3515310

Information

• Patent Grant
• 3515310

• References
• Source

• Patent Number

  3,515,310

• Date Filed

  Not available

• Date Issued

  Tuesday, June 2, 1970
  54 years ago

• CPC

  • H01L21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
  • B23Q7/04 - by means of grippers
  • B23Q2707/04 - by means of grippers also magnetic or pneumatic gripping

• US Classifications

  • 221 - Article dispensing