with means for adjusting the shape of the mirror surface

Industry

CPC
G02B7/185

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

GPHYSICS G02Optics G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements

Current Industry

G02B7/185with means for adjusting the shape of the mirror surface

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for generating extreme ultraviolet radiation
- Patent number 12,133,319
- Issue date Oct 29, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Ya Cheng
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Capacitive charge based self-sensing and position observer for elec...
- Patent number 11,782,263
- Issue date Oct 10, 2023
- Infineon Technologies AG
- Richard Schroedter
- G02 - OPTICS
Information Patent Grant
Capacitive charge based self-sensing and position observer for elec...
- Patent number 11,467,394
- Issue date Oct 11, 2022
- Infineon Technologies AG
- Richard Schroedter
- G02 - OPTICS
Information Patent Grant
Apparatus and method for generating extreme ultraviolet radiation
- Patent number 11,212,903
- Issue date Dec 28, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ting-Ya Cheng
- G02 - OPTICS
Information Patent Grant
Device for variably influencing the wavefront of a beam, said devic...
- Patent number 10,634,902
- Issue date Apr 28, 2020
- Jenoptik Optical Systems GmbH
- Torsten Erbe
- G02 - OPTICS
Information Patent Grant
Deformable mirror with variable curvature and method for manufactur...
- Patent number 10,578,860
- Issue date Mar 3, 2020
- ALPAO
- Julien Gérard Ernest Charton
- F24 - HEATING RANGES VENTILATING
Information Patent Grant
Deformable mirror with magnetic system for configuring a reflective...
- Patent number 10,495,872
- Issue date Dec 3, 2019
- King Fahd University of Petroleum and Minnerals
- Ammar Alzaydi
- G02 - OPTICS
Information Patent Grant
Electro-magnetic actuation rotational adaptive mirror
- Patent number 10,365,473
- Issue date Jul 30, 2019
- King Fahd University of Petroleum & Minerals
- Ammar Alzaydi
- G02 - OPTICS
Information Patent Grant
Lightweight adaptive metal cooled mirrors
- Patent number 10,359,603
- Issue date Jul 23, 2019
- The Board of Trustees of the University of Alabama, for and on behalf of the...
- Patrick Reardon
- G02 - OPTICS
Information Patent Grant
Vehicle and head-up displaying system and projector therefor
- Patent number 10,338,386
- Issue date Jul 2, 2019
- BYD Company Limited
- Li Ling
- G02 - OPTICS
Information Patent Grant
Device for measuring an aberration, imaging systems and methods for...
- Patent number 10,324,306
- Issue date Jun 18, 2019
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- René Berlich
- G01 - MEASURING TESTING
Information Patent Grant
Arrangement for actuating an element in a microlithographic project...
- Patent number 10,185,221
- Issue date Jan 22, 2019
- Carl Zeiss SMT GmbH
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Grant
Method and device for correcting the thermoelastic effects, notably...
- Patent number 9,618,736
- Issue date Apr 11, 2017
- Thales
- Jean-Francois Blanc
- G02 - OPTICS
Information Patent Grant
Arrangement for actuating an element in a microlithographic project...
- Patent number 9,568,837
- Issue date Feb 14, 2017
- Carl Zeiss SMT GmbH
- Sascha Bleidistel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for adjusting curvature of mirror while avoiding movement of...
- Patent number 9,435,999
- Issue date Sep 6, 2016
- Postech Academy Industry Foundation
- Kye Hwan Gil
- G02 - OPTICS
Information Patent Grant
High correctability deformable mirror
- Patent number 9,314,980
- Issue date Apr 19, 2016
- Goodrich Corporation
- Bari M. Southard
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Optical system, optical module and method of manufacture thereof
- Patent number 9,140,897
- Issue date Sep 22, 2015
- NATIONAL TAIWAN UNIVERSITY
- Guo-Dung Su
- G02 - OPTICS
Information Patent Grant
Arrangement for actuating an element in a microlithographic project...
- Patent number 8,786,826
- Issue date Jul 22, 2014
- Carl Zeiss SMT GmbH
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Grant
Mirror actuator position sensor systems and methods
- Patent number 7,075,700
- Issue date Jul 11, 2006
- The Boeing Company
- Steven E. Muenter
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus device manufacturing method and device manuf...
- Patent number 6,967,756
- Issue date Nov 22, 2005
- ASML Netherlands B.V.
- Antonius Johannes Josephus Van Dijsseldonk
