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3365336
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Information
Patent Grant
3365336
References
Source
Patent Number
3,365,336
Date Filed
Not available
Date Issued
Tuesday, January 23, 1968
56 years ago
CPC
C11D3/062 - Special methods concerning phosphates
C01B25/445 - of alkali metals
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
US Classifications
117 - Single-crystal, oriented-crystal, and epitaxy growth processes
118 - Coating apparatus
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