTATIC CHUCK DEVICE
- Publication number 20140042716
- Publication date Feb 13, 2014
- Sumitomo Osaka Cement Co., Ltd.
- Yukio Miura
- H01 - BASIC ELECTRIC ELEMENTS

with magnetic or electrostatic means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Multipurpose chuck

Electrostatic chuck and plasma processing apparatus

Apparatus for spatial and temporal control of temperature on a subs...

High temperature electrostatic chuck bonding adhesive

Electrostatic chuck and manufacturing method therefor

Methods of milling a piece of raw steel stock into a machine-ready...

Wafer support device and method for removing lift pin therefrom

Methods of minimizing wafer backside damage in semiconductor wafer...

Plasma processing apparatus

Edge ring assembly for a substrate support in a plasma processing c...

Process kit components for use with an extended and independent RF...

Electrostatic chuck and plasma processing apparatus

Method and apparatus for de-chucking a workpiece using a swing volt...

Mounting table and plasma processing apparatus

Micro device electrostatic chuck

Apparatus for spatial and temporal control of temperature on a subs...

Methods of milling a piece of raw steel stock into a machine-ready...

Apparatus and method for semiconductor wafer leveling, force balanc...

Chuck for a high precision machine tool

Cooling element for an electrostatic chuck assembly

Multiple tool

Plasma processing apparatus

Plasma processing apparatus

Electrostatic chuck and wafer processing apparatus

Mounting table and plasma processing apparatus

Multi-zone heated ESC with independent edge zones

Method and apparatus for de-chucking a workpiece using a swing volt...

Work holder and work machining method

High speed low temperature method for manufacturing and repairing s...

Methods for bonding substrates

Patents Applicationslast 30 patents

EDGE RING ASSEMBLY FOR A SUBSTRATE SUPPORT IN A PLASMA PROCESSING C...

ELECTROSTATIC CHUCK AND PLASMA PROCESSING APPARATUS

APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...

PLASMA PROCESSING APPARATUS

PROCESS KIT COMPONENTS FOR USE WITH AN EXTENDED AND INDEPENDENT RF...

METHOD AND APPARATUS FOR DE-CHUCKING A WORKPIECE USING A SWING VOLT...

PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

Apparatus and Method for Semiconductor Wafer Leveling, Force Balanc...

SUBSTRATE SUPPORT ASSEMBLY

SUBSTRATE SUPPORT ASSEMBLY HAVING METAL BONDED PROTECTIVE LAYER

ROTATION PRESERVING QUICK CONNECT DEVICE

ELECTROMAGNETIC CLAMPING METHOD

MULTI-ZONED PLASMA PROCESSING ELECTROSTATIC CHUCK WITH IMPROVED TEM...

APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...

COOLING PEDESTAL WITH COATING OF DIAMOND-LIKE CARBON

SUBSTRATE HOLDER ASSEMBLY FOR CONTROLLED LAYER TRANSFER

SUBSTRATE HOLDER ASSEMBLY FOR CONTROLLED LAYER TRANSFER

MEMBER FOR SEMICONDUCTOR MANUFACTURING DEVICE

MOUNTING TABLE AND PLASMA PROCESSING APPARATUS

MOUNTING TABLE AND PLASMA PROCESSING APPARATUS

TEMPERATURE MANAGEMENT OF ALUMINIUM NITRIDE ELECTROSTATIC CHUCK

MICRO DEVICE TRANSFER SYSTEM WITH PIVOT MOUNT

SUBSTRATE SUPPORT ASSEMBLY HAVING METAL BONDED PROTECTIVE LAYER

COMPLIANT MICRO DEVICE TRANSFER HEAD ARRAY WITH METAL ELECTRODES

Apparatus and Method for Carrying Substrates

DIELECTRIC LAYER FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK

METHODS FOR BONDING SUBSTRATES

WAFER SUPPORT DEVICE

ELECTROSTATIC CHUCK DEVICE