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
- Patent number 6,765,712
- Issue date Jul 20, 2004
- ASML Netherlands B.V.
- Antonius Johannes Josephus Van Dijsseldonk
- G02 - OPTICS
Information Patent Grant
Apparatus, system, and method for active compensation of aberration...
- Patent number 6,411,426
- Issue date Jun 25, 2002
- ASML, US, Inc.
- Michael F. Meehan
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION
- Publication number 20240381515
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Ya CHENG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY
- Publication number 20240012334
- Publication date Jan 11, 2024
- Carl Zeiss SMT GMBH
- Markus Raab
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ADAPTIVE OPTICAL SYSTEM WITH IMPROVED RESPONSE TIME, RELATED USE AN...
- Publication number 20230003995
- Publication date Jan 5, 2023
- ALPAO
- Julien Gérard Ernest CHARTON
- G02 - OPTICS
Information Patent Application
CAPACITIVE CHARGE BASED SELF-SENSING AND POSITION OBSERVER FOR ELEC...
- Publication number 20220334377
- Publication date Oct 20, 2022
- INFINEON TECHNOLOGIES AG
- Richard SCHROEDTER
- G02 - OPTICS
Information Patent Application
MIRROR ASSEMBLY HAVING A HYDROGEN BARRIER AND OPTICAL ASSEMBLY
- Publication number 20220206401
- Publication date Jun 30, 2022
- Carl Zeiss SMT GMBH
- Alexandra PAZIDIS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION
- Publication number 20220124901
- Publication date Apr 21, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Ya CHENG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CAPACITIVE CHARGE BASED SELF-SENSING AND POSITION OBSERVER FOR ELEC...
- Publication number 20210271072
- Publication date Sep 2, 2021
- INFINEON TECHNOLOGIES AG
- Richard SCHROEDTER
- G02 - OPTICS
Information Patent Application
DEFORMABLE MIRROR SYSTEM
- Publication number 20190310459
- Publication date Oct 10, 2019
- KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
- Ammar ALZAYDI
- G02 - OPTICS
Information Patent Application
DEVICE FOR MEASURING AN ABERRATION, IMAGING SYSTEMS AND METHODS FOR...
- Publication number 20170371176
- Publication date Dec 28, 2017
- FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
- René BERLICH
- G02 - OPTICS
Information Patent Application
VEHICLE AND HEAD-UP DISPLAYING SYSTEM AND PROJECTOR THEREFOR
- Publication number 20170351093
- Publication date Dec 7, 2017
- BYD Company Limited
- Li LING
- G02 - OPTICS
Information Patent Application
ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...
- Publication number 20140300882
- Publication date Oct 9, 2014
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Application
HIGH CORRECTABILITY DEFORMABLE MIRROR
- Publication number 20140285880
- Publication date Sep 25, 2014
- Bari M. Southard
- G02 - OPTICS
Information Patent Application
ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...
- Publication number 20140204356
- Publication date Jul 24, 2014
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Application
DEVICE FOR ADJUSTING CURVATURE OF MIRROR, AND MIRROR ADJUSTMENT SYS...
- Publication number 20140049850
- Publication date Feb 20, 2014
- POSTECH ACADEMY- INDUSTRY FOUNDATION
- Kye Hwan Gil
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR CORRECTING THE THERMOELASTIC EFFECTS, NOTABLY...
- Publication number 20130329286
- Publication date Dec 12, 2013
- Jean-Francois BLANC
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM, OPTICAL MODULE AND METHOD OF MANUFACTURE THEREOF
- Publication number 20120287519
- Publication date Nov 15, 2012
- National Taiwan University
- Guo-Dung SU
- G02 - OPTICS
Information Patent Application
Mirror actuator position sensor systems and methods
- Publication number 20050286111
- Publication date Dec 29, 2005
- Steven E. Muenter
- G02 - OPTICS
Information Patent Application
Lithographic apparatus device manufacturing method and device manuf...
- Publication number 20040202898
- Publication date Oct 14, 2004
- ASML NETHERLANDS B.V.
- Antonius Johannes Josephus Van Dijsseldonk
- G02 - OPTICS
Information Patent Application
Apparatus, system, and method for active compensation of aberration...
- Publication number 20020089734
- Publication date Jul 11, 2002
- Michael F. Meehan
- G02 - OPTICS
Information Patent Application
Lithographic apparatus, device manufacturing method, and device man...
- Publication number 20020011573
- Publication date Jan 31, 2002
- Antonius Johannes Josephus Van Dijsseldonk
- G02 - OPTICS

