150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment

Information

  • Patent Grant
  • D368802
  • Patent Number
    D368,802
  • Date Filed
    Thursday, October 13, 1994
    30 years ago
  • Date Issued
    Tuesday, April 16, 1996
    28 years ago
Abstract
Description
Claims
  • The ornamental design for a "150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment", as shown and described.
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Foreign Referenced Citations (1)
Number Date Country
WO9216964 Oct 1992 WOX