3152022

Information

• Patent Grant
• 3152022

• References
• Source

• Patent Number

  3,152,022

• Date Filed

  Not available

• Date Issued

  Tuesday, October 6, 1964
  60 years ago

• CPC

  • C30B15/30 - Mechanisms for rotating or moving either the melt or the crystal
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • Y10S117/903 - Dendrite or web or cage technique
  • Y10S148/021 - Continuous process
  • Y10S148/025 - Deposition multi-step
  • Y10S148/15 - Silicon on sapphire SOS
  • Y10S438/913 - Diverse treatments performed in unitary chamber

• US Classifications

  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 023 - Chemistry: physical processes
  • 148 - Metal treatment
  • 438 - Semiconductor device manufacturing: process