with means for adjusting the shape of the mirror surface

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus and method for generating extreme ultraviolet radiation

Capacitive charge based self-sensing and position observer for elec...

Capacitive charge based self-sensing and position observer for elec...

Apparatus and method for generating extreme ultraviolet radiation

Device for variably influencing the wavefront of a beam, said devic...

Deformable mirror with variable curvature and method for manufactur...

Deformable mirror with magnetic system for configuring a reflective...

Electro-magnetic actuation rotational adaptive mirror

Lightweight adaptive metal cooled mirrors

Vehicle and head-up displaying system and projector therefor

Device for measuring an aberration, imaging systems and methods for...

Arrangement for actuating an element in a microlithographic project...

Method and device for correcting the thermoelastic effects, notably...

Arrangement for actuating an element in a microlithographic project...

Device for adjusting curvature of mirror while avoiding movement of...

High correctability deformable mirror

Optical system, optical module and method of manufacture thereof

Arrangement for actuating an element in a microlithographic project...

Mirror actuator position sensor systems and methods

Lithographic apparatus device manufacturing method and device manuf...

Lithographic apparatus, device manufacturing method, and device man...

Apparatus, system, and method for active compensation of aberration...

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY

ADAPTIVE OPTICAL SYSTEM WITH IMPROVED RESPONSE TIME, RELATED USE AN...

CAPACITIVE CHARGE BASED SELF-SENSING AND POSITION OBSERVER FOR ELEC...

MIRROR ASSEMBLY HAVING A HYDROGEN BARRIER AND OPTICAL ASSEMBLY

APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION

CAPACITIVE CHARGE BASED SELF-SENSING AND POSITION OBSERVER FOR ELEC...

DEFORMABLE MIRROR SYSTEM

DEVICE FOR MEASURING AN ABERRATION, IMAGING SYSTEMS AND METHODS FOR...

VEHICLE AND HEAD-UP DISPLAYING SYSTEM AND PROJECTOR THEREFOR

ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...

HIGH CORRECTABILITY DEFORMABLE MIRROR

ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...

DEVICE FOR ADJUSTING CURVATURE OF MIRROR, AND MIRROR ADJUSTMENT SYS...

METHOD AND DEVICE FOR CORRECTING THE THERMOELASTIC EFFECTS, NOTABLY...

OPTICAL SYSTEM, OPTICAL MODULE AND METHOD OF MANUFACTURE THEREOF

Mirror actuator position sensor systems and methods

Lithographic apparatus device manufacturing method and device manuf...

Apparatus, system, and method for active compensation of aberration...

Lithographic apparatus, device manufacturing method, and device man...