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3202854
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Information
Patent Grant
3202854
References
Source
Patent Number
3,202,854
Date Filed
Not available
Date Issued
Tuesday, August 24, 1965
59 years ago
CPC
H01J29/413 - for writing and reading of charge pattern on opposite sides of the target
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
US Classifications
313 - Electric lamp and discharge devices
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