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2940878
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Information
Patent Grant
2940878
References
Source
Patent Number
2,940,878
Date Filed
Not available
Date Issued
Tuesday, June 14, 1960
66 years ago
CPC
B65G65/00 - Loading or unloading
C23C10/18 - using liquids
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
B65G2814/0337 - Paddle wheels
US Classifications
438 - Semiconductor device manufacturing: process
117 - Single-crystal, oriented-crystal, and epitaxy growth processes
228 - Metal fusion bonding
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