3279964

Information

• Patent Grant
• 3279964

• References
• Source

• Patent Number

  3,279,964

• Date Filed

  Not available

• Date Issued

  Tuesday, October 18, 1966
  58 years ago

• CPC

  • C30B31/106 - Continuous processes
  • Y10S438/907 - Continuous processing

• US Classifications

  • 438 - Semiconductor device manufacturing